9/1/2011	9:21:50 AM	Main Vac valve closed
9/1/2011	9:21:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	9:21:59 AM	Recipe started at 9:21 AM
9/1/2011	9:21:59 AM	Helium valve closed
9/1/2011	9:21:59 AM	H2 valve closed
9/1/2011	9:21:59 AM	BCl3 valve closed
9/1/2011	9:21:59 AM	PH3 valve closed
9/1/2011	9:21:59 AM	SiCl4 pre valve closed
9/1/2011	9:21:59 AM	SiCl4 post valve closed
9/1/2011	9:21:59 AM	Main Vac valve closed
9/1/2011	9:21:59 AM	Bypass valve closed
9/1/2011	9:21:59 AM	Bubbler valve closed
9/1/2011	9:21:59 AM	Helium MFC set to  0.000000
9/1/2011	9:21:59 AM	H2 MFC set to  0.000000
9/1/2011	9:21:59 AM	BCl3 MFC set to  0.000000
9/1/2011	9:21:59 AM	PHl3 MFC set to  0.000000
9/1/2011	9:21:59 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:21:59 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:21:59 AM	Tube furnace set to 0
9/1/2011	9:22:02 AM	H2 valve closed
9/1/2011	9:22:02 AM	BCl3 valve closed
9/1/2011	9:22:02 AM	PH3 valve closed
9/1/2011	9:22:02 AM	SiCl4 pre valve closed
9/1/2011	9:22:02 AM	SiCl4 post valve closed
9/1/2011	9:22:02 AM	Main Vac valve closed
9/1/2011	9:22:02 AM	Bypass valve closed
9/1/2011	9:22:02 AM	Bubbler valve closed
9/1/2011	9:22:02 AM	Helium valve opened
9/1/2011	9:22:02 AM	Helium MFC set to  500.000000
9/1/2011	9:22:02 AM	H2 MFC set to  0.000000
9/1/2011	9:22:02 AM	BCl3 MFC set to  0.000000
9/1/2011	9:22:02 AM	PHl3 MFC set to  0.000000
9/1/2011	9:22:03 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:22:03 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:22:03 AM	Tube furnace set to 0
9/1/2011	9:23:08 AM	Helium valve closed
9/1/2011	9:23:08 AM	H2 valve closed
9/1/2011	9:23:08 AM	BCl3 valve closed
9/1/2011	9:23:08 AM	PH3 valve closed
9/1/2011	9:23:08 AM	SiCl4 pre valve closed
9/1/2011	9:23:08 AM	SiCl4 post valve closed
9/1/2011	9:23:08 AM	Main Vac valve closed
9/1/2011	9:23:08 AM	Bypass valve closed
9/1/2011	9:23:08 AM	Bubbler valve closed
9/1/2011	9:23:08 AM	Helium MFC set to  0.000000
9/1/2011	9:23:08 AM	H2 MFC set to  0.000000
9/1/2011	9:23:08 AM	BCl3 MFC set to  0.000000
9/1/2011	9:23:08 AM	PHl3 MFC set to  0.000000
9/1/2011	9:23:08 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:23:08 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:23:08 AM	Tube furnace set to 0
9/1/2011	9:23:09 AM	Run finished at 9:23 AM
9/1/2011	9:23:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	9:26:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	9:26:30 AM	Recipe started at 9:26 AM
9/1/2011	9:26:30 AM	Helium valve closed
9/1/2011	9:26:30 AM	H2 valve closed
9/1/2011	9:26:30 AM	BCl3 valve closed
9/1/2011	9:26:30 AM	PH3 valve closed
9/1/2011	9:26:30 AM	SiCl4 pre valve closed
9/1/2011	9:26:30 AM	SiCl4 post valve closed
9/1/2011	9:26:30 AM	Main Vac valve closed
9/1/2011	9:26:30 AM	Bubbler valve closed
9/1/2011	9:26:30 AM	Bypass valve opened
9/1/2011	9:26:30 AM	Helium MFC set to  0.000000
9/1/2011	9:26:30 AM	H2 MFC set to  0.000000
9/1/2011	9:26:30 AM	BCl3 MFC set to  0.000000
9/1/2011	9:26:30 AM	PHl3 MFC set to  0.000000
9/1/2011	9:26:30 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:26:30 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:26:30 AM	Tube furnace set to 0
9/1/2011	9:27:48 AM	Helium valve closed
9/1/2011	9:27:48 AM	H2 valve closed
9/1/2011	9:27:48 AM	BCl3 valve closed
9/1/2011	9:27:48 AM	PH3 valve closed
9/1/2011	9:27:48 AM	SiCl4 pre valve closed
9/1/2011	9:27:48 AM	SiCl4 post valve closed
9/1/2011	9:27:48 AM	Main Vac valve closed
9/1/2011	9:27:48 AM	Bubbler valve closed
9/1/2011	9:27:48 AM	Bypass valve opened
9/1/2011	9:27:48 AM	Helium MFC set to  0.000000
9/1/2011	9:27:48 AM	H2 MFC set to  0.000000
9/1/2011	9:27:48 AM	BCl3 MFC set to  0.000000
9/1/2011	9:27:48 AM	PHl3 MFC set to  0.000000
9/1/2011	9:27:48 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:27:48 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:27:48 AM	Tube furnace set to 0
9/1/2011	9:28:48 AM	Helium valve closed
9/1/2011	9:28:48 AM	H2 valve closed
9/1/2011	9:28:48 AM	BCl3 valve closed
9/1/2011	9:28:48 AM	PH3 valve closed
9/1/2011	9:28:48 AM	SiCl4 pre valve closed
9/1/2011	9:28:48 AM	SiCl4 post valve closed
9/1/2011	9:28:48 AM	Bypass valve closed
9/1/2011	9:28:48 AM	Bubbler valve closed
9/1/2011	9:28:48 AM	Main Vac valve opened
9/1/2011	9:28:48 AM	Helium MFC set to  0.000000
9/1/2011	9:28:48 AM	H2 MFC set to  0.000000
9/1/2011	9:28:48 AM	BCl3 MFC set to  0.000000
9/1/2011	9:28:48 AM	PHl3 MFC set to  0.000000
9/1/2011	9:28:48 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:28:48 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:28:48 AM	Tube furnace set to 0
9/1/2011	9:28:49 AM	Run finished at 9:28 AM
9/1/2011	9:28:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	9:31:59 AM	Tube furnace set to 300
9/1/2011	9:36:09 AM	Tube furnace set to 0
9/1/2011	9:46:04 AM	Recipe started at 9:46 AM
9/1/2011	9:46:04 AM	Helium valve closed
9/1/2011	9:46:04 AM	H2 valve closed
9/1/2011	9:46:04 AM	BCl3 valve closed
9/1/2011	9:46:04 AM	PH3 valve closed
9/1/2011	9:46:04 AM	SiCl4 pre valve closed
9/1/2011	9:46:04 AM	SiCl4 post valve closed
9/1/2011	9:46:04 AM	Main Vac valve closed
9/1/2011	9:46:04 AM	Bypass valve closed
9/1/2011	9:46:04 AM	Bubbler valve closed
9/1/2011	9:46:04 AM	Helium MFC set to  0.000000
9/1/2011	9:46:04 AM	H2 MFC set to  0.000000
9/1/2011	9:46:04 AM	BCl3 MFC set to  0.000000
9/1/2011	9:46:04 AM	PHl3 MFC set to  0.000000
9/1/2011	9:46:04 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:46:04 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:46:04 AM	Tube furnace set to 0
9/1/2011	9:46:07 AM	H2 valve closed
9/1/2011	9:46:07 AM	BCl3 valve closed
9/1/2011	9:46:07 AM	PH3 valve closed
9/1/2011	9:46:07 AM	SiCl4 pre valve closed
9/1/2011	9:46:07 AM	SiCl4 post valve closed
9/1/2011	9:46:07 AM	Main Vac valve closed
9/1/2011	9:46:07 AM	Bypass valve closed
9/1/2011	9:46:07 AM	Bubbler valve closed
9/1/2011	9:46:07 AM	Helium valve opened
9/1/2011	9:46:07 AM	Helium MFC set to  500.000000
9/1/2011	9:46:07 AM	H2 MFC set to  0.000000
9/1/2011	9:46:07 AM	BCl3 MFC set to  0.000000
9/1/2011	9:46:07 AM	PHl3 MFC set to  0.000000
9/1/2011	9:46:07 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:46:07 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:46:07 AM	Tube furnace set to 0
9/1/2011	9:47:11 AM	H2 valve closed
9/1/2011	9:47:11 AM	BCl3 valve closed
9/1/2011	9:47:11 AM	PH3 valve closed
9/1/2011	9:47:11 AM	SiCl4 pre valve closed
9/1/2011	9:47:11 AM	SiCl4 post valve closed
9/1/2011	9:47:11 AM	Main Vac valve closed
9/1/2011	9:47:11 AM	Bypass valve closed
9/1/2011	9:47:11 AM	Helium valve opened
9/1/2011	9:47:11 AM	Bubbler valve opened
9/1/2011	9:47:11 AM	Helium MFC set to  500.000000
9/1/2011	9:47:11 AM	H2 MFC set to  0.000000
9/1/2011	9:47:11 AM	BCl3 MFC set to  0.000000
9/1/2011	9:47:11 AM	PHl3 MFC set to  0.000000
9/1/2011	9:47:11 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:47:11 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:47:11 AM	Tube furnace set to 0
9/1/2011	9:47:41 AM	Helium valve closed
9/1/2011	9:47:41 AM	H2 valve closed
9/1/2011	9:47:41 AM	BCl3 valve closed
9/1/2011	9:47:41 AM	PH3 valve closed
9/1/2011	9:47:41 AM	SiCl4 pre valve closed
9/1/2011	9:47:41 AM	SiCl4 post valve closed
9/1/2011	9:47:41 AM	Main Vac valve closed
9/1/2011	9:47:41 AM	Bubbler valve closed
9/1/2011	9:47:41 AM	Bypass valve opened
9/1/2011	9:47:41 AM	Helium MFC set to  0.000000
9/1/2011	9:47:41 AM	H2 MFC set to  0.000000
9/1/2011	9:47:41 AM	BCl3 MFC set to  0.000000
9/1/2011	9:47:41 AM	PHl3 MFC set to  0.000000
9/1/2011	9:47:41 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:47:41 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:47:41 AM	Tube furnace set to 0
9/1/2011	9:48:30 AM	Helium valve closed
9/1/2011	9:48:30 AM	H2 valve closed
9/1/2011	9:48:30 AM	BCl3 valve closed
9/1/2011	9:48:30 AM	PH3 valve closed
9/1/2011	9:48:30 AM	SiCl4 pre valve closed
9/1/2011	9:48:30 AM	SiCl4 post valve closed
9/1/2011	9:48:30 AM	Main Vac valve closed
9/1/2011	9:48:30 AM	Bubbler valve closed
9/1/2011	9:48:30 AM	Bypass valve opened
9/1/2011	9:48:30 AM	Helium MFC set to  0.000000
9/1/2011	9:48:30 AM	H2 MFC set to  0.000000
9/1/2011	9:48:30 AM	BCl3 MFC set to  0.000000
9/1/2011	9:48:30 AM	PHl3 MFC set to  0.000000
9/1/2011	9:48:30 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:48:30 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:48:30 AM	Tube furnace set to 0
9/1/2011	9:49:30 AM	Helium valve closed
9/1/2011	9:49:30 AM	H2 valve closed
9/1/2011	9:49:30 AM	BCl3 valve closed
9/1/2011	9:49:30 AM	PH3 valve closed
9/1/2011	9:49:30 AM	SiCl4 pre valve closed
9/1/2011	9:49:30 AM	SiCl4 post valve closed
9/1/2011	9:49:30 AM	Bypass valve closed
9/1/2011	9:49:30 AM	Bubbler valve closed
9/1/2011	9:49:30 AM	Main Vac valve opened
9/1/2011	9:49:30 AM	Helium MFC set to  0.000000
9/1/2011	9:49:30 AM	H2 MFC set to  0.000000
9/1/2011	9:49:30 AM	BCl3 MFC set to  0.000000
9/1/2011	9:49:30 AM	PHl3 MFC set to  0.000000
9/1/2011	9:49:30 AM	SiCl4 MFC set to  0.000000
9/1/2011	9:49:30 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:49:30 AM	Tube furnace set to 0
9/1/2011	10:19:30 AM	Helium valve closed
9/1/2011	10:19:30 AM	H2 valve closed
9/1/2011	10:19:30 AM	BCl3 valve closed
9/1/2011	10:19:30 AM	PH3 valve closed
9/1/2011	10:19:30 AM	SiCl4 pre valve closed
9/1/2011	10:19:30 AM	SiCl4 post valve closed
9/1/2011	10:19:30 AM	Bypass valve closed
9/1/2011	10:19:30 AM	Bubbler valve closed
9/1/2011	10:19:30 AM	Main Vac valve opened
9/1/2011	10:19:30 AM	Helium MFC set to  0.000000
9/1/2011	10:19:30 AM	H2 MFC set to  0.000000
9/1/2011	10:19:30 AM	BCl3 MFC set to  0.000000
9/1/2011	10:19:30 AM	PHl3 MFC set to  0.000000
9/1/2011	10:19:30 AM	SiCl4 MFC set to  0.000000
9/1/2011	10:19:30 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:19:31 AM	Tube furnace set to 1000
9/1/2011	10:49:31 AM	Helium valve closed
9/1/2011	10:49:31 AM	BCl3 valve closed
9/1/2011	10:49:31 AM	PH3 valve closed
9/1/2011	10:49:31 AM	SiCl4 pre valve closed
9/1/2011	10:49:31 AM	SiCl4 post valve closed
9/1/2011	10:49:31 AM	Main Vac valve closed
9/1/2011	10:49:31 AM	Bypass valve closed
9/1/2011	10:49:31 AM	Bubbler valve closed
9/1/2011	10:49:31 AM	H2 valve opened
9/1/2011	10:49:31 AM	Helium MFC set to  0.000000
9/1/2011	10:49:31 AM	H2 MFC set to  500.000000
9/1/2011	10:49:31 AM	BCl3 MFC set to  0.000000
9/1/2011	10:49:31 AM	PHl3 MFC set to  0.000000
9/1/2011	10:49:31 AM	SiCl4 MFC set to  0.000000
9/1/2011	10:49:31 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:49:31 AM	Tube furnace set to 1000
9/1/2011	10:50:26 AM	Helium valve closed
9/1/2011	10:50:26 AM	BCl3 valve closed
9/1/2011	10:50:26 AM	PH3 valve closed
9/1/2011	10:50:26 AM	SiCl4 pre valve closed
9/1/2011	10:50:26 AM	SiCl4 post valve closed
9/1/2011	10:50:26 AM	Main Vac valve closed
9/1/2011	10:50:26 AM	Bypass valve closed
9/1/2011	10:50:26 AM	H2 valve opened
9/1/2011	10:50:26 AM	Bubbler valve opened
9/1/2011	10:50:26 AM	Helium MFC set to  0.000000
9/1/2011	10:50:26 AM	H2 MFC set to  500.000000
9/1/2011	10:50:26 AM	BCl3 MFC set to  0.000000
9/1/2011	10:50:26 AM	PHl3 MFC set to  0.000000
9/1/2011	10:50:26 AM	SiCl4 MFC set to  0.000000
9/1/2011	10:50:26 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:50:26 AM	Tube furnace set to 1000
9/1/2011	11:10:26 AM	Helium valve closed
9/1/2011	11:10:26 AM	PH3 valve closed
9/1/2011	11:10:26 AM	Main Vac valve closed
9/1/2011	11:10:26 AM	Bypass valve closed
9/1/2011	11:10:26 AM	H2 valve opened
9/1/2011	11:10:26 AM	BCl3 valve opened
9/1/2011	11:10:26 AM	SiCl4 pre valve opened
9/1/2011	11:10:26 AM	SiCl4 post valve opened
9/1/2011	11:10:26 AM	Bubbler valve opened
9/1/2011	11:10:26 AM	Helium MFC set to  0.000000
9/1/2011	11:10:26 AM	H2 MFC set to  500.000000
9/1/2011	11:10:26 AM	BCl3 MFC set to  2.500000
9/1/2011	11:10:26 AM	PHl3 MFC set to  0.000000
9/1/2011	11:10:26 AM	SiCl4 MFC set to  50.000000
9/1/2011	11:10:26 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:10:26 AM	Tube furnace set to 1000
9/1/2011	11:20:26 AM	Helium valve closed
9/1/2011	11:20:26 AM	BCl3 valve closed
9/1/2011	11:20:26 AM	PH3 valve closed
9/1/2011	11:20:26 AM	SiCl4 pre valve closed
9/1/2011	11:20:26 AM	SiCl4 post valve closed
9/1/2011	11:20:26 AM	Main Vac valve closed
9/1/2011	11:20:26 AM	Bypass valve closed
9/1/2011	11:20:26 AM	H2 valve opened
9/1/2011	11:20:26 AM	Bubbler valve opened
9/1/2011	11:20:26 AM	Helium MFC set to  0.000000
9/1/2011	11:20:26 AM	H2 MFC set to  500.000000
9/1/2011	11:20:26 AM	BCl3 MFC set to  0.000000
9/1/2011	11:20:26 AM	PHl3 MFC set to  0.000000
9/1/2011	11:20:26 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:20:26 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:20:27 AM	Tube furnace set to 0
9/1/2011	11:25:27 AM	H2 valve closed
9/1/2011	11:25:27 AM	BCl3 valve closed
9/1/2011	11:25:27 AM	PH3 valve closed
9/1/2011	11:25:27 AM	SiCl4 pre valve closed
9/1/2011	11:25:27 AM	SiCl4 post valve closed
9/1/2011	11:25:27 AM	Main Vac valve closed
9/1/2011	11:25:27 AM	Bypass valve closed
9/1/2011	11:25:27 AM	Helium valve opened
9/1/2011	11:25:27 AM	Bubbler valve opened
9/1/2011	11:25:27 AM	Helium MFC set to  500.000000
9/1/2011	11:25:27 AM	H2 MFC set to  0.000000
9/1/2011	11:25:27 AM	BCl3 MFC set to  0.000000
9/1/2011	11:25:27 AM	PHl3 MFC set to  0.000000
9/1/2011	11:25:27 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:25:27 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:25:27 AM	Tube furnace set to 0
9/1/2011	11:55:27 AM	Helium valve closed
9/1/2011	11:55:27 AM	H2 valve closed
9/1/2011	11:55:27 AM	BCl3 valve closed
9/1/2011	11:55:27 AM	PH3 valve closed
9/1/2011	11:55:27 AM	SiCl4 pre valve closed
9/1/2011	11:55:27 AM	SiCl4 post valve closed
9/1/2011	11:55:27 AM	Main Vac valve closed
9/1/2011	11:55:27 AM	Bypass valve closed
9/1/2011	11:55:27 AM	Bubbler valve closed
9/1/2011	11:55:27 AM	Helium MFC set to  0.000000
9/1/2011	11:55:27 AM	H2 MFC set to  0.000000
9/1/2011	11:55:27 AM	BCl3 MFC set to  0.000000
9/1/2011	11:55:27 AM	PHl3 MFC set to  0.000000
9/1/2011	11:55:27 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:55:27 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:55:27 AM	Tube furnace set to 0
9/1/2011	11:56:11 AM	Run aborted at 11:56 AM
9/1/2011	11:56:11 AM	Helium valve closed
9/1/2011	11:56:11 AM	H2 valve closed
9/1/2011	11:56:11 AM	BCl3 valve closed
9/1/2011	11:56:11 AM	PH3 valve closed
9/1/2011	11:56:11 AM	SiCl4 pre valve closed
9/1/2011	11:56:11 AM	SiCl4 post valve closed
9/1/2011	11:56:11 AM	Bypass valve closed
9/1/2011	11:56:11 AM	Main Vac valve closed
9/1/2011	11:56:11 AM	Bubbler valve closed
9/1/2011	11:56:11 AM	Helium MFC set to  0.000000
9/1/2011	11:56:11 AM	H2 MFC set to  0.000000
9/1/2011	11:56:11 AM	BCl3 MFC set to  0.000000
9/1/2011	11:56:11 AM	PHl3 MFC set to  0.000000
9/1/2011	11:56:11 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:56:11 AM	Tube furnace set to 0
9/1/2011	11:56:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	11:56:31 AM	Recipe started at 11:56 AM
9/1/2011	11:56:31 AM	Helium valve closed
9/1/2011	11:56:31 AM	H2 valve closed
9/1/2011	11:56:31 AM	BCl3 valve closed
9/1/2011	11:56:31 AM	PH3 valve closed
9/1/2011	11:56:31 AM	SiCl4 pre valve closed
9/1/2011	11:56:31 AM	SiCl4 post valve closed
9/1/2011	11:56:31 AM	Main Vac valve closed
9/1/2011	11:56:31 AM	Bubbler valve closed
9/1/2011	11:56:31 AM	Bypass valve opened
9/1/2011	11:56:31 AM	Helium MFC set to  0.000000
9/1/2011	11:56:31 AM	H2 MFC set to  0.000000
9/1/2011	11:56:31 AM	BCl3 MFC set to  0.000000
9/1/2011	11:56:31 AM	PHl3 MFC set to  0.000000
9/1/2011	11:56:31 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:56:31 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:56:31 AM	Tube furnace set to 0
9/1/2011	11:57:21 AM	Helium valve closed
9/1/2011	11:57:21 AM	H2 valve closed
9/1/2011	11:57:21 AM	BCl3 valve closed
9/1/2011	11:57:21 AM	PH3 valve closed
9/1/2011	11:57:21 AM	SiCl4 pre valve closed
9/1/2011	11:57:21 AM	SiCl4 post valve closed
9/1/2011	11:57:21 AM	Main Vac valve closed
9/1/2011	11:57:21 AM	Bubbler valve closed
9/1/2011	11:57:21 AM	Bypass valve opened
9/1/2011	11:57:21 AM	Helium MFC set to  0.000000
9/1/2011	11:57:21 AM	H2 MFC set to  0.000000
9/1/2011	11:57:21 AM	BCl3 MFC set to  0.000000
9/1/2011	11:57:21 AM	PHl3 MFC set to  0.000000
9/1/2011	11:57:21 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:57:21 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:57:22 AM	Tube furnace set to 0
9/1/2011	11:58:22 AM	Helium valve closed
9/1/2011	11:58:22 AM	H2 valve closed
9/1/2011	11:58:22 AM	BCl3 valve closed
9/1/2011	11:58:22 AM	PH3 valve closed
9/1/2011	11:58:22 AM	SiCl4 pre valve closed
9/1/2011	11:58:22 AM	SiCl4 post valve closed
9/1/2011	11:58:22 AM	Bypass valve closed
9/1/2011	11:58:22 AM	Bubbler valve closed
9/1/2011	11:58:22 AM	Main Vac valve opened
9/1/2011	11:58:22 AM	Helium MFC set to  0.000000
9/1/2011	11:58:22 AM	H2 MFC set to  0.000000
9/1/2011	11:58:22 AM	BCl3 MFC set to  0.000000
9/1/2011	11:58:22 AM	PHl3 MFC set to  0.000000
9/1/2011	11:58:22 AM	SiCl4 MFC set to  0.000000
9/1/2011	11:58:22 AM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:58:22 AM	Tube furnace set to 0
9/1/2011	11:58:23 AM	Run finished at 11:58 AM
9/1/2011	11:58:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	12:36:22 PM	Main Vac valve closed
9/1/2011	12:36:34 PM	Helium MFC set to  500.000000
9/1/2011	12:36:36 PM	Helium valve opened
9/1/2011	12:37:40 PM	Bubbler valve opened
9/1/2011	12:42:21 PM	Helium MFC set to  0.000000
9/1/2011	12:42:22 PM	Helium valve closed
9/1/2011	12:42:24 PM	Bubbler valve closed
9/1/2011	12:42:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	12:42:43 PM	Recipe started at 12:42 PM
9/1/2011	12:42:43 PM	Helium valve closed
9/1/2011	12:42:43 PM	H2 valve closed
9/1/2011	12:42:43 PM	BCl3 valve closed
9/1/2011	12:42:43 PM	PH3 valve closed
9/1/2011	12:42:43 PM	SiCl4 pre valve closed
9/1/2011	12:42:43 PM	SiCl4 post valve closed
9/1/2011	12:42:43 PM	Main Vac valve closed
9/1/2011	12:42:43 PM	Bubbler valve closed
9/1/2011	12:42:43 PM	Bypass valve opened
9/1/2011	12:42:43 PM	Helium MFC set to  0.000000
9/1/2011	12:42:43 PM	H2 MFC set to  0.000000
9/1/2011	12:42:43 PM	BCl3 MFC set to  0.000000
9/1/2011	12:42:43 PM	PHl3 MFC set to  0.000000
9/1/2011	12:42:43 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:42:43 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:42:44 PM	Tube furnace set to 0
9/1/2011	12:43:41 PM	Helium valve closed
9/1/2011	12:43:41 PM	H2 valve closed
9/1/2011	12:43:41 PM	BCl3 valve closed
9/1/2011	12:43:41 PM	PH3 valve closed
9/1/2011	12:43:41 PM	SiCl4 pre valve closed
9/1/2011	12:43:41 PM	SiCl4 post valve closed
9/1/2011	12:43:41 PM	Main Vac valve closed
9/1/2011	12:43:41 PM	Bubbler valve closed
9/1/2011	12:43:41 PM	Bypass valve opened
9/1/2011	12:43:41 PM	Helium MFC set to  0.000000
9/1/2011	12:43:41 PM	H2 MFC set to  0.000000
9/1/2011	12:43:41 PM	BCl3 MFC set to  0.000000
9/1/2011	12:43:41 PM	PHl3 MFC set to  0.000000
9/1/2011	12:43:41 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:43:41 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:43:41 PM	Tube furnace set to 0
9/1/2011	12:44:41 PM	Helium valve closed
9/1/2011	12:44:41 PM	H2 valve closed
9/1/2011	12:44:41 PM	BCl3 valve closed
9/1/2011	12:44:41 PM	PH3 valve closed
9/1/2011	12:44:41 PM	SiCl4 pre valve closed
9/1/2011	12:44:41 PM	SiCl4 post valve closed
9/1/2011	12:44:41 PM	Bypass valve closed
9/1/2011	12:44:41 PM	Bubbler valve closed
9/1/2011	12:44:41 PM	Main Vac valve opened
9/1/2011	12:44:41 PM	Helium MFC set to  0.000000
9/1/2011	12:44:41 PM	H2 MFC set to  0.000000
9/1/2011	12:44:41 PM	BCl3 MFC set to  0.000000
9/1/2011	12:44:41 PM	PHl3 MFC set to  0.000000
9/1/2011	12:44:41 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:44:41 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:44:41 PM	Tube furnace set to 0
9/1/2011	12:44:42 PM	Run finished at 12:44 PM
9/1/2011	12:44:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	12:46:37 PM	Recipe started at 12:46 PM
9/1/2011	12:46:37 PM	Helium valve closed
9/1/2011	12:46:37 PM	H2 valve closed
9/1/2011	12:46:37 PM	BCl3 valve closed
9/1/2011	12:46:37 PM	PH3 valve closed
9/1/2011	12:46:37 PM	SiCl4 pre valve closed
9/1/2011	12:46:37 PM	SiCl4 post valve closed
9/1/2011	12:46:37 PM	Bypass valve closed
9/1/2011	12:46:37 PM	Bubbler valve closed
9/1/2011	12:46:37 PM	Main Vac valve opened
9/1/2011	12:46:37 PM	Helium MFC set to  0.000000
9/1/2011	12:46:37 PM	H2 MFC set to  0.000000
9/1/2011	12:46:37 PM	BCl3 MFC set to  0.000000
9/1/2011	12:46:37 PM	PHl3 MFC set to  0.000000
9/1/2011	12:46:37 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:46:37 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:46:37 PM	Tube furnace set to 0
9/1/2011	12:47:07 PM	H2 valve closed
9/1/2011	12:47:07 PM	BCl3 valve closed
9/1/2011	12:47:07 PM	PH3 valve closed
9/1/2011	12:47:07 PM	SiCl4 pre valve closed
9/1/2011	12:47:07 PM	SiCl4 post valve closed
9/1/2011	12:47:07 PM	Bypass valve closed
9/1/2011	12:47:07 PM	Bubbler valve closed
9/1/2011	12:47:07 PM	Helium valve opened
9/1/2011	12:47:07 PM	Main Vac valve opened
9/1/2011	12:47:07 PM	Helium MFC set to  20.000000
9/1/2011	12:47:07 PM	H2 MFC set to  0.000000
9/1/2011	12:47:07 PM	BCl3 MFC set to  0.000000
9/1/2011	12:47:07 PM	PHl3 MFC set to  0.000000
9/1/2011	12:47:07 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:47:07 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:47:07 PM	Tube furnace set to 0
9/1/2011	12:47:37 PM	Helium valve closed
9/1/2011	12:47:37 PM	H2 valve closed
9/1/2011	12:47:37 PM	BCl3 valve closed
9/1/2011	12:47:37 PM	PH3 valve closed
9/1/2011	12:47:37 PM	SiCl4 pre valve closed
9/1/2011	12:47:37 PM	SiCl4 post valve closed
9/1/2011	12:47:37 PM	Bypass valve closed
9/1/2011	12:47:37 PM	Bubbler valve closed
9/1/2011	12:47:37 PM	Main Vac valve opened
9/1/2011	12:47:37 PM	Helium MFC set to  0.000000
9/1/2011	12:47:37 PM	H2 MFC set to  0.000000
9/1/2011	12:47:37 PM	BCl3 MFC set to  0.000000
9/1/2011	12:47:37 PM	PHl3 MFC set to  0.000000
9/1/2011	12:47:37 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:47:37 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:47:37 PM	Tube furnace set to 0
9/1/2011	12:48:07 PM	H2 valve closed
9/1/2011	12:48:08 PM	BCl3 valve closed
9/1/2011	12:48:08 PM	PH3 valve closed
9/1/2011	12:48:08 PM	SiCl4 pre valve closed
9/1/2011	12:48:08 PM	SiCl4 post valve closed
9/1/2011	12:48:08 PM	Bypass valve closed
9/1/2011	12:48:08 PM	Bubbler valve closed
9/1/2011	12:48:08 PM	Helium valve opened
9/1/2011	12:48:08 PM	Main Vac valve opened
9/1/2011	12:48:08 PM	Helium MFC set to  20.000000
9/1/2011	12:48:08 PM	H2 MFC set to  0.000000
9/1/2011	12:48:08 PM	BCl3 MFC set to  0.000000
9/1/2011	12:48:08 PM	PHl3 MFC set to  0.000000
9/1/2011	12:48:08 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:48:08 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:48:08 PM	Tube furnace set to 0
9/1/2011	12:48:38 PM	Helium valve closed
9/1/2011	12:48:38 PM	H2 valve closed
9/1/2011	12:48:38 PM	BCl3 valve closed
9/1/2011	12:48:38 PM	PH3 valve closed
9/1/2011	12:48:38 PM	SiCl4 pre valve closed
9/1/2011	12:48:38 PM	SiCl4 post valve closed
9/1/2011	12:48:38 PM	Bypass valve closed
9/1/2011	12:48:38 PM	Bubbler valve closed
9/1/2011	12:48:38 PM	Main Vac valve opened
9/1/2011	12:48:38 PM	Helium MFC set to  0.000000
9/1/2011	12:48:38 PM	H2 MFC set to  0.000000
9/1/2011	12:48:38 PM	BCl3 MFC set to  0.000000
9/1/2011	12:48:38 PM	PHl3 MFC set to  0.000000
9/1/2011	12:48:38 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:48:38 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:48:38 PM	Tube furnace set to 0
9/1/2011	12:49:08 PM	H2 valve closed
9/1/2011	12:49:08 PM	BCl3 valve closed
9/1/2011	12:49:08 PM	PH3 valve closed
9/1/2011	12:49:08 PM	SiCl4 pre valve closed
9/1/2011	12:49:08 PM	SiCl4 post valve closed
9/1/2011	12:49:08 PM	Bypass valve closed
9/1/2011	12:49:08 PM	Bubbler valve closed
9/1/2011	12:49:08 PM	Helium valve opened
9/1/2011	12:49:08 PM	Main Vac valve opened
9/1/2011	12:49:08 PM	Helium MFC set to  20.000000
9/1/2011	12:49:08 PM	H2 MFC set to  0.000000
9/1/2011	12:49:08 PM	BCl3 MFC set to  0.000000
9/1/2011	12:49:08 PM	PHl3 MFC set to  0.000000
9/1/2011	12:49:08 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:49:08 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:49:08 PM	Tube furnace set to 0
9/1/2011	12:49:38 PM	Helium valve closed
9/1/2011	12:49:38 PM	H2 valve closed
9/1/2011	12:49:38 PM	BCl3 valve closed
9/1/2011	12:49:38 PM	PH3 valve closed
9/1/2011	12:49:38 PM	SiCl4 pre valve closed
9/1/2011	12:49:38 PM	SiCl4 post valve closed
9/1/2011	12:49:38 PM	Bypass valve closed
9/1/2011	12:49:38 PM	Bubbler valve closed
9/1/2011	12:49:38 PM	Main Vac valve opened
9/1/2011	12:49:38 PM	Helium MFC set to  0.000000
9/1/2011	12:49:38 PM	H2 MFC set to  0.000000
9/1/2011	12:49:38 PM	BCl3 MFC set to  0.000000
9/1/2011	12:49:38 PM	PHl3 MFC set to  0.000000
9/1/2011	12:49:38 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:49:38 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:49:38 PM	Tube furnace set to 0
9/1/2011	12:50:08 PM	H2 valve closed
9/1/2011	12:50:08 PM	BCl3 valve closed
9/1/2011	12:50:08 PM	PH3 valve closed
9/1/2011	12:50:08 PM	SiCl4 pre valve closed
9/1/2011	12:50:08 PM	SiCl4 post valve closed
9/1/2011	12:50:08 PM	Bypass valve closed
9/1/2011	12:50:08 PM	Bubbler valve closed
9/1/2011	12:50:08 PM	Helium valve opened
9/1/2011	12:50:08 PM	Main Vac valve opened
9/1/2011	12:50:08 PM	Helium MFC set to  20.000000
9/1/2011	12:50:08 PM	H2 MFC set to  0.000000
9/1/2011	12:50:08 PM	BCl3 MFC set to  0.000000
9/1/2011	12:50:08 PM	PHl3 MFC set to  0.000000
9/1/2011	12:50:08 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:50:08 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:50:08 PM	Tube furnace set to 0
9/1/2011	12:50:38 PM	Helium valve closed
9/1/2011	12:50:38 PM	H2 valve closed
9/1/2011	12:50:38 PM	BCl3 valve closed
9/1/2011	12:50:39 PM	PH3 valve closed
9/1/2011	12:50:39 PM	SiCl4 pre valve closed
9/1/2011	12:50:39 PM	SiCl4 post valve closed
9/1/2011	12:50:39 PM	Bypass valve closed
9/1/2011	12:50:39 PM	Bubbler valve closed
9/1/2011	12:50:39 PM	Main Vac valve opened
9/1/2011	12:50:39 PM	Helium MFC set to  0.000000
9/1/2011	12:50:39 PM	H2 MFC set to  0.000000
9/1/2011	12:50:39 PM	BCl3 MFC set to  0.000000
9/1/2011	12:50:39 PM	PHl3 MFC set to  0.000000
9/1/2011	12:50:39 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:50:39 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:50:39 PM	Tube furnace set to 0
9/1/2011	12:51:09 PM	H2 valve closed
9/1/2011	12:51:09 PM	BCl3 valve closed
9/1/2011	12:51:09 PM	PH3 valve closed
9/1/2011	12:51:09 PM	SiCl4 pre valve closed
9/1/2011	12:51:09 PM	SiCl4 post valve closed
9/1/2011	12:51:09 PM	Bypass valve closed
9/1/2011	12:51:09 PM	Bubbler valve closed
9/1/2011	12:51:09 PM	Helium valve opened
9/1/2011	12:51:09 PM	Main Vac valve opened
9/1/2011	12:51:09 PM	Helium MFC set to  20.000000
9/1/2011	12:51:09 PM	H2 MFC set to  0.000000
9/1/2011	12:51:09 PM	BCl3 MFC set to  0.000000
9/1/2011	12:51:09 PM	PHl3 MFC set to  0.000000
9/1/2011	12:51:09 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:51:09 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:51:09 PM	Tube furnace set to 0
9/1/2011	12:51:39 PM	Helium valve closed
9/1/2011	12:51:39 PM	H2 valve closed
9/1/2011	12:51:39 PM	BCl3 valve closed
9/1/2011	12:51:39 PM	PH3 valve closed
9/1/2011	12:51:39 PM	SiCl4 pre valve closed
9/1/2011	12:51:39 PM	SiCl4 post valve closed
9/1/2011	12:51:39 PM	Bypass valve closed
9/1/2011	12:51:39 PM	Bubbler valve closed
9/1/2011	12:51:39 PM	Main Vac valve opened
9/1/2011	12:51:39 PM	Helium MFC set to  0.000000
9/1/2011	12:51:39 PM	H2 MFC set to  0.000000
9/1/2011	12:51:39 PM	BCl3 MFC set to  0.000000
9/1/2011	12:51:39 PM	PHl3 MFC set to  0.000000
9/1/2011	12:51:39 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:51:39 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:51:39 PM	Tube furnace set to 0
9/1/2011	12:52:09 PM	H2 valve closed
9/1/2011	12:52:09 PM	BCl3 valve closed
9/1/2011	12:52:09 PM	PH3 valve closed
9/1/2011	12:52:09 PM	SiCl4 pre valve closed
9/1/2011	12:52:09 PM	SiCl4 post valve closed
9/1/2011	12:52:09 PM	Bypass valve closed
9/1/2011	12:52:09 PM	Bubbler valve closed
9/1/2011	12:52:09 PM	Helium valve opened
9/1/2011	12:52:09 PM	Main Vac valve opened
9/1/2011	12:52:09 PM	Helium MFC set to  20.000000
9/1/2011	12:52:09 PM	H2 MFC set to  0.000000
9/1/2011	12:52:09 PM	BCl3 MFC set to  0.000000
9/1/2011	12:52:09 PM	PHl3 MFC set to  0.000000
9/1/2011	12:52:09 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:52:09 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:52:09 PM	Tube furnace set to 0
9/1/2011	12:52:39 PM	Helium valve closed
9/1/2011	12:52:39 PM	H2 valve closed
9/1/2011	12:52:39 PM	BCl3 valve closed
9/1/2011	12:52:39 PM	PH3 valve closed
9/1/2011	12:52:39 PM	SiCl4 pre valve closed
9/1/2011	12:52:39 PM	SiCl4 post valve closed
9/1/2011	12:52:39 PM	Bypass valve closed
9/1/2011	12:52:39 PM	Bubbler valve closed
9/1/2011	12:52:39 PM	Main Vac valve opened
9/1/2011	12:52:39 PM	Helium MFC set to  0.000000
9/1/2011	12:52:39 PM	H2 MFC set to  0.000000
9/1/2011	12:52:39 PM	BCl3 MFC set to  0.000000
9/1/2011	12:52:39 PM	PHl3 MFC set to  0.000000
9/1/2011	12:52:39 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:52:39 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:52:39 PM	Tube furnace set to 0
9/1/2011	12:53:10 PM	H2 valve closed
9/1/2011	12:53:10 PM	BCl3 valve closed
9/1/2011	12:53:10 PM	PH3 valve closed
9/1/2011	12:53:10 PM	SiCl4 pre valve closed
9/1/2011	12:53:10 PM	SiCl4 post valve closed
9/1/2011	12:53:10 PM	Bypass valve closed
9/1/2011	12:53:10 PM	Bubbler valve closed
9/1/2011	12:53:10 PM	Helium valve opened
9/1/2011	12:53:10 PM	Main Vac valve opened
9/1/2011	12:53:10 PM	Helium MFC set to  20.000000
9/1/2011	12:53:10 PM	H2 MFC set to  0.000000
9/1/2011	12:53:10 PM	BCl3 MFC set to  0.000000
9/1/2011	12:53:10 PM	PHl3 MFC set to  0.000000
9/1/2011	12:53:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:53:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:53:10 PM	Tube furnace set to 0
9/1/2011	12:53:40 PM	Helium valve closed
9/1/2011	12:53:40 PM	H2 valve closed
9/1/2011	12:53:40 PM	BCl3 valve closed
9/1/2011	12:53:40 PM	PH3 valve closed
9/1/2011	12:53:40 PM	SiCl4 pre valve closed
9/1/2011	12:53:40 PM	SiCl4 post valve closed
9/1/2011	12:53:40 PM	Bypass valve closed
9/1/2011	12:53:40 PM	Bubbler valve closed
9/1/2011	12:53:40 PM	Main Vac valve opened
9/1/2011	12:53:40 PM	Helium MFC set to  0.000000
9/1/2011	12:53:40 PM	H2 MFC set to  0.000000
9/1/2011	12:53:40 PM	BCl3 MFC set to  0.000000
9/1/2011	12:53:40 PM	PHl3 MFC set to  0.000000
9/1/2011	12:53:40 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:53:40 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:53:40 PM	Tube furnace set to 0
9/1/2011	12:54:10 PM	H2 valve closed
9/1/2011	12:54:10 PM	BCl3 valve closed
9/1/2011	12:54:10 PM	PH3 valve closed
9/1/2011	12:54:10 PM	SiCl4 pre valve closed
9/1/2011	12:54:10 PM	SiCl4 post valve closed
9/1/2011	12:54:10 PM	Bypass valve closed
9/1/2011	12:54:10 PM	Bubbler valve closed
9/1/2011	12:54:10 PM	Helium valve opened
9/1/2011	12:54:10 PM	Main Vac valve opened
9/1/2011	12:54:10 PM	Helium MFC set to  20.000000
9/1/2011	12:54:10 PM	H2 MFC set to  0.000000
9/1/2011	12:54:10 PM	BCl3 MFC set to  0.000000
9/1/2011	12:54:10 PM	PHl3 MFC set to  0.000000
9/1/2011	12:54:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:54:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:54:10 PM	Tube furnace set to 0
9/1/2011	12:54:40 PM	Helium valve closed
9/1/2011	12:54:40 PM	H2 valve closed
9/1/2011	12:54:40 PM	BCl3 valve closed
9/1/2011	12:54:40 PM	PH3 valve closed
9/1/2011	12:54:40 PM	SiCl4 pre valve closed
9/1/2011	12:54:40 PM	SiCl4 post valve closed
9/1/2011	12:54:40 PM	Bypass valve closed
9/1/2011	12:54:40 PM	Bubbler valve closed
9/1/2011	12:54:40 PM	Main Vac valve opened
9/1/2011	12:54:40 PM	Helium MFC set to  0.000000
9/1/2011	12:54:40 PM	H2 MFC set to  0.000000
9/1/2011	12:54:40 PM	BCl3 MFC set to  0.000000
9/1/2011	12:54:40 PM	PHl3 MFC set to  0.000000
9/1/2011	12:54:40 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:54:40 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:54:40 PM	Tube furnace set to 0
9/1/2011	12:55:10 PM	H2 valve closed
9/1/2011	12:55:10 PM	BCl3 valve closed
9/1/2011	12:55:10 PM	PH3 valve closed
9/1/2011	12:55:10 PM	SiCl4 pre valve closed
9/1/2011	12:55:10 PM	SiCl4 post valve closed
9/1/2011	12:55:10 PM	Bypass valve closed
9/1/2011	12:55:10 PM	Bubbler valve closed
9/1/2011	12:55:10 PM	Helium valve opened
9/1/2011	12:55:10 PM	Main Vac valve opened
9/1/2011	12:55:10 PM	Helium MFC set to  20.000000
9/1/2011	12:55:10 PM	H2 MFC set to  0.000000
9/1/2011	12:55:10 PM	BCl3 MFC set to  0.000000
9/1/2011	12:55:10 PM	PHl3 MFC set to  0.000000
9/1/2011	12:55:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:55:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:55:11 PM	Tube furnace set to 0
9/1/2011	12:55:41 PM	Helium valve closed
9/1/2011	12:55:41 PM	H2 valve closed
9/1/2011	12:55:41 PM	BCl3 valve closed
9/1/2011	12:55:41 PM	PH3 valve closed
9/1/2011	12:55:41 PM	SiCl4 pre valve closed
9/1/2011	12:55:41 PM	SiCl4 post valve closed
9/1/2011	12:55:41 PM	Bypass valve closed
9/1/2011	12:55:41 PM	Bubbler valve closed
9/1/2011	12:55:41 PM	Main Vac valve opened
9/1/2011	12:55:41 PM	Helium MFC set to  0.000000
9/1/2011	12:55:41 PM	H2 MFC set to  0.000000
9/1/2011	12:55:41 PM	BCl3 MFC set to  0.000000
9/1/2011	12:55:41 PM	PHl3 MFC set to  0.000000
9/1/2011	12:55:41 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:55:41 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:55:41 PM	Tube furnace set to 0
9/1/2011	12:56:11 PM	H2 valve closed
9/1/2011	12:56:11 PM	BCl3 valve closed
9/1/2011	12:56:11 PM	PH3 valve closed
9/1/2011	12:56:11 PM	SiCl4 pre valve closed
9/1/2011	12:56:11 PM	SiCl4 post valve closed
9/1/2011	12:56:11 PM	Bypass valve closed
9/1/2011	12:56:11 PM	Bubbler valve closed
9/1/2011	12:56:11 PM	Helium valve opened
9/1/2011	12:56:11 PM	Main Vac valve opened
9/1/2011	12:56:11 PM	Helium MFC set to  20.000000
9/1/2011	12:56:11 PM	H2 MFC set to  0.000000
9/1/2011	12:56:11 PM	BCl3 MFC set to  0.000000
9/1/2011	12:56:11 PM	PHl3 MFC set to  0.000000
9/1/2011	12:56:11 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:56:11 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:56:11 PM	Tube furnace set to 0
9/1/2011	12:56:41 PM	Helium valve closed
9/1/2011	12:56:41 PM	H2 valve closed
9/1/2011	12:56:41 PM	BCl3 valve closed
9/1/2011	12:56:41 PM	PH3 valve closed
9/1/2011	12:56:41 PM	SiCl4 pre valve closed
9/1/2011	12:56:41 PM	SiCl4 post valve closed
9/1/2011	12:56:41 PM	Bypass valve closed
9/1/2011	12:56:41 PM	Bubbler valve closed
9/1/2011	12:56:41 PM	Main Vac valve opened
9/1/2011	12:56:41 PM	Helium MFC set to  0.000000
9/1/2011	12:56:41 PM	H2 MFC set to  0.000000
9/1/2011	12:56:41 PM	BCl3 MFC set to  0.000000
9/1/2011	12:56:41 PM	PHl3 MFC set to  0.000000
9/1/2011	12:56:41 PM	SiCl4 MFC set to  0.000000
9/1/2011	12:56:41 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	12:56:41 PM	Tube furnace set to 0
9/1/2011	12:56:42 PM	Run finished at 12:56 PM
9/1/2011	12:58:00 PM	Main Vac valve closed
9/1/2011	12:58:07 PM	Main Vac valve opened
9/1/2011	1:01:22 PM	Recipe started at 1:01 PM
9/1/2011	1:01:22 PM	Helium valve closed
9/1/2011	1:01:22 PM	H2 valve closed
9/1/2011	1:01:22 PM	BCl3 valve closed
9/1/2011	1:01:22 PM	PH3 valve closed
9/1/2011	1:01:22 PM	SiCl4 pre valve closed
9/1/2011	1:01:22 PM	SiCl4 post valve closed
9/1/2011	1:01:22 PM	Bypass valve closed
9/1/2011	1:01:22 PM	Bubbler valve closed
9/1/2011	1:01:22 PM	Main Vac valve opened
9/1/2011	1:01:22 PM	Helium MFC set to  0.000000
9/1/2011	1:01:22 PM	H2 MFC set to  0.000000
9/1/2011	1:01:22 PM	BCl3 MFC set to  0.000000
9/1/2011	1:01:22 PM	PHl3 MFC set to  0.000000
9/1/2011	1:01:22 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:01:22 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:01:22 PM	Tube furnace set to 0
9/1/2011	1:12:51 PM	Run aborted at 1:12 PM
9/1/2011	1:12:51 PM	Helium valve closed
9/1/2011	1:12:51 PM	H2 valve closed
9/1/2011	1:12:51 PM	BCl3 valve closed
9/1/2011	1:12:51 PM	PH3 valve closed
9/1/2011	1:12:51 PM	SiCl4 pre valve closed
9/1/2011	1:12:51 PM	SiCl4 post valve closed
9/1/2011	1:12:51 PM	Bypass valve closed
9/1/2011	1:12:51 PM	Main Vac valve closed
9/1/2011	1:12:51 PM	Bubbler valve closed
9/1/2011	1:12:51 PM	Helium MFC set to  0.000000
9/1/2011	1:12:51 PM	H2 MFC set to  0.000000
9/1/2011	1:12:51 PM	BCl3 MFC set to  0.000000
9/1/2011	1:12:51 PM	PHl3 MFC set to  0.000000
9/1/2011	1:12:51 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:12:51 PM	Tube furnace set to 0
9/1/2011	1:13:06 PM	Main Vac valve opened
9/1/2011	1:13:49 PM	Recipe started at 1:13 PM
9/1/2011	1:13:49 PM	Helium valve closed
9/1/2011	1:13:49 PM	H2 valve closed
9/1/2011	1:13:49 PM	BCl3 valve closed
9/1/2011	1:13:49 PM	PH3 valve closed
9/1/2011	1:13:49 PM	SiCl4 pre valve closed
9/1/2011	1:13:49 PM	SiCl4 post valve closed
9/1/2011	1:13:49 PM	Bypass valve closed
9/1/2011	1:13:49 PM	Bubbler valve closed
9/1/2011	1:13:49 PM	Main Vac valve opened
9/1/2011	1:13:49 PM	Helium MFC set to  0.000000
9/1/2011	1:13:49 PM	H2 MFC set to  0.000000
9/1/2011	1:13:49 PM	BCl3 MFC set to  0.000000
9/1/2011	1:13:49 PM	PHl3 MFC set to  0.000000
9/1/2011	1:13:49 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:13:49 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:13:50 PM	Tube furnace set to 0
9/1/2011	1:33:50 PM	Helium valve closed
9/1/2011	1:33:50 PM	BCl3 valve closed
9/1/2011	1:33:50 PM	PH3 valve closed
9/1/2011	1:33:50 PM	SiCl4 pre valve closed
9/1/2011	1:33:50 PM	SiCl4 post valve closed
9/1/2011	1:33:50 PM	Main Vac valve closed
9/1/2011	1:33:50 PM	Bypass valve closed
9/1/2011	1:33:50 PM	Bubbler valve closed
9/1/2011	1:33:50 PM	H2 valve opened
9/1/2011	1:33:50 PM	Helium MFC set to  0.000000
9/1/2011	1:33:50 PM	H2 MFC set to  500.000000
9/1/2011	1:33:50 PM	BCl3 MFC set to  0.000000
9/1/2011	1:33:50 PM	PHl3 MFC set to  0.000000
9/1/2011	1:33:50 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:33:50 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:33:50 PM	Tube furnace set to 1000
9/1/2011	1:34:55 PM	Helium valve closed
9/1/2011	1:34:55 PM	BCl3 valve closed
9/1/2011	1:34:55 PM	PH3 valve closed
9/1/2011	1:34:55 PM	SiCl4 pre valve closed
9/1/2011	1:34:55 PM	SiCl4 post valve closed
9/1/2011	1:34:55 PM	Main Vac valve closed
9/1/2011	1:34:55 PM	Bypass valve closed
9/1/2011	1:34:55 PM	H2 valve opened
9/1/2011	1:34:55 PM	Bubbler valve opened
9/1/2011	1:34:55 PM	Helium MFC set to  0.000000
9/1/2011	1:34:55 PM	H2 MFC set to  500.000000
9/1/2011	1:34:55 PM	BCl3 MFC set to  0.000000
9/1/2011	1:34:55 PM	PHl3 MFC set to  0.000000
9/1/2011	1:34:55 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:34:55 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:34:55 PM	Tube furnace set to 1000
9/1/2011	1:34:56 PM	Helium valve closed
9/1/2011	1:34:56 PM	BCl3 valve closed
9/1/2011	1:34:56 PM	PH3 valve closed
9/1/2011	1:34:56 PM	SiCl4 pre valve closed
9/1/2011	1:34:56 PM	SiCl4 post valve closed
9/1/2011	1:34:57 PM	Main Vac valve closed
9/1/2011	1:34:57 PM	Bypass valve closed
9/1/2011	1:34:57 PM	H2 valve opened
9/1/2011	1:34:57 PM	Bubbler valve opened
9/1/2011	1:34:57 PM	Helium MFC set to  0.000000
9/1/2011	1:34:57 PM	H2 MFC set to  500.000000
9/1/2011	1:34:57 PM	BCl3 MFC set to  0.000000
9/1/2011	1:34:57 PM	PHl3 MFC set to  0.000000
9/1/2011	1:34:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	1:34:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:34:57 PM	Tube furnace set to 1000
9/1/2011	1:54:57 PM	Helium valve closed
9/1/2011	1:54:57 PM	PH3 valve closed
9/1/2011	1:54:57 PM	Main Vac valve closed
9/1/2011	1:54:57 PM	Bypass valve closed
9/1/2011	1:54:57 PM	H2 valve opened
9/1/2011	1:54:57 PM	BCl3 valve opened
9/1/2011	1:54:57 PM	SiCl4 pre valve opened
9/1/2011	1:54:57 PM	SiCl4 post valve opened
9/1/2011	1:54:57 PM	Bubbler valve opened
9/1/2011	1:54:57 PM	Helium MFC set to  0.000000
9/1/2011	1:54:57 PM	H2 MFC set to  500.000000
9/1/2011	1:54:57 PM	BCl3 MFC set to  2.500000
9/1/2011	1:54:57 PM	PHl3 MFC set to  0.000000
9/1/2011	1:54:57 PM	SiCl4 MFC set to  50.000000
9/1/2011	1:54:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	1:54:57 PM	Tube furnace set to 1000
9/1/2011	2:06:57 PM	Helium valve closed
9/1/2011	2:06:57 PM	BCl3 valve closed
9/1/2011	2:06:57 PM	PH3 valve closed
9/1/2011	2:06:57 PM	SiCl4 pre valve closed
9/1/2011	2:06:57 PM	SiCl4 post valve closed
9/1/2011	2:06:57 PM	Main Vac valve closed
9/1/2011	2:06:57 PM	Bypass valve closed
9/1/2011	2:06:57 PM	H2 valve opened
9/1/2011	2:06:57 PM	Bubbler valve opened
9/1/2011	2:06:57 PM	Helium MFC set to  0.000000
9/1/2011	2:06:57 PM	H2 MFC set to  500.000000
9/1/2011	2:06:57 PM	BCl3 MFC set to  0.000000
9/1/2011	2:06:57 PM	PHl3 MFC set to  0.000000
9/1/2011	2:06:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	2:06:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	2:06:57 PM	Tube furnace set to 750
9/1/2011	2:11:57 PM	H2 valve closed
9/1/2011	2:11:57 PM	BCl3 valve closed
9/1/2011	2:11:57 PM	PH3 valve closed
9/1/2011	2:11:57 PM	SiCl4 pre valve closed
9/1/2011	2:11:57 PM	SiCl4 post valve closed
9/1/2011	2:11:57 PM	Main Vac valve closed
9/1/2011	2:11:57 PM	Bypass valve closed
9/1/2011	2:11:57 PM	Helium valve opened
9/1/2011	2:11:57 PM	Bubbler valve opened
9/1/2011	2:11:57 PM	Helium MFC set to  500.000000
9/1/2011	2:11:57 PM	H2 MFC set to  0.000000
9/1/2011	2:11:57 PM	BCl3 MFC set to  0.000000
9/1/2011	2:11:57 PM	PHl3 MFC set to  0.000000
9/1/2011	2:11:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	2:11:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	2:11:57 PM	Tube furnace set to 0
9/1/2011	2:31:57 PM	Helium valve closed
9/1/2011	2:31:57 PM	H2 valve closed
9/1/2011	2:31:57 PM	BCl3 valve closed
9/1/2011	2:31:57 PM	PH3 valve closed
9/1/2011	2:31:57 PM	SiCl4 pre valve closed
9/1/2011	2:31:57 PM	SiCl4 post valve closed
9/1/2011	2:31:57 PM	Main Vac valve closed
9/1/2011	2:31:57 PM	Bypass valve closed
9/1/2011	2:31:57 PM	Bubbler valve closed
9/1/2011	2:31:57 PM	Helium MFC set to  0.000000
9/1/2011	2:31:57 PM	H2 MFC set to  0.000000
9/1/2011	2:31:57 PM	BCl3 MFC set to  0.000000
9/1/2011	2:31:57 PM	PHl3 MFC set to  0.000000
9/1/2011	2:31:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	2:31:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	2:31:57 PM	Tube furnace set to 0
9/1/2011	3:11:57 PM	Helium valve closed
9/1/2011	3:11:57 PM	H2 valve closed
9/1/2011	3:11:57 PM	BCl3 valve closed
9/1/2011	3:11:57 PM	PH3 valve closed
9/1/2011	3:11:57 PM	SiCl4 pre valve closed
9/1/2011	3:11:57 PM	SiCl4 post valve closed
9/1/2011	3:11:57 PM	Main Vac valve closed
9/1/2011	3:11:57 PM	Bubbler valve closed
9/1/2011	3:11:57 PM	Bypass valve opened
9/1/2011	3:11:57 PM	Helium MFC set to  0.000000
9/1/2011	3:11:57 PM	H2 MFC set to  0.000000
9/1/2011	3:11:57 PM	BCl3 MFC set to  0.000000
9/1/2011	3:11:57 PM	PHl3 MFC set to  0.000000
9/1/2011	3:11:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:11:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:11:58 PM	Tube furnace set to 0
9/1/2011	3:12:46 PM	Helium valve closed
9/1/2011	3:12:46 PM	H2 valve closed
9/1/2011	3:12:46 PM	BCl3 valve closed
9/1/2011	3:12:46 PM	PH3 valve closed
9/1/2011	3:12:46 PM	SiCl4 pre valve closed
9/1/2011	3:12:46 PM	SiCl4 post valve closed
9/1/2011	3:12:46 PM	Main Vac valve closed
9/1/2011	3:12:46 PM	Bubbler valve closed
9/1/2011	3:12:46 PM	Bypass valve opened
9/1/2011	3:12:46 PM	Helium MFC set to  0.000000
9/1/2011	3:12:46 PM	H2 MFC set to  0.000000
9/1/2011	3:12:46 PM	BCl3 MFC set to  0.000000
9/1/2011	3:12:46 PM	PHl3 MFC set to  0.000000
9/1/2011	3:12:46 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:12:46 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:12:47 PM	Tube furnace set to 0
9/1/2011	3:13:47 PM	Helium valve closed
9/1/2011	3:13:47 PM	H2 valve closed
9/1/2011	3:13:47 PM	BCl3 valve closed
9/1/2011	3:13:47 PM	PH3 valve closed
9/1/2011	3:13:47 PM	SiCl4 pre valve closed
9/1/2011	3:13:47 PM	SiCl4 post valve closed
9/1/2011	3:13:47 PM	Bypass valve closed
9/1/2011	3:13:47 PM	Bubbler valve closed
9/1/2011	3:13:47 PM	Main Vac valve opened
9/1/2011	3:13:47 PM	Helium MFC set to  0.000000
9/1/2011	3:13:47 PM	H2 MFC set to  0.000000
9/1/2011	3:13:47 PM	BCl3 MFC set to  0.000000
9/1/2011	3:13:47 PM	PHl3 MFC set to  0.000000
9/1/2011	3:13:47 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:13:47 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:13:47 PM	Tube furnace set to 0
9/1/2011	3:13:48 PM	Run finished at 3:13 PM
9/1/2011	3:16:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	3:16:53 PM	Recipe started at 3:16 PM
9/1/2011	3:16:53 PM	Helium valve closed
9/1/2011	3:16:53 PM	H2 valve closed
9/1/2011	3:16:53 PM	BCl3 valve closed
9/1/2011	3:16:53 PM	PH3 valve closed
9/1/2011	3:16:53 PM	SiCl4 pre valve closed
9/1/2011	3:16:53 PM	SiCl4 post valve closed
9/1/2011	3:16:53 PM	Main Vac valve closed
9/1/2011	3:16:53 PM	Bypass valve closed
9/1/2011	3:16:53 PM	Bubbler valve closed
9/1/2011	3:16:53 PM	Helium MFC set to  0.000000
9/1/2011	3:16:53 PM	H2 MFC set to  0.000000
9/1/2011	3:16:53 PM	BCl3 MFC set to  0.000000
9/1/2011	3:16:53 PM	PHl3 MFC set to  0.000000
9/1/2011	3:16:53 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:16:53 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:16:54 PM	Tube furnace set to 0
9/1/2011	3:16:57 PM	H2 valve closed
9/1/2011	3:16:57 PM	BCl3 valve closed
9/1/2011	3:16:57 PM	PH3 valve closed
9/1/2011	3:16:57 PM	SiCl4 pre valve closed
9/1/2011	3:16:57 PM	SiCl4 post valve closed
9/1/2011	3:16:57 PM	Main Vac valve closed
9/1/2011	3:16:57 PM	Bypass valve closed
9/1/2011	3:16:57 PM	Bubbler valve closed
9/1/2011	3:16:57 PM	Helium valve opened
9/1/2011	3:16:57 PM	Helium MFC set to  500.000000
9/1/2011	3:16:57 PM	H2 MFC set to  0.000000
9/1/2011	3:16:57 PM	BCl3 MFC set to  0.000000
9/1/2011	3:16:57 PM	PHl3 MFC set to  0.000000
9/1/2011	3:16:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:16:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:16:57 PM	Tube furnace set to 0
9/1/2011	3:17:59 PM	Helium valve closed
9/1/2011	3:17:59 PM	H2 valve closed
9/1/2011	3:17:59 PM	BCl3 valve closed
9/1/2011	3:17:59 PM	PH3 valve closed
9/1/2011	3:17:59 PM	SiCl4 pre valve closed
9/1/2011	3:17:59 PM	SiCl4 post valve closed
9/1/2011	3:17:59 PM	Main Vac valve closed
9/1/2011	3:17:59 PM	Bypass valve closed
9/1/2011	3:17:59 PM	Bubbler valve closed
9/1/2011	3:17:59 PM	Helium MFC set to  0.000000
9/1/2011	3:17:59 PM	H2 MFC set to  0.000000
9/1/2011	3:17:59 PM	BCl3 MFC set to  0.000000
9/1/2011	3:17:59 PM	PHl3 MFC set to  0.000000
9/1/2011	3:17:59 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:17:59 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:17:59 PM	Tube furnace set to 0
9/1/2011	3:18:00 PM	Run finished at 3:18 PM
9/1/2011	3:18:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	3:21:14 PM	Helium MFC set to  200.000000
9/1/2011	3:21:15 PM	Helium valve opened
9/1/2011	3:21:24 PM	Bubbler valve opened
9/1/2011	3:21:50 PM	Helium MFC set to  500.000000
9/1/2011	3:22:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	3:22:59 PM	Recipe started at 3:22 PM
9/1/2011	3:22:59 PM	Helium valve closed
9/1/2011	3:22:59 PM	H2 valve closed
9/1/2011	3:22:59 PM	BCl3 valve closed
9/1/2011	3:22:59 PM	PH3 valve closed
9/1/2011	3:22:59 PM	SiCl4 pre valve closed
9/1/2011	3:22:59 PM	SiCl4 post valve closed
9/1/2011	3:22:59 PM	Main Vac valve closed
9/1/2011	3:22:59 PM	Bubbler valve closed
9/1/2011	3:22:59 PM	Bypass valve opened
9/1/2011	3:22:59 PM	Helium MFC set to  0.000000
9/1/2011	3:22:59 PM	H2 MFC set to  0.000000
9/1/2011	3:22:59 PM	BCl3 MFC set to  0.000000
9/1/2011	3:22:59 PM	PHl3 MFC set to  0.000000
9/1/2011	3:22:59 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:22:59 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:22:59 PM	Tube furnace set to 0
9/1/2011	3:23:58 PM	Helium valve closed
9/1/2011	3:23:58 PM	H2 valve closed
9/1/2011	3:23:58 PM	BCl3 valve closed
9/1/2011	3:23:58 PM	PH3 valve closed
9/1/2011	3:23:58 PM	SiCl4 pre valve closed
9/1/2011	3:23:58 PM	SiCl4 post valve closed
9/1/2011	3:23:58 PM	Main Vac valve closed
9/1/2011	3:23:58 PM	Bubbler valve closed
9/1/2011	3:23:58 PM	Bypass valve opened
9/1/2011	3:23:58 PM	Helium MFC set to  0.000000
9/1/2011	3:23:58 PM	H2 MFC set to  0.000000
9/1/2011	3:23:58 PM	BCl3 MFC set to  0.000000
9/1/2011	3:23:58 PM	PHl3 MFC set to  0.000000
9/1/2011	3:23:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:23:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:23:58 PM	Tube furnace set to 0
9/1/2011	3:24:58 PM	Helium valve closed
9/1/2011	3:24:58 PM	H2 valve closed
9/1/2011	3:24:58 PM	BCl3 valve closed
9/1/2011	3:24:58 PM	PH3 valve closed
9/1/2011	3:24:58 PM	SiCl4 pre valve closed
9/1/2011	3:24:58 PM	SiCl4 post valve closed
9/1/2011	3:24:58 PM	Bypass valve closed
9/1/2011	3:24:58 PM	Bubbler valve closed
9/1/2011	3:24:58 PM	Main Vac valve opened
9/1/2011	3:24:58 PM	Helium MFC set to  0.000000
9/1/2011	3:24:58 PM	H2 MFC set to  0.000000
9/1/2011	3:24:58 PM	BCl3 MFC set to  0.000000
9/1/2011	3:24:58 PM	PHl3 MFC set to  0.000000
9/1/2011	3:24:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:24:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:24:58 PM	Tube furnace set to 0
9/1/2011	3:24:59 PM	Run finished at 3:24 PM
9/1/2011	3:24:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	3:26:31 PM	Recipe started at 3:26 PM
9/1/2011	3:26:31 PM	Helium valve closed
9/1/2011	3:26:31 PM	H2 valve closed
9/1/2011	3:26:31 PM	BCl3 valve closed
9/1/2011	3:26:31 PM	PH3 valve closed
9/1/2011	3:26:31 PM	SiCl4 pre valve closed
9/1/2011	3:26:31 PM	SiCl4 post valve closed
9/1/2011	3:26:31 PM	Bypass valve closed
9/1/2011	3:26:31 PM	Bubbler valve closed
9/1/2011	3:26:31 PM	Main Vac valve opened
9/1/2011	3:26:31 PM	Helium MFC set to  0.000000
9/1/2011	3:26:31 PM	H2 MFC set to  0.000000
9/1/2011	3:26:31 PM	BCl3 MFC set to  0.000000
9/1/2011	3:26:31 PM	PHl3 MFC set to  0.000000
9/1/2011	3:26:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:26:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:26:31 PM	Tube furnace set to 0
9/1/2011	3:27:01 PM	H2 valve closed
9/1/2011	3:27:01 PM	BCl3 valve closed
9/1/2011	3:27:01 PM	PH3 valve closed
9/1/2011	3:27:01 PM	SiCl4 pre valve closed
9/1/2011	3:27:01 PM	SiCl4 post valve closed
9/1/2011	3:27:01 PM	Bypass valve closed
9/1/2011	3:27:01 PM	Bubbler valve closed
9/1/2011	3:27:01 PM	Helium valve opened
9/1/2011	3:27:01 PM	Main Vac valve opened
9/1/2011	3:27:01 PM	Helium MFC set to  20.000000
9/1/2011	3:27:01 PM	H2 MFC set to  0.000000
9/1/2011	3:27:01 PM	BCl3 MFC set to  0.000000
9/1/2011	3:27:01 PM	PHl3 MFC set to  0.000000
9/1/2011	3:27:01 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:27:01 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:27:01 PM	Tube furnace set to 0
9/1/2011	3:27:31 PM	Helium valve closed
9/1/2011	3:27:31 PM	H2 valve closed
9/1/2011	3:27:31 PM	BCl3 valve closed
9/1/2011	3:27:31 PM	PH3 valve closed
9/1/2011	3:27:31 PM	SiCl4 pre valve closed
9/1/2011	3:27:31 PM	SiCl4 post valve closed
9/1/2011	3:27:31 PM	Bypass valve closed
9/1/2011	3:27:31 PM	Bubbler valve closed
9/1/2011	3:27:31 PM	Main Vac valve opened
9/1/2011	3:27:31 PM	Helium MFC set to  0.000000
9/1/2011	3:27:31 PM	H2 MFC set to  0.000000
9/1/2011	3:27:31 PM	BCl3 MFC set to  0.000000
9/1/2011	3:27:31 PM	PHl3 MFC set to  0.000000
9/1/2011	3:27:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:27:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:27:31 PM	Tube furnace set to 0
9/1/2011	3:28:01 PM	H2 valve closed
9/1/2011	3:28:01 PM	BCl3 valve closed
9/1/2011	3:28:01 PM	PH3 valve closed
9/1/2011	3:28:01 PM	SiCl4 pre valve closed
9/1/2011	3:28:01 PM	SiCl4 post valve closed
9/1/2011	3:28:01 PM	Bypass valve closed
9/1/2011	3:28:01 PM	Bubbler valve closed
9/1/2011	3:28:01 PM	Helium valve opened
9/1/2011	3:28:01 PM	Main Vac valve opened
9/1/2011	3:28:01 PM	Helium MFC set to  20.000000
9/1/2011	3:28:01 PM	H2 MFC set to  0.000000
9/1/2011	3:28:01 PM	BCl3 MFC set to  0.000000
9/1/2011	3:28:01 PM	PHl3 MFC set to  0.000000
9/1/2011	3:28:01 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:28:01 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:28:01 PM	Tube furnace set to 0
9/1/2011	3:28:31 PM	Helium valve closed
9/1/2011	3:28:31 PM	H2 valve closed
9/1/2011	3:28:31 PM	BCl3 valve closed
9/1/2011	3:28:31 PM	PH3 valve closed
9/1/2011	3:28:31 PM	SiCl4 pre valve closed
9/1/2011	3:28:31 PM	SiCl4 post valve closed
9/1/2011	3:28:31 PM	Bypass valve closed
9/1/2011	3:28:31 PM	Bubbler valve closed
9/1/2011	3:28:31 PM	Main Vac valve opened
9/1/2011	3:28:31 PM	Helium MFC set to  0.000000
9/1/2011	3:28:31 PM	H2 MFC set to  0.000000
9/1/2011	3:28:31 PM	BCl3 MFC set to  0.000000
9/1/2011	3:28:31 PM	PHl3 MFC set to  0.000000
9/1/2011	3:28:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:28:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:28:32 PM	Tube furnace set to 0
9/1/2011	3:29:02 PM	H2 valve closed
9/1/2011	3:29:02 PM	BCl3 valve closed
9/1/2011	3:29:02 PM	PH3 valve closed
9/1/2011	3:29:02 PM	SiCl4 pre valve closed
9/1/2011	3:29:02 PM	SiCl4 post valve closed
9/1/2011	3:29:02 PM	Bypass valve closed
9/1/2011	3:29:02 PM	Bubbler valve closed
9/1/2011	3:29:02 PM	Helium valve opened
9/1/2011	3:29:02 PM	Main Vac valve opened
9/1/2011	3:29:02 PM	Helium MFC set to  20.000000
9/1/2011	3:29:02 PM	H2 MFC set to  0.000000
9/1/2011	3:29:02 PM	BCl3 MFC set to  0.000000
9/1/2011	3:29:02 PM	PHl3 MFC set to  0.000000
9/1/2011	3:29:02 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:29:02 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:29:02 PM	Tube furnace set to 0
9/1/2011	3:29:32 PM	Helium valve closed
9/1/2011	3:29:32 PM	H2 valve closed
9/1/2011	3:29:32 PM	BCl3 valve closed
9/1/2011	3:29:32 PM	PH3 valve closed
9/1/2011	3:29:32 PM	SiCl4 pre valve closed
9/1/2011	3:29:32 PM	SiCl4 post valve closed
9/1/2011	3:29:32 PM	Bypass valve closed
9/1/2011	3:29:32 PM	Bubbler valve closed
9/1/2011	3:29:32 PM	Main Vac valve opened
9/1/2011	3:29:32 PM	Helium MFC set to  0.000000
9/1/2011	3:29:32 PM	H2 MFC set to  0.000000
9/1/2011	3:29:32 PM	BCl3 MFC set to  0.000000
9/1/2011	3:29:32 PM	PHl3 MFC set to  0.000000
9/1/2011	3:29:32 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:29:32 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:29:32 PM	Tube furnace set to 0
9/1/2011	3:30:02 PM	H2 valve closed
9/1/2011	3:30:02 PM	BCl3 valve closed
9/1/2011	3:30:02 PM	PH3 valve closed
9/1/2011	3:30:02 PM	SiCl4 pre valve closed
9/1/2011	3:30:02 PM	SiCl4 post valve closed
9/1/2011	3:30:02 PM	Bypass valve closed
9/1/2011	3:30:02 PM	Bubbler valve closed
9/1/2011	3:30:02 PM	Helium valve opened
9/1/2011	3:30:02 PM	Main Vac valve opened
9/1/2011	3:30:02 PM	Helium MFC set to  20.000000
9/1/2011	3:30:02 PM	H2 MFC set to  0.000000
9/1/2011	3:30:02 PM	BCl3 MFC set to  0.000000
9/1/2011	3:30:02 PM	PHl3 MFC set to  0.000000
9/1/2011	3:30:02 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:30:02 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:30:02 PM	Tube furnace set to 0
9/1/2011	3:30:32 PM	Helium valve closed
9/1/2011	3:30:32 PM	H2 valve closed
9/1/2011	3:30:32 PM	BCl3 valve closed
9/1/2011	3:30:32 PM	PH3 valve closed
9/1/2011	3:30:32 PM	SiCl4 pre valve closed
9/1/2011	3:30:32 PM	SiCl4 post valve closed
9/1/2011	3:30:32 PM	Bypass valve closed
9/1/2011	3:30:32 PM	Bubbler valve closed
9/1/2011	3:30:32 PM	Main Vac valve opened
9/1/2011	3:30:32 PM	Helium MFC set to  0.000000
9/1/2011	3:30:32 PM	H2 MFC set to  0.000000
9/1/2011	3:30:32 PM	BCl3 MFC set to  0.000000
9/1/2011	3:30:32 PM	PHl3 MFC set to  0.000000
9/1/2011	3:30:32 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:30:32 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:30:32 PM	Tube furnace set to 0
9/1/2011	3:31:02 PM	H2 valve closed
9/1/2011	3:31:02 PM	BCl3 valve closed
9/1/2011	3:31:02 PM	PH3 valve closed
9/1/2011	3:31:02 PM	SiCl4 pre valve closed
9/1/2011	3:31:02 PM	SiCl4 post valve closed
9/1/2011	3:31:02 PM	Bypass valve closed
9/1/2011	3:31:02 PM	Bubbler valve closed
9/1/2011	3:31:02 PM	Helium valve opened
9/1/2011	3:31:02 PM	Main Vac valve opened
9/1/2011	3:31:02 PM	Helium MFC set to  20.000000
9/1/2011	3:31:02 PM	H2 MFC set to  0.000000
9/1/2011	3:31:02 PM	BCl3 MFC set to  0.000000
9/1/2011	3:31:02 PM	PHl3 MFC set to  0.000000
9/1/2011	3:31:02 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:31:02 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:31:03 PM	Tube furnace set to 0
9/1/2011	3:31:33 PM	Helium valve closed
9/1/2011	3:31:33 PM	H2 valve closed
9/1/2011	3:31:33 PM	BCl3 valve closed
9/1/2011	3:31:33 PM	PH3 valve closed
9/1/2011	3:31:33 PM	SiCl4 pre valve closed
9/1/2011	3:31:33 PM	SiCl4 post valve closed
9/1/2011	3:31:33 PM	Bypass valve closed
9/1/2011	3:31:33 PM	Bubbler valve closed
9/1/2011	3:31:33 PM	Main Vac valve opened
9/1/2011	3:31:33 PM	Helium MFC set to  0.000000
9/1/2011	3:31:33 PM	H2 MFC set to  0.000000
9/1/2011	3:31:33 PM	BCl3 MFC set to  0.000000
9/1/2011	3:31:33 PM	PHl3 MFC set to  0.000000
9/1/2011	3:31:33 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:31:33 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:31:33 PM	Tube furnace set to 0
9/1/2011	3:32:03 PM	H2 valve closed
9/1/2011	3:32:03 PM	BCl3 valve closed
9/1/2011	3:32:03 PM	PH3 valve closed
9/1/2011	3:32:03 PM	SiCl4 pre valve closed
9/1/2011	3:32:03 PM	SiCl4 post valve closed
9/1/2011	3:32:03 PM	Bypass valve closed
9/1/2011	3:32:03 PM	Bubbler valve closed
9/1/2011	3:32:03 PM	Helium valve opened
9/1/2011	3:32:03 PM	Main Vac valve opened
9/1/2011	3:32:03 PM	Helium MFC set to  20.000000
9/1/2011	3:32:03 PM	H2 MFC set to  0.000000
9/1/2011	3:32:03 PM	BCl3 MFC set to  0.000000
9/1/2011	3:32:03 PM	PHl3 MFC set to  0.000000
9/1/2011	3:32:03 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:32:03 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:32:03 PM	Tube furnace set to 0
9/1/2011	3:32:33 PM	Helium valve closed
9/1/2011	3:32:33 PM	H2 valve closed
9/1/2011	3:32:33 PM	BCl3 valve closed
9/1/2011	3:32:33 PM	PH3 valve closed
9/1/2011	3:32:33 PM	SiCl4 pre valve closed
9/1/2011	3:32:33 PM	SiCl4 post valve closed
9/1/2011	3:32:33 PM	Bypass valve closed
9/1/2011	3:32:33 PM	Bubbler valve closed
9/1/2011	3:32:33 PM	Main Vac valve opened
9/1/2011	3:32:33 PM	Helium MFC set to  0.000000
9/1/2011	3:32:33 PM	H2 MFC set to  0.000000
9/1/2011	3:32:33 PM	BCl3 MFC set to  0.000000
9/1/2011	3:32:33 PM	PHl3 MFC set to  0.000000
9/1/2011	3:32:33 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:32:33 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:32:33 PM	Tube furnace set to 0
9/1/2011	3:33:03 PM	H2 valve closed
9/1/2011	3:33:03 PM	BCl3 valve closed
9/1/2011	3:33:03 PM	PH3 valve closed
9/1/2011	3:33:03 PM	SiCl4 pre valve closed
9/1/2011	3:33:03 PM	SiCl4 post valve closed
9/1/2011	3:33:03 PM	Bypass valve closed
9/1/2011	3:33:03 PM	Bubbler valve closed
9/1/2011	3:33:03 PM	Helium valve opened
9/1/2011	3:33:03 PM	Main Vac valve opened
9/1/2011	3:33:03 PM	Helium MFC set to  20.000000
9/1/2011	3:33:03 PM	H2 MFC set to  0.000000
9/1/2011	3:33:03 PM	BCl3 MFC set to  0.000000
9/1/2011	3:33:03 PM	PHl3 MFC set to  0.000000
9/1/2011	3:33:03 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:33:03 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:33:04 PM	Tube furnace set to 0
9/1/2011	3:33:34 PM	Helium valve closed
9/1/2011	3:33:34 PM	H2 valve closed
9/1/2011	3:33:34 PM	BCl3 valve closed
9/1/2011	3:33:34 PM	PH3 valve closed
9/1/2011	3:33:34 PM	SiCl4 pre valve closed
9/1/2011	3:33:34 PM	SiCl4 post valve closed
9/1/2011	3:33:34 PM	Bypass valve closed
9/1/2011	3:33:34 PM	Bubbler valve closed
9/1/2011	3:33:34 PM	Main Vac valve opened
9/1/2011	3:33:34 PM	Helium MFC set to  0.000000
9/1/2011	3:33:34 PM	H2 MFC set to  0.000000
9/1/2011	3:33:34 PM	BCl3 MFC set to  0.000000
9/1/2011	3:33:34 PM	PHl3 MFC set to  0.000000
9/1/2011	3:33:34 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:33:34 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:33:34 PM	Tube furnace set to 0
9/1/2011	3:34:04 PM	H2 valve closed
9/1/2011	3:34:04 PM	BCl3 valve closed
9/1/2011	3:34:04 PM	PH3 valve closed
9/1/2011	3:34:04 PM	SiCl4 pre valve closed
9/1/2011	3:34:04 PM	SiCl4 post valve closed
9/1/2011	3:34:04 PM	Bypass valve closed
9/1/2011	3:34:04 PM	Bubbler valve closed
9/1/2011	3:34:04 PM	Helium valve opened
9/1/2011	3:34:04 PM	Main Vac valve opened
9/1/2011	3:34:04 PM	Helium MFC set to  20.000000
9/1/2011	3:34:04 PM	H2 MFC set to  0.000000
9/1/2011	3:34:04 PM	BCl3 MFC set to  0.000000
9/1/2011	3:34:04 PM	PHl3 MFC set to  0.000000
9/1/2011	3:34:04 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:34:04 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:34:04 PM	Tube furnace set to 0
9/1/2011	3:34:34 PM	Helium valve closed
9/1/2011	3:34:34 PM	H2 valve closed
9/1/2011	3:34:34 PM	BCl3 valve closed
9/1/2011	3:34:34 PM	PH3 valve closed
9/1/2011	3:34:34 PM	SiCl4 pre valve closed
9/1/2011	3:34:34 PM	SiCl4 post valve closed
9/1/2011	3:34:34 PM	Bypass valve closed
9/1/2011	3:34:34 PM	Bubbler valve closed
9/1/2011	3:34:34 PM	Main Vac valve opened
9/1/2011	3:34:34 PM	Helium MFC set to  0.000000
9/1/2011	3:34:34 PM	H2 MFC set to  0.000000
9/1/2011	3:34:34 PM	BCl3 MFC set to  0.000000
9/1/2011	3:34:34 PM	PHl3 MFC set to  0.000000
9/1/2011	3:34:34 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:34:34 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:34:34 PM	Tube furnace set to 0
9/1/2011	3:35:04 PM	H2 valve closed
9/1/2011	3:35:04 PM	BCl3 valve closed
9/1/2011	3:35:04 PM	PH3 valve closed
9/1/2011	3:35:04 PM	SiCl4 pre valve closed
9/1/2011	3:35:04 PM	SiCl4 post valve closed
9/1/2011	3:35:04 PM	Bypass valve closed
9/1/2011	3:35:04 PM	Bubbler valve closed
9/1/2011	3:35:04 PM	Helium valve opened
9/1/2011	3:35:04 PM	Main Vac valve opened
9/1/2011	3:35:04 PM	Helium MFC set to  20.000000
9/1/2011	3:35:04 PM	H2 MFC set to  0.000000
9/1/2011	3:35:04 PM	BCl3 MFC set to  0.000000
9/1/2011	3:35:04 PM	PHl3 MFC set to  0.000000
9/1/2011	3:35:04 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:35:04 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:35:04 PM	Tube furnace set to 0
9/1/2011	3:35:34 PM	Helium valve closed
9/1/2011	3:35:34 PM	H2 valve closed
9/1/2011	3:35:34 PM	BCl3 valve closed
9/1/2011	3:35:34 PM	PH3 valve closed
9/1/2011	3:35:34 PM	SiCl4 pre valve closed
9/1/2011	3:35:34 PM	SiCl4 post valve closed
9/1/2011	3:35:34 PM	Bypass valve closed
9/1/2011	3:35:34 PM	Bubbler valve closed
9/1/2011	3:35:34 PM	Main Vac valve opened
9/1/2011	3:35:34 PM	Helium MFC set to  0.000000
9/1/2011	3:35:34 PM	H2 MFC set to  0.000000
9/1/2011	3:35:34 PM	BCl3 MFC set to  0.000000
9/1/2011	3:35:34 PM	PHl3 MFC set to  0.000000
9/1/2011	3:35:34 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:35:34 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:35:35 PM	Tube furnace set to 0
9/1/2011	3:36:05 PM	H2 valve closed
9/1/2011	3:36:05 PM	BCl3 valve closed
9/1/2011	3:36:05 PM	PH3 valve closed
9/1/2011	3:36:05 PM	SiCl4 pre valve closed
9/1/2011	3:36:05 PM	SiCl4 post valve closed
9/1/2011	3:36:05 PM	Bypass valve closed
9/1/2011	3:36:05 PM	Bubbler valve closed
9/1/2011	3:36:05 PM	Helium valve opened
9/1/2011	3:36:05 PM	Main Vac valve opened
9/1/2011	3:36:05 PM	Helium MFC set to  20.000000
9/1/2011	3:36:05 PM	H2 MFC set to  0.000000
9/1/2011	3:36:05 PM	BCl3 MFC set to  0.000000
9/1/2011	3:36:05 PM	PHl3 MFC set to  0.000000
9/1/2011	3:36:05 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:36:05 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:36:05 PM	Tube furnace set to 0
9/1/2011	3:36:35 PM	Helium valve closed
9/1/2011	3:36:35 PM	H2 valve closed
9/1/2011	3:36:35 PM	BCl3 valve closed
9/1/2011	3:36:35 PM	PH3 valve closed
9/1/2011	3:36:35 PM	SiCl4 pre valve closed
9/1/2011	3:36:35 PM	SiCl4 post valve closed
9/1/2011	3:36:35 PM	Bypass valve closed
9/1/2011	3:36:35 PM	Bubbler valve closed
9/1/2011	3:36:35 PM	Main Vac valve opened
9/1/2011	3:36:35 PM	Helium MFC set to  0.000000
9/1/2011	3:36:35 PM	H2 MFC set to  0.000000
9/1/2011	3:36:35 PM	BCl3 MFC set to  0.000000
9/1/2011	3:36:35 PM	PHl3 MFC set to  0.000000
9/1/2011	3:36:35 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:36:35 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:36:35 PM	Tube furnace set to 0
9/1/2011	3:36:36 PM	Run finished at 3:36 PM
9/1/2011	3:46:06 PM	Recipe started at 3:46 PM
9/1/2011	3:46:06 PM	Helium valve closed
9/1/2011	3:46:06 PM	H2 valve closed
9/1/2011	3:46:06 PM	BCl3 valve closed
9/1/2011	3:46:06 PM	PH3 valve closed
9/1/2011	3:46:06 PM	SiCl4 pre valve closed
9/1/2011	3:46:06 PM	SiCl4 post valve closed
9/1/2011	3:46:06 PM	Bypass valve closed
9/1/2011	3:46:06 PM	Bubbler valve closed
9/1/2011	3:46:06 PM	Main Vac valve opened
9/1/2011	3:46:06 PM	Helium MFC set to  0.000000
9/1/2011	3:46:06 PM	H2 MFC set to  0.000000
9/1/2011	3:46:06 PM	BCl3 MFC set to  0.000000
9/1/2011	3:46:06 PM	PHl3 MFC set to  0.000000
9/1/2011	3:46:06 PM	SiCl4 MFC set to  0.000000
9/1/2011	3:46:06 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	3:46:06 PM	Tube furnace set to 180
9/1/2011	4:06:06 PM	Helium valve closed
9/1/2011	4:06:06 PM	BCl3 valve closed
9/1/2011	4:06:06 PM	PH3 valve closed
9/1/2011	4:06:06 PM	SiCl4 pre valve closed
9/1/2011	4:06:06 PM	SiCl4 post valve closed
9/1/2011	4:06:06 PM	Main Vac valve closed
9/1/2011	4:06:06 PM	Bypass valve closed
9/1/2011	4:06:06 PM	Bubbler valve closed
9/1/2011	4:06:06 PM	H2 valve opened
9/1/2011	4:06:06 PM	Helium MFC set to  0.000000
9/1/2011	4:06:06 PM	H2 MFC set to  500.000000
9/1/2011	4:06:06 PM	BCl3 MFC set to  0.000000
9/1/2011	4:06:06 PM	PHl3 MFC set to  0.000000
9/1/2011	4:06:06 PM	SiCl4 MFC set to  0.000000
9/1/2011	4:06:06 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:06:07 PM	Tube furnace set to 1000
9/1/2011	4:07:11 PM	Helium valve closed
9/1/2011	4:07:11 PM	BCl3 valve closed
9/1/2011	4:07:11 PM	PH3 valve closed
9/1/2011	4:07:11 PM	SiCl4 pre valve closed
9/1/2011	4:07:11 PM	SiCl4 post valve closed
9/1/2011	4:07:11 PM	Main Vac valve closed
9/1/2011	4:07:11 PM	Bypass valve closed
9/1/2011	4:07:11 PM	H2 valve opened
9/1/2011	4:07:11 PM	Bubbler valve opened
9/1/2011	4:07:11 PM	Helium MFC set to  0.000000
9/1/2011	4:07:11 PM	H2 MFC set to  500.000000
9/1/2011	4:07:11 PM	BCl3 MFC set to  0.000000
9/1/2011	4:07:11 PM	PHl3 MFC set to  0.000000
9/1/2011	4:07:11 PM	SiCl4 MFC set to  0.000000
9/1/2011	4:07:11 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:07:11 PM	Tube furnace set to 1000
9/1/2011	4:07:12 PM	Helium valve closed
9/1/2011	4:07:12 PM	BCl3 valve closed
9/1/2011	4:07:12 PM	PH3 valve closed
9/1/2011	4:07:12 PM	SiCl4 pre valve closed
9/1/2011	4:07:12 PM	SiCl4 post valve closed
9/1/2011	4:07:12 PM	Main Vac valve closed
9/1/2011	4:07:12 PM	Bypass valve closed
9/1/2011	4:07:12 PM	H2 valve opened
9/1/2011	4:07:12 PM	Bubbler valve opened
9/1/2011	4:07:12 PM	Helium MFC set to  0.000000
9/1/2011	4:07:12 PM	H2 MFC set to  500.000000
9/1/2011	4:07:12 PM	BCl3 MFC set to  0.000000
9/1/2011	4:07:12 PM	PHl3 MFC set to  0.000000
9/1/2011	4:07:12 PM	SiCl4 MFC set to  0.000000
9/1/2011	4:07:12 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:07:12 PM	Tube furnace set to 1000
9/1/2011	4:27:12 PM	Helium valve closed
9/1/2011	4:27:12 PM	PH3 valve closed
9/1/2011	4:27:12 PM	Main Vac valve closed
9/1/2011	4:27:12 PM	Bypass valve closed
9/1/2011	4:27:12 PM	H2 valve opened
9/1/2011	4:27:12 PM	BCl3 valve opened
9/1/2011	4:27:12 PM	SiCl4 pre valve opened
9/1/2011	4:27:12 PM	SiCl4 post valve opened
9/1/2011	4:27:12 PM	Bubbler valve opened
9/1/2011	4:27:12 PM	Helium MFC set to  0.000000
9/1/2011	4:27:12 PM	H2 MFC set to  500.000000
9/1/2011	4:27:12 PM	BCl3 MFC set to  2.500000
9/1/2011	4:27:12 PM	PHl3 MFC set to  0.000000
9/1/2011	4:27:12 PM	SiCl4 MFC set to  50.000000
9/1/2011	4:27:12 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:27:12 PM	Tube furnace set to 1000
9/1/2011	4:39:12 PM	Helium valve closed
9/1/2011	4:39:12 PM	BCl3 valve closed
9/1/2011	4:39:12 PM	PH3 valve closed
9/1/2011	4:39:12 PM	SiCl4 pre valve closed
9/1/2011	4:39:12 PM	SiCl4 post valve closed
9/1/2011	4:39:12 PM	Main Vac valve closed
9/1/2011	4:39:12 PM	Bypass valve closed
9/1/2011	4:39:12 PM	H2 valve opened
9/1/2011	4:39:12 PM	Bubbler valve opened
9/1/2011	4:39:12 PM	Helium MFC set to  0.000000
9/1/2011	4:39:12 PM	H2 MFC set to  500.000000
9/1/2011	4:39:12 PM	BCl3 MFC set to  0.000000
9/1/2011	4:39:12 PM	PHl3 MFC set to  0.000000
9/1/2011	4:39:12 PM	SiCl4 MFC set to  0.000000
9/1/2011	4:39:12 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:39:13 PM	Tube furnace set to 750
9/1/2011	4:44:13 PM	H2 valve closed
9/1/2011	4:44:13 PM	BCl3 valve closed
9/1/2011	4:44:13 PM	PH3 valve closed
9/1/2011	4:44:13 PM	SiCl4 pre valve closed
9/1/2011	4:44:13 PM	SiCl4 post valve closed
9/1/2011	4:44:13 PM	Main Vac valve closed
9/1/2011	4:44:13 PM	Bypass valve closed
9/1/2011	4:44:13 PM	Helium valve opened
9/1/2011	4:44:13 PM	Bubbler valve opened
9/1/2011	4:44:13 PM	Helium MFC set to  500.000000
9/1/2011	4:44:13 PM	H2 MFC set to  0.000000
9/1/2011	4:44:13 PM	BCl3 MFC set to  0.000000
9/1/2011	4:44:13 PM	PHl3 MFC set to  0.000000
9/1/2011	4:44:13 PM	SiCl4 MFC set to  0.000000
9/1/2011	4:44:13 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	4:44:13 PM	Tube furnace set to 0
9/1/2011	5:04:13 PM	Helium valve closed
9/1/2011	5:04:13 PM	H2 valve closed
9/1/2011	5:04:13 PM	BCl3 valve closed
9/1/2011	5:04:13 PM	PH3 valve closed
9/1/2011	5:04:13 PM	SiCl4 pre valve closed
9/1/2011	5:04:13 PM	SiCl4 post valve closed
9/1/2011	5:04:13 PM	Main Vac valve closed
9/1/2011	5:04:13 PM	Bypass valve closed
9/1/2011	5:04:13 PM	Bubbler valve closed
9/1/2011	5:04:13 PM	Helium MFC set to  0.000000
9/1/2011	5:04:13 PM	H2 MFC set to  0.000000
9/1/2011	5:04:13 PM	BCl3 MFC set to  0.000000
9/1/2011	5:04:13 PM	PHl3 MFC set to  0.000000
9/1/2011	5:04:13 PM	SiCl4 MFC set to  0.000000
9/1/2011	5:04:13 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	5:04:13 PM	Tube furnace set to 0
9/1/2011	6:04:13 PM	H2 valve closed
9/1/2011	6:04:13 PM	BCl3 valve closed
9/1/2011	6:04:13 PM	PH3 valve closed
9/1/2011	6:04:13 PM	SiCl4 pre valve closed
9/1/2011	6:04:13 PM	SiCl4 post valve closed
9/1/2011	6:04:13 PM	Main Vac valve closed
9/1/2011	6:04:13 PM	Bypass valve closed
9/1/2011	6:04:13 PM	Bubbler valve closed
9/1/2011	6:04:13 PM	Helium valve opened
9/1/2011	6:04:13 PM	Helium MFC set to  500.000000
9/1/2011	6:04:13 PM	H2 MFC set to  0.000000
9/1/2011	6:04:13 PM	BCl3 MFC set to  0.000000
9/1/2011	6:04:13 PM	PHl3 MFC set to  0.000000
9/1/2011	6:04:13 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:04:13 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:04:13 PM	Tube furnace set to 0
9/1/2011	6:04:19 PM	H2 valve closed
9/1/2011	6:04:19 PM	BCl3 valve closed
9/1/2011	6:04:19 PM	PH3 valve closed
9/1/2011	6:04:19 PM	SiCl4 pre valve closed
9/1/2011	6:04:19 PM	SiCl4 post valve closed
9/1/2011	6:04:19 PM	Main Vac valve closed
9/1/2011	6:04:19 PM	Bypass valve closed
9/1/2011	6:04:19 PM	Helium valve opened
9/1/2011	6:04:19 PM	Bubbler valve opened
9/1/2011	6:04:19 PM	Helium MFC set to  500.000000
9/1/2011	6:04:19 PM	H2 MFC set to  0.000000
9/1/2011	6:04:19 PM	BCl3 MFC set to  0.000000
9/1/2011	6:04:19 PM	PHl3 MFC set to  0.000000
9/1/2011	6:04:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:04:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:04:19 PM	Tube furnace set to 0
9/1/2011	6:09:19 PM	Helium valve closed
9/1/2011	6:09:19 PM	H2 valve closed
9/1/2011	6:09:19 PM	BCl3 valve closed
9/1/2011	6:09:19 PM	PH3 valve closed
9/1/2011	6:09:19 PM	SiCl4 pre valve closed
9/1/2011	6:09:19 PM	SiCl4 post valve closed
9/1/2011	6:09:19 PM	Main Vac valve closed
9/1/2011	6:09:19 PM	Bypass valve closed
9/1/2011	6:09:19 PM	Bubbler valve closed
9/1/2011	6:09:19 PM	Helium MFC set to  0.000000
9/1/2011	6:09:19 PM	H2 MFC set to  0.000000
9/1/2011	6:09:19 PM	BCl3 MFC set to  0.000000
9/1/2011	6:09:19 PM	PHl3 MFC set to  0.000000
9/1/2011	6:09:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:09:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:09:19 PM	Tube furnace set to 0
9/1/2011	6:09:20 PM	Helium valve closed
9/1/2011	6:09:20 PM	H2 valve closed
9/1/2011	6:09:20 PM	BCl3 valve closed
9/1/2011	6:09:20 PM	PH3 valve closed
9/1/2011	6:09:20 PM	SiCl4 pre valve closed
9/1/2011	6:09:20 PM	SiCl4 post valve closed
9/1/2011	6:09:20 PM	Main Vac valve closed
9/1/2011	6:09:20 PM	Bubbler valve closed
9/1/2011	6:09:20 PM	Bypass valve opened
9/1/2011	6:09:20 PM	Helium MFC set to  0.000000
9/1/2011	6:09:20 PM	H2 MFC set to  0.000000
9/1/2011	6:09:20 PM	BCl3 MFC set to  0.000000
9/1/2011	6:09:20 PM	PHl3 MFC set to  0.000000
9/1/2011	6:09:20 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:09:20 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:09:20 PM	Tube furnace set to 0
9/1/2011	6:10:10 PM	Helium valve closed
9/1/2011	6:10:10 PM	H2 valve closed
9/1/2011	6:10:10 PM	BCl3 valve closed
9/1/2011	6:10:10 PM	PH3 valve closed
9/1/2011	6:10:10 PM	SiCl4 pre valve closed
9/1/2011	6:10:10 PM	SiCl4 post valve closed
9/1/2011	6:10:10 PM	Main Vac valve closed
9/1/2011	6:10:10 PM	Bubbler valve closed
9/1/2011	6:10:10 PM	Bypass valve opened
9/1/2011	6:10:10 PM	Helium MFC set to  0.000000
9/1/2011	6:10:10 PM	H2 MFC set to  0.000000
9/1/2011	6:10:10 PM	BCl3 MFC set to  0.000000
9/1/2011	6:10:10 PM	PHl3 MFC set to  0.000000
9/1/2011	6:10:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:10:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:10:10 PM	Tube furnace set to 0
9/1/2011	6:11:10 PM	Helium valve closed
9/1/2011	6:11:10 PM	H2 valve closed
9/1/2011	6:11:10 PM	BCl3 valve closed
9/1/2011	6:11:10 PM	PH3 valve closed
9/1/2011	6:11:10 PM	SiCl4 pre valve closed
9/1/2011	6:11:10 PM	SiCl4 post valve closed
9/1/2011	6:11:10 PM	Bypass valve closed
9/1/2011	6:11:10 PM	Bubbler valve closed
9/1/2011	6:11:10 PM	Main Vac valve opened
9/1/2011	6:11:10 PM	Helium MFC set to  0.000000
9/1/2011	6:11:10 PM	H2 MFC set to  0.000000
9/1/2011	6:11:10 PM	BCl3 MFC set to  0.000000
9/1/2011	6:11:10 PM	PHl3 MFC set to  0.000000
9/1/2011	6:11:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	6:11:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	6:11:10 PM	Tube furnace set to 0
9/1/2011	6:11:11 PM	Run finished at 6:11 PM
9/1/2011	7:13:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	7:13:41 PM	Recipe started at 7:13 PM
9/1/2011	7:13:41 PM	Helium valve closed
9/1/2011	7:13:41 PM	H2 valve closed
9/1/2011	7:13:41 PM	BCl3 valve closed
9/1/2011	7:13:41 PM	PH3 valve closed
9/1/2011	7:13:41 PM	SiCl4 pre valve closed
9/1/2011	7:13:41 PM	SiCl4 post valve closed
9/1/2011	7:13:41 PM	Main Vac valve closed
9/1/2011	7:13:41 PM	Bypass valve closed
9/1/2011	7:13:41 PM	Bubbler valve closed
9/1/2011	7:13:41 PM	Helium MFC set to  0.000000
9/1/2011	7:13:41 PM	H2 MFC set to  0.000000
9/1/2011	7:13:41 PM	BCl3 MFC set to  0.000000
9/1/2011	7:13:41 PM	PHl3 MFC set to  0.000000
9/1/2011	7:13:41 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:13:41 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:13:41 PM	Tube furnace set to 0
9/1/2011	7:13:44 PM	H2 valve closed
9/1/2011	7:13:44 PM	BCl3 valve closed
9/1/2011	7:13:44 PM	PH3 valve closed
9/1/2011	7:13:44 PM	SiCl4 pre valve closed
9/1/2011	7:13:44 PM	SiCl4 post valve closed
9/1/2011	7:13:44 PM	Main Vac valve closed
9/1/2011	7:13:44 PM	Bypass valve closed
9/1/2011	7:13:44 PM	Bubbler valve closed
9/1/2011	7:13:44 PM	Helium valve opened
9/1/2011	7:13:44 PM	Helium MFC set to  500.000000
9/1/2011	7:13:44 PM	H2 MFC set to  0.000000
9/1/2011	7:13:44 PM	BCl3 MFC set to  0.000000
9/1/2011	7:13:44 PM	PHl3 MFC set to  0.000000
9/1/2011	7:13:44 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:13:44 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:13:44 PM	Tube furnace set to 0
9/1/2011	7:14:47 PM	Helium valve closed
9/1/2011	7:14:47 PM	H2 valve closed
9/1/2011	7:14:47 PM	BCl3 valve closed
9/1/2011	7:14:47 PM	PH3 valve closed
9/1/2011	7:14:47 PM	SiCl4 pre valve closed
9/1/2011	7:14:47 PM	SiCl4 post valve closed
9/1/2011	7:14:47 PM	Main Vac valve closed
9/1/2011	7:14:47 PM	Bypass valve closed
9/1/2011	7:14:47 PM	Bubbler valve closed
9/1/2011	7:14:47 PM	Helium MFC set to  0.000000
9/1/2011	7:14:47 PM	H2 MFC set to  0.000000
9/1/2011	7:14:47 PM	BCl3 MFC set to  0.000000
9/1/2011	7:14:47 PM	PHl3 MFC set to  0.000000
9/1/2011	7:14:47 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:14:47 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:14:47 PM	Tube furnace set to 0
9/1/2011	7:14:48 PM	Run finished at 7:14 PM
9/1/2011	7:14:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	7:18:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/1/2011	7:18:19 PM	Recipe started at 7:18 PM
9/1/2011	7:18:19 PM	Helium valve closed
9/1/2011	7:18:19 PM	H2 valve closed
9/1/2011	7:18:19 PM	BCl3 valve closed
9/1/2011	7:18:19 PM	PH3 valve closed
9/1/2011	7:18:19 PM	SiCl4 pre valve closed
9/1/2011	7:18:19 PM	SiCl4 post valve closed
9/1/2011	7:18:19 PM	Main Vac valve closed
9/1/2011	7:18:19 PM	Bubbler valve closed
9/1/2011	7:18:19 PM	Bypass valve opened
9/1/2011	7:18:19 PM	Helium MFC set to  0.000000
9/1/2011	7:18:19 PM	H2 MFC set to  0.000000
9/1/2011	7:18:19 PM	BCl3 MFC set to  0.000000
9/1/2011	7:18:19 PM	PHl3 MFC set to  0.000000
9/1/2011	7:18:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:18:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:18:19 PM	Tube furnace set to 0
9/1/2011	7:19:24 PM	Helium valve closed
9/1/2011	7:19:24 PM	H2 valve closed
9/1/2011	7:19:24 PM	BCl3 valve closed
9/1/2011	7:19:24 PM	PH3 valve closed
9/1/2011	7:19:24 PM	SiCl4 pre valve closed
9/1/2011	7:19:24 PM	SiCl4 post valve closed
9/1/2011	7:19:24 PM	Main Vac valve closed
9/1/2011	7:19:24 PM	Bubbler valve closed
9/1/2011	7:19:24 PM	Bypass valve opened
9/1/2011	7:19:24 PM	Helium MFC set to  0.000000
9/1/2011	7:19:24 PM	H2 MFC set to  0.000000
9/1/2011	7:19:24 PM	BCl3 MFC set to  0.000000
9/1/2011	7:19:24 PM	PHl3 MFC set to  0.000000
9/1/2011	7:19:24 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:19:24 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:19:24 PM	Tube furnace set to 0
9/1/2011	7:19:54 PM	Helium valve closed
9/1/2011	7:19:54 PM	H2 valve closed
9/1/2011	7:19:54 PM	BCl3 valve closed
9/1/2011	7:19:54 PM	PH3 valve closed
9/1/2011	7:19:54 PM	SiCl4 pre valve closed
9/1/2011	7:19:54 PM	SiCl4 post valve closed
9/1/2011	7:19:54 PM	Bypass valve closed
9/1/2011	7:19:54 PM	Bubbler valve closed
9/1/2011	7:19:54 PM	Main Vac valve opened
9/1/2011	7:19:54 PM	Helium MFC set to  0.000000
9/1/2011	7:19:54 PM	H2 MFC set to  0.000000
9/1/2011	7:19:54 PM	BCl3 MFC set to  0.000000
9/1/2011	7:19:54 PM	PHl3 MFC set to  0.000000
9/1/2011	7:19:54 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:19:54 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:19:54 PM	Tube furnace set to 0
9/1/2011	7:20:24 PM	H2 valve closed
9/1/2011	7:20:24 PM	BCl3 valve closed
9/1/2011	7:20:24 PM	PH3 valve closed
9/1/2011	7:20:24 PM	SiCl4 pre valve closed
9/1/2011	7:20:24 PM	SiCl4 post valve closed
9/1/2011	7:20:24 PM	Bypass valve closed
9/1/2011	7:20:24 PM	Bubbler valve closed
9/1/2011	7:20:24 PM	Helium valve opened
9/1/2011	7:20:24 PM	Main Vac valve opened
9/1/2011	7:20:24 PM	Helium MFC set to  20.000000
9/1/2011	7:20:24 PM	H2 MFC set to  0.000000
9/1/2011	7:20:24 PM	BCl3 MFC set to  0.000000
9/1/2011	7:20:24 PM	PHl3 MFC set to  0.000000
9/1/2011	7:20:24 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:20:24 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:20:24 PM	Tube furnace set to 0
9/1/2011	7:20:54 PM	Helium valve closed
9/1/2011	7:20:54 PM	H2 valve closed
9/1/2011	7:20:54 PM	BCl3 valve closed
9/1/2011	7:20:54 PM	PH3 valve closed
9/1/2011	7:20:54 PM	SiCl4 pre valve closed
9/1/2011	7:20:54 PM	SiCl4 post valve closed
9/1/2011	7:20:54 PM	Bypass valve closed
9/1/2011	7:20:54 PM	Bubbler valve closed
9/1/2011	7:20:54 PM	Main Vac valve opened
9/1/2011	7:20:54 PM	Helium MFC set to  0.000000
9/1/2011	7:20:54 PM	H2 MFC set to  0.000000
9/1/2011	7:20:54 PM	BCl3 MFC set to  0.000000
9/1/2011	7:20:54 PM	PHl3 MFC set to  0.000000
9/1/2011	7:20:54 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:20:54 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:20:54 PM	Tube furnace set to 0
9/1/2011	7:21:24 PM	H2 valve closed
9/1/2011	7:21:24 PM	BCl3 valve closed
9/1/2011	7:21:25 PM	PH3 valve closed
9/1/2011	7:21:25 PM	SiCl4 pre valve closed
9/1/2011	7:21:25 PM	SiCl4 post valve closed
9/1/2011	7:21:25 PM	Bypass valve closed
9/1/2011	7:21:25 PM	Bubbler valve closed
9/1/2011	7:21:25 PM	Helium valve opened
9/1/2011	7:21:25 PM	Main Vac valve opened
9/1/2011	7:21:25 PM	Helium MFC set to  20.000000
9/1/2011	7:21:25 PM	H2 MFC set to  0.000000
9/1/2011	7:21:25 PM	BCl3 MFC set to  0.000000
9/1/2011	7:21:25 PM	PHl3 MFC set to  0.000000
9/1/2011	7:21:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:21:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:21:25 PM	Tube furnace set to 0
9/1/2011	7:21:55 PM	Helium valve closed
9/1/2011	7:21:55 PM	H2 valve closed
9/1/2011	7:21:55 PM	BCl3 valve closed
9/1/2011	7:21:55 PM	PH3 valve closed
9/1/2011	7:21:55 PM	SiCl4 pre valve closed
9/1/2011	7:21:55 PM	SiCl4 post valve closed
9/1/2011	7:21:55 PM	Bypass valve closed
9/1/2011	7:21:55 PM	Bubbler valve closed
9/1/2011	7:21:55 PM	Main Vac valve opened
9/1/2011	7:21:55 PM	Helium MFC set to  0.000000
9/1/2011	7:21:55 PM	H2 MFC set to  0.000000
9/1/2011	7:21:55 PM	BCl3 MFC set to  0.000000
9/1/2011	7:21:55 PM	PHl3 MFC set to  0.000000
9/1/2011	7:21:55 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:21:55 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:21:55 PM	Tube furnace set to 0
9/1/2011	7:22:25 PM	H2 valve closed
9/1/2011	7:22:25 PM	BCl3 valve closed
9/1/2011	7:22:25 PM	PH3 valve closed
9/1/2011	7:22:25 PM	SiCl4 pre valve closed
9/1/2011	7:22:25 PM	SiCl4 post valve closed
9/1/2011	7:22:25 PM	Bypass valve closed
9/1/2011	7:22:25 PM	Bubbler valve closed
9/1/2011	7:22:25 PM	Helium valve opened
9/1/2011	7:22:25 PM	Main Vac valve opened
9/1/2011	7:22:25 PM	Helium MFC set to  20.000000
9/1/2011	7:22:25 PM	H2 MFC set to  0.000000
9/1/2011	7:22:25 PM	BCl3 MFC set to  0.000000
9/1/2011	7:22:25 PM	PHl3 MFC set to  0.000000
9/1/2011	7:22:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:22:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:22:25 PM	Tube furnace set to 0
9/1/2011	7:22:55 PM	Helium valve closed
9/1/2011	7:22:55 PM	H2 valve closed
9/1/2011	7:22:55 PM	BCl3 valve closed
9/1/2011	7:22:55 PM	PH3 valve closed
9/1/2011	7:22:55 PM	SiCl4 pre valve closed
9/1/2011	7:22:55 PM	SiCl4 post valve closed
9/1/2011	7:22:55 PM	Bypass valve closed
9/1/2011	7:22:55 PM	Bubbler valve closed
9/1/2011	7:22:55 PM	Main Vac valve opened
9/1/2011	7:22:55 PM	Helium MFC set to  0.000000
9/1/2011	7:22:55 PM	H2 MFC set to  0.000000
9/1/2011	7:22:55 PM	BCl3 MFC set to  0.000000
9/1/2011	7:22:55 PM	PHl3 MFC set to  0.000000
9/1/2011	7:22:55 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:22:55 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:22:55 PM	Tube furnace set to 0
9/1/2011	7:23:25 PM	H2 valve closed
9/1/2011	7:23:25 PM	BCl3 valve closed
9/1/2011	7:23:25 PM	PH3 valve closed
9/1/2011	7:23:25 PM	SiCl4 pre valve closed
9/1/2011	7:23:25 PM	SiCl4 post valve closed
9/1/2011	7:23:25 PM	Bypass valve closed
9/1/2011	7:23:25 PM	Bubbler valve closed
9/1/2011	7:23:25 PM	Helium valve opened
9/1/2011	7:23:25 PM	Main Vac valve opened
9/1/2011	7:23:25 PM	Helium MFC set to  20.000000
9/1/2011	7:23:25 PM	H2 MFC set to  0.000000
9/1/2011	7:23:25 PM	BCl3 MFC set to  0.000000
9/1/2011	7:23:25 PM	PHl3 MFC set to  0.000000
9/1/2011	7:23:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:23:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:23:26 PM	Tube furnace set to 0
9/1/2011	7:23:56 PM	Helium valve closed
9/1/2011	7:23:56 PM	H2 valve closed
9/1/2011	7:23:56 PM	BCl3 valve closed
9/1/2011	7:23:56 PM	PH3 valve closed
9/1/2011	7:23:56 PM	SiCl4 pre valve closed
9/1/2011	7:23:56 PM	SiCl4 post valve closed
9/1/2011	7:23:56 PM	Bypass valve closed
9/1/2011	7:23:56 PM	Bubbler valve closed
9/1/2011	7:23:56 PM	Main Vac valve opened
9/1/2011	7:23:56 PM	Helium MFC set to  0.000000
9/1/2011	7:23:56 PM	H2 MFC set to  0.000000
9/1/2011	7:23:56 PM	BCl3 MFC set to  0.000000
9/1/2011	7:23:56 PM	PHl3 MFC set to  0.000000
9/1/2011	7:23:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:23:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:23:56 PM	Tube furnace set to 0
9/1/2011	7:24:26 PM	H2 valve closed
9/1/2011	7:24:26 PM	BCl3 valve closed
9/1/2011	7:24:26 PM	PH3 valve closed
9/1/2011	7:24:26 PM	SiCl4 pre valve closed
9/1/2011	7:24:26 PM	SiCl4 post valve closed
9/1/2011	7:24:26 PM	Bypass valve closed
9/1/2011	7:24:26 PM	Bubbler valve closed
9/1/2011	7:24:26 PM	Helium valve opened
9/1/2011	7:24:26 PM	Main Vac valve opened
9/1/2011	7:24:26 PM	Helium MFC set to  20.000000
9/1/2011	7:24:26 PM	H2 MFC set to  0.000000
9/1/2011	7:24:26 PM	BCl3 MFC set to  0.000000
9/1/2011	7:24:26 PM	PHl3 MFC set to  0.000000
9/1/2011	7:24:26 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:24:26 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:24:26 PM	Tube furnace set to 0
9/1/2011	7:24:56 PM	Helium valve closed
9/1/2011	7:24:56 PM	H2 valve closed
9/1/2011	7:24:56 PM	BCl3 valve closed
9/1/2011	7:24:56 PM	PH3 valve closed
9/1/2011	7:24:56 PM	SiCl4 pre valve closed
9/1/2011	7:24:56 PM	SiCl4 post valve closed
9/1/2011	7:24:56 PM	Bypass valve closed
9/1/2011	7:24:56 PM	Bubbler valve closed
9/1/2011	7:24:56 PM	Main Vac valve opened
9/1/2011	7:24:56 PM	Helium MFC set to  0.000000
9/1/2011	7:24:56 PM	H2 MFC set to  0.000000
9/1/2011	7:24:56 PM	BCl3 MFC set to  0.000000
9/1/2011	7:24:56 PM	PHl3 MFC set to  0.000000
9/1/2011	7:24:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:24:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:24:56 PM	Tube furnace set to 0
9/1/2011	7:25:26 PM	H2 valve closed
9/1/2011	7:25:26 PM	BCl3 valve closed
9/1/2011	7:25:26 PM	PH3 valve closed
9/1/2011	7:25:26 PM	SiCl4 pre valve closed
9/1/2011	7:25:26 PM	SiCl4 post valve closed
9/1/2011	7:25:26 PM	Bypass valve closed
9/1/2011	7:25:26 PM	Bubbler valve closed
9/1/2011	7:25:26 PM	Helium valve opened
9/1/2011	7:25:26 PM	Main Vac valve opened
9/1/2011	7:25:26 PM	Helium MFC set to  20.000000
9/1/2011	7:25:26 PM	H2 MFC set to  0.000000
9/1/2011	7:25:26 PM	BCl3 MFC set to  0.000000
9/1/2011	7:25:26 PM	PHl3 MFC set to  0.000000
9/1/2011	7:25:26 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:25:26 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:25:26 PM	Tube furnace set to 0
9/1/2011	7:25:56 PM	Helium valve closed
9/1/2011	7:25:56 PM	H2 valve closed
9/1/2011	7:25:56 PM	BCl3 valve closed
9/1/2011	7:25:56 PM	PH3 valve closed
9/1/2011	7:25:56 PM	SiCl4 pre valve closed
9/1/2011	7:25:56 PM	SiCl4 post valve closed
9/1/2011	7:25:56 PM	Bypass valve closed
9/1/2011	7:25:56 PM	Bubbler valve closed
9/1/2011	7:25:56 PM	Main Vac valve opened
9/1/2011	7:25:56 PM	Helium MFC set to  0.000000
9/1/2011	7:25:56 PM	H2 MFC set to  0.000000
9/1/2011	7:25:56 PM	BCl3 MFC set to  0.000000
9/1/2011	7:25:56 PM	PHl3 MFC set to  0.000000
9/1/2011	7:25:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:25:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:25:57 PM	Tube furnace set to 0
9/1/2011	7:26:27 PM	H2 valve closed
9/1/2011	7:26:27 PM	BCl3 valve closed
9/1/2011	7:26:27 PM	PH3 valve closed
9/1/2011	7:26:27 PM	SiCl4 pre valve closed
9/1/2011	7:26:27 PM	SiCl4 post valve closed
9/1/2011	7:26:27 PM	Bypass valve closed
9/1/2011	7:26:27 PM	Bubbler valve closed
9/1/2011	7:26:27 PM	Helium valve opened
9/1/2011	7:26:27 PM	Main Vac valve opened
9/1/2011	7:26:27 PM	Helium MFC set to  20.000000
9/1/2011	7:26:27 PM	H2 MFC set to  0.000000
9/1/2011	7:26:27 PM	BCl3 MFC set to  0.000000
9/1/2011	7:26:27 PM	PHl3 MFC set to  0.000000
9/1/2011	7:26:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:26:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:26:27 PM	Tube furnace set to 0
9/1/2011	7:26:57 PM	Helium valve closed
9/1/2011	7:26:57 PM	H2 valve closed
9/1/2011	7:26:57 PM	BCl3 valve closed
9/1/2011	7:26:57 PM	PH3 valve closed
9/1/2011	7:26:57 PM	SiCl4 pre valve closed
9/1/2011	7:26:57 PM	SiCl4 post valve closed
9/1/2011	7:26:57 PM	Bypass valve closed
9/1/2011	7:26:57 PM	Bubbler valve closed
9/1/2011	7:26:57 PM	Main Vac valve opened
9/1/2011	7:26:57 PM	Helium MFC set to  0.000000
9/1/2011	7:26:57 PM	H2 MFC set to  0.000000
9/1/2011	7:26:57 PM	BCl3 MFC set to  0.000000
9/1/2011	7:26:57 PM	PHl3 MFC set to  0.000000
9/1/2011	7:26:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:26:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:26:57 PM	Tube furnace set to 0
9/1/2011	7:27:27 PM	H2 valve closed
9/1/2011	7:27:27 PM	BCl3 valve closed
9/1/2011	7:27:27 PM	PH3 valve closed
9/1/2011	7:27:27 PM	SiCl4 pre valve closed
9/1/2011	7:27:27 PM	SiCl4 post valve closed
9/1/2011	7:27:27 PM	Bypass valve closed
9/1/2011	7:27:27 PM	Bubbler valve closed
9/1/2011	7:27:27 PM	Helium valve opened
9/1/2011	7:27:27 PM	Main Vac valve opened
9/1/2011	7:27:27 PM	Helium MFC set to  20.000000
9/1/2011	7:27:27 PM	H2 MFC set to  0.000000
9/1/2011	7:27:27 PM	BCl3 MFC set to  0.000000
9/1/2011	7:27:27 PM	PHl3 MFC set to  0.000000
9/1/2011	7:27:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:27:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:27:27 PM	Tube furnace set to 0
9/1/2011	7:27:57 PM	Helium valve closed
9/1/2011	7:27:57 PM	H2 valve closed
9/1/2011	7:27:57 PM	BCl3 valve closed
9/1/2011	7:27:57 PM	PH3 valve closed
9/1/2011	7:27:57 PM	SiCl4 pre valve closed
9/1/2011	7:27:57 PM	SiCl4 post valve closed
9/1/2011	7:27:57 PM	Bypass valve closed
9/1/2011	7:27:57 PM	Bubbler valve closed
9/1/2011	7:27:57 PM	Main Vac valve opened
9/1/2011	7:27:57 PM	Helium MFC set to  0.000000
9/1/2011	7:27:57 PM	H2 MFC set to  0.000000
9/1/2011	7:27:57 PM	BCl3 MFC set to  0.000000
9/1/2011	7:27:57 PM	PHl3 MFC set to  0.000000
9/1/2011	7:27:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:27:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:27:57 PM	Tube furnace set to 0
9/1/2011	7:28:28 PM	H2 valve closed
9/1/2011	7:28:28 PM	BCl3 valve closed
9/1/2011	7:28:28 PM	PH3 valve closed
9/1/2011	7:28:28 PM	SiCl4 pre valve closed
9/1/2011	7:28:28 PM	SiCl4 post valve closed
9/1/2011	7:28:28 PM	Bypass valve closed
9/1/2011	7:28:28 PM	Bubbler valve closed
9/1/2011	7:28:28 PM	Helium valve opened
9/1/2011	7:28:28 PM	Main Vac valve opened
9/1/2011	7:28:28 PM	Helium MFC set to  20.000000
9/1/2011	7:28:28 PM	H2 MFC set to  0.000000
9/1/2011	7:28:28 PM	BCl3 MFC set to  0.000000
9/1/2011	7:28:28 PM	PHl3 MFC set to  0.000000
9/1/2011	7:28:28 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:28:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:28:28 PM	Tube furnace set to 0
9/1/2011	7:28:58 PM	Helium valve closed
9/1/2011	7:28:58 PM	H2 valve closed
9/1/2011	7:28:58 PM	BCl3 valve closed
9/1/2011	7:28:58 PM	PH3 valve closed
9/1/2011	7:28:58 PM	SiCl4 pre valve closed
9/1/2011	7:28:58 PM	SiCl4 post valve closed
9/1/2011	7:28:58 PM	Bypass valve closed
9/1/2011	7:28:58 PM	Bubbler valve closed
9/1/2011	7:28:58 PM	Main Vac valve opened
9/1/2011	7:28:58 PM	Helium MFC set to  0.000000
9/1/2011	7:28:58 PM	H2 MFC set to  0.000000
9/1/2011	7:28:58 PM	BCl3 MFC set to  0.000000
9/1/2011	7:28:58 PM	PHl3 MFC set to  0.000000
9/1/2011	7:28:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:28:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:28:58 PM	Tube furnace set to 0
9/1/2011	7:29:28 PM	H2 valve closed
9/1/2011	7:29:28 PM	BCl3 valve closed
9/1/2011	7:29:28 PM	PH3 valve closed
9/1/2011	7:29:28 PM	SiCl4 pre valve closed
9/1/2011	7:29:28 PM	SiCl4 post valve closed
9/1/2011	7:29:28 PM	Bypass valve closed
9/1/2011	7:29:28 PM	Bubbler valve closed
9/1/2011	7:29:28 PM	Helium valve opened
9/1/2011	7:29:28 PM	Main Vac valve opened
9/1/2011	7:29:28 PM	Helium MFC set to  20.000000
9/1/2011	7:29:28 PM	H2 MFC set to  0.000000
9/1/2011	7:29:28 PM	BCl3 MFC set to  0.000000
9/1/2011	7:29:28 PM	PHl3 MFC set to  0.000000
9/1/2011	7:29:28 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:29:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:29:28 PM	Tube furnace set to 0
9/1/2011	7:29:58 PM	Helium valve closed
9/1/2011	7:29:58 PM	H2 valve closed
9/1/2011	7:29:58 PM	BCl3 valve closed
9/1/2011	7:29:58 PM	PH3 valve closed
9/1/2011	7:29:58 PM	SiCl4 pre valve closed
9/1/2011	7:29:58 PM	SiCl4 post valve closed
9/1/2011	7:29:58 PM	Bypass valve closed
9/1/2011	7:29:58 PM	Bubbler valve closed
9/1/2011	7:29:58 PM	Main Vac valve opened
9/1/2011	7:29:58 PM	Helium MFC set to  0.000000
9/1/2011	7:29:58 PM	H2 MFC set to  0.000000
9/1/2011	7:29:58 PM	BCl3 MFC set to  0.000000
9/1/2011	7:29:58 PM	PHl3 MFC set to  0.000000
9/1/2011	7:29:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:29:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:29:58 PM	Tube furnace set to 0
9/1/2011	7:29:59 PM	Run finished at 7:29 PM
9/1/2011	7:29:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/1/2011	7:32:18 PM	Recipe started at 7:32 PM
9/1/2011	7:32:18 PM	Helium valve closed
9/1/2011	7:32:18 PM	H2 valve closed
9/1/2011	7:32:18 PM	BCl3 valve closed
9/1/2011	7:32:18 PM	PH3 valve closed
9/1/2011	7:32:18 PM	SiCl4 pre valve closed
9/1/2011	7:32:18 PM	SiCl4 post valve closed
9/1/2011	7:32:18 PM	Bypass valve closed
9/1/2011	7:32:18 PM	Bubbler valve closed
9/1/2011	7:32:18 PM	Main Vac valve opened
9/1/2011	7:32:18 PM	Helium MFC set to  0.000000
9/1/2011	7:32:18 PM	H2 MFC set to  0.000000
9/1/2011	7:32:18 PM	BCl3 MFC set to  0.000000
9/1/2011	7:32:18 PM	PHl3 MFC set to  0.000000
9/1/2011	7:32:18 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:32:18 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:32:18 PM	Tube furnace set to 0
9/1/2011	7:32:48 PM	H2 valve closed
9/1/2011	7:32:48 PM	BCl3 valve closed
9/1/2011	7:32:48 PM	PH3 valve closed
9/1/2011	7:32:48 PM	SiCl4 pre valve closed
9/1/2011	7:32:48 PM	SiCl4 post valve closed
9/1/2011	7:32:48 PM	Bypass valve closed
9/1/2011	7:32:48 PM	Bubbler valve closed
9/1/2011	7:32:48 PM	Helium valve opened
9/1/2011	7:32:48 PM	Main Vac valve opened
9/1/2011	7:32:48 PM	Helium MFC set to  20.000000
9/1/2011	7:32:48 PM	H2 MFC set to  0.000000
9/1/2011	7:32:48 PM	BCl3 MFC set to  0.000000
9/1/2011	7:32:48 PM	PHl3 MFC set to  0.000000
9/1/2011	7:32:48 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:32:48 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:32:48 PM	Tube furnace set to 0
9/1/2011	7:33:18 PM	Helium valve closed
9/1/2011	7:33:18 PM	H2 valve closed
9/1/2011	7:33:18 PM	BCl3 valve closed
9/1/2011	7:33:18 PM	PH3 valve closed
9/1/2011	7:33:18 PM	SiCl4 pre valve closed
9/1/2011	7:33:18 PM	SiCl4 post valve closed
9/1/2011	7:33:18 PM	Bypass valve closed
9/1/2011	7:33:18 PM	Bubbler valve closed
9/1/2011	7:33:18 PM	Main Vac valve opened
9/1/2011	7:33:18 PM	Helium MFC set to  0.000000
9/1/2011	7:33:18 PM	H2 MFC set to  0.000000
9/1/2011	7:33:18 PM	BCl3 MFC set to  0.000000
9/1/2011	7:33:18 PM	PHl3 MFC set to  0.000000
9/1/2011	7:33:18 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:33:18 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:33:18 PM	Tube furnace set to 0
9/1/2011	7:33:48 PM	H2 valve closed
9/1/2011	7:33:48 PM	BCl3 valve closed
9/1/2011	7:33:48 PM	PH3 valve closed
9/1/2011	7:33:48 PM	SiCl4 pre valve closed
9/1/2011	7:33:48 PM	SiCl4 post valve closed
9/1/2011	7:33:48 PM	Bypass valve closed
9/1/2011	7:33:48 PM	Bubbler valve closed
9/1/2011	7:33:48 PM	Helium valve opened
9/1/2011	7:33:48 PM	Main Vac valve opened
9/1/2011	7:33:48 PM	Helium MFC set to  20.000000
9/1/2011	7:33:48 PM	H2 MFC set to  0.000000
9/1/2011	7:33:48 PM	BCl3 MFC set to  0.000000
9/1/2011	7:33:48 PM	PHl3 MFC set to  0.000000
9/1/2011	7:33:48 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:33:48 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:33:49 PM	Tube furnace set to 0
9/1/2011	7:34:19 PM	Helium valve closed
9/1/2011	7:34:19 PM	H2 valve closed
9/1/2011	7:34:19 PM	BCl3 valve closed
9/1/2011	7:34:19 PM	PH3 valve closed
9/1/2011	7:34:19 PM	SiCl4 pre valve closed
9/1/2011	7:34:19 PM	SiCl4 post valve closed
9/1/2011	7:34:19 PM	Bypass valve closed
9/1/2011	7:34:19 PM	Bubbler valve closed
9/1/2011	7:34:19 PM	Main Vac valve opened
9/1/2011	7:34:19 PM	Helium MFC set to  0.000000
9/1/2011	7:34:19 PM	H2 MFC set to  0.000000
9/1/2011	7:34:19 PM	BCl3 MFC set to  0.000000
9/1/2011	7:34:19 PM	PHl3 MFC set to  0.000000
9/1/2011	7:34:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:34:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:34:19 PM	Tube furnace set to 0
9/1/2011	7:34:49 PM	H2 valve closed
9/1/2011	7:34:49 PM	BCl3 valve closed
9/1/2011	7:34:49 PM	PH3 valve closed
9/1/2011	7:34:49 PM	SiCl4 pre valve closed
9/1/2011	7:34:49 PM	SiCl4 post valve closed
9/1/2011	7:34:49 PM	Bypass valve closed
9/1/2011	7:34:49 PM	Bubbler valve closed
9/1/2011	7:34:49 PM	Helium valve opened
9/1/2011	7:34:49 PM	Main Vac valve opened
9/1/2011	7:34:49 PM	Helium MFC set to  20.000000
9/1/2011	7:34:49 PM	H2 MFC set to  0.000000
9/1/2011	7:34:49 PM	BCl3 MFC set to  0.000000
9/1/2011	7:34:49 PM	PHl3 MFC set to  0.000000
9/1/2011	7:34:49 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:34:49 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:34:49 PM	Tube furnace set to 0
9/1/2011	7:35:19 PM	Helium valve closed
9/1/2011	7:35:19 PM	H2 valve closed
9/1/2011	7:35:19 PM	BCl3 valve closed
9/1/2011	7:35:19 PM	PH3 valve closed
9/1/2011	7:35:19 PM	SiCl4 pre valve closed
9/1/2011	7:35:19 PM	SiCl4 post valve closed
9/1/2011	7:35:19 PM	Bypass valve closed
9/1/2011	7:35:19 PM	Bubbler valve closed
9/1/2011	7:35:19 PM	Main Vac valve opened
9/1/2011	7:35:19 PM	Helium MFC set to  0.000000
9/1/2011	7:35:19 PM	H2 MFC set to  0.000000
9/1/2011	7:35:19 PM	BCl3 MFC set to  0.000000
9/1/2011	7:35:19 PM	PHl3 MFC set to  0.000000
9/1/2011	7:35:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:35:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:35:19 PM	Tube furnace set to 0
9/1/2011	7:35:49 PM	H2 valve closed
9/1/2011	7:35:49 PM	BCl3 valve closed
9/1/2011	7:35:49 PM	PH3 valve closed
9/1/2011	7:35:49 PM	SiCl4 pre valve closed
9/1/2011	7:35:49 PM	SiCl4 post valve closed
9/1/2011	7:35:49 PM	Bypass valve closed
9/1/2011	7:35:49 PM	Bubbler valve closed
9/1/2011	7:35:49 PM	Helium valve opened
9/1/2011	7:35:49 PM	Main Vac valve opened
9/1/2011	7:35:49 PM	Helium MFC set to  20.000000
9/1/2011	7:35:49 PM	H2 MFC set to  0.000000
9/1/2011	7:35:49 PM	BCl3 MFC set to  0.000000
9/1/2011	7:35:49 PM	PHl3 MFC set to  0.000000
9/1/2011	7:35:49 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:35:49 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:35:49 PM	Tube furnace set to 0
9/1/2011	7:36:19 PM	Helium valve closed
9/1/2011	7:36:19 PM	H2 valve closed
9/1/2011	7:36:19 PM	BCl3 valve closed
9/1/2011	7:36:19 PM	PH3 valve closed
9/1/2011	7:36:19 PM	SiCl4 pre valve closed
9/1/2011	7:36:19 PM	SiCl4 post valve closed
9/1/2011	7:36:19 PM	Bypass valve closed
9/1/2011	7:36:19 PM	Bubbler valve closed
9/1/2011	7:36:19 PM	Main Vac valve opened
9/1/2011	7:36:19 PM	Helium MFC set to  0.000000
9/1/2011	7:36:19 PM	H2 MFC set to  0.000000
9/1/2011	7:36:19 PM	BCl3 MFC set to  0.000000
9/1/2011	7:36:19 PM	PHl3 MFC set to  0.000000
9/1/2011	7:36:19 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:36:19 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:36:19 PM	Tube furnace set to 0
9/1/2011	7:36:50 PM	H2 valve closed
9/1/2011	7:36:50 PM	BCl3 valve closed
9/1/2011	7:36:50 PM	PH3 valve closed
9/1/2011	7:36:50 PM	SiCl4 pre valve closed
9/1/2011	7:36:50 PM	SiCl4 post valve closed
9/1/2011	7:36:50 PM	Bypass valve closed
9/1/2011	7:36:50 PM	Bubbler valve closed
9/1/2011	7:36:50 PM	Helium valve opened
9/1/2011	7:36:50 PM	Main Vac valve opened
9/1/2011	7:36:50 PM	Helium MFC set to  20.000000
9/1/2011	7:36:50 PM	H2 MFC set to  0.000000
9/1/2011	7:36:50 PM	BCl3 MFC set to  0.000000
9/1/2011	7:36:50 PM	PHl3 MFC set to  0.000000
9/1/2011	7:36:50 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:36:50 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:36:50 PM	Tube furnace set to 0
9/1/2011	7:37:20 PM	Helium valve closed
9/1/2011	7:37:20 PM	H2 valve closed
9/1/2011	7:37:20 PM	BCl3 valve closed
9/1/2011	7:37:20 PM	PH3 valve closed
9/1/2011	7:37:20 PM	SiCl4 pre valve closed
9/1/2011	7:37:20 PM	SiCl4 post valve closed
9/1/2011	7:37:20 PM	Bypass valve closed
9/1/2011	7:37:20 PM	Bubbler valve closed
9/1/2011	7:37:20 PM	Main Vac valve opened
9/1/2011	7:37:20 PM	Helium MFC set to  0.000000
9/1/2011	7:37:20 PM	H2 MFC set to  0.000000
9/1/2011	7:37:20 PM	BCl3 MFC set to  0.000000
9/1/2011	7:37:20 PM	PHl3 MFC set to  0.000000
9/1/2011	7:37:20 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:37:20 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:37:20 PM	Tube furnace set to 0
9/1/2011	7:37:50 PM	H2 valve closed
9/1/2011	7:37:50 PM	BCl3 valve closed
9/1/2011	7:37:50 PM	PH3 valve closed
9/1/2011	7:37:50 PM	SiCl4 pre valve closed
9/1/2011	7:37:50 PM	SiCl4 post valve closed
9/1/2011	7:37:50 PM	Bypass valve closed
9/1/2011	7:37:50 PM	Bubbler valve closed
9/1/2011	7:37:50 PM	Helium valve opened
9/1/2011	7:37:50 PM	Main Vac valve opened
9/1/2011	7:37:50 PM	Helium MFC set to  20.000000
9/1/2011	7:37:50 PM	H2 MFC set to  0.000000
9/1/2011	7:37:50 PM	BCl3 MFC set to  0.000000
9/1/2011	7:37:50 PM	PHl3 MFC set to  0.000000
9/1/2011	7:37:50 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:37:50 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:37:50 PM	Tube furnace set to 0
9/1/2011	7:38:20 PM	Helium valve closed
9/1/2011	7:38:20 PM	H2 valve closed
9/1/2011	7:38:20 PM	BCl3 valve closed
9/1/2011	7:38:20 PM	PH3 valve closed
9/1/2011	7:38:20 PM	SiCl4 pre valve closed
9/1/2011	7:38:20 PM	SiCl4 post valve closed
9/1/2011	7:38:20 PM	Bypass valve closed
9/1/2011	7:38:20 PM	Bubbler valve closed
9/1/2011	7:38:20 PM	Main Vac valve opened
9/1/2011	7:38:20 PM	Helium MFC set to  0.000000
9/1/2011	7:38:20 PM	H2 MFC set to  0.000000
9/1/2011	7:38:20 PM	BCl3 MFC set to  0.000000
9/1/2011	7:38:20 PM	PHl3 MFC set to  0.000000
9/1/2011	7:38:20 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:38:20 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:38:20 PM	Tube furnace set to 0
9/1/2011	7:38:50 PM	H2 valve closed
9/1/2011	7:38:50 PM	BCl3 valve closed
9/1/2011	7:38:50 PM	PH3 valve closed
9/1/2011	7:38:50 PM	SiCl4 pre valve closed
9/1/2011	7:38:50 PM	SiCl4 post valve closed
9/1/2011	7:38:50 PM	Bypass valve closed
9/1/2011	7:38:50 PM	Bubbler valve closed
9/1/2011	7:38:50 PM	Helium valve opened
9/1/2011	7:38:50 PM	Main Vac valve opened
9/1/2011	7:38:50 PM	Helium MFC set to  20.000000
9/1/2011	7:38:50 PM	H2 MFC set to  0.000000
9/1/2011	7:38:50 PM	BCl3 MFC set to  0.000000
9/1/2011	7:38:50 PM	PHl3 MFC set to  0.000000
9/1/2011	7:38:50 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:38:50 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:38:50 PM	Tube furnace set to 0
9/1/2011	7:39:20 PM	Helium valve closed
9/1/2011	7:39:21 PM	H2 valve closed
9/1/2011	7:39:21 PM	BCl3 valve closed
9/1/2011	7:39:21 PM	PH3 valve closed
9/1/2011	7:39:21 PM	SiCl4 pre valve closed
9/1/2011	7:39:21 PM	SiCl4 post valve closed
9/1/2011	7:39:21 PM	Bypass valve closed
9/1/2011	7:39:21 PM	Bubbler valve closed
9/1/2011	7:39:21 PM	Main Vac valve opened
9/1/2011	7:39:21 PM	Helium MFC set to  0.000000
9/1/2011	7:39:21 PM	H2 MFC set to  0.000000
9/1/2011	7:39:21 PM	BCl3 MFC set to  0.000000
9/1/2011	7:39:21 PM	PHl3 MFC set to  0.000000
9/1/2011	7:39:21 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:39:21 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:39:21 PM	Tube furnace set to 0
9/1/2011	7:39:51 PM	H2 valve closed
9/1/2011	7:39:51 PM	BCl3 valve closed
9/1/2011	7:39:51 PM	PH3 valve closed
9/1/2011	7:39:51 PM	SiCl4 pre valve closed
9/1/2011	7:39:51 PM	SiCl4 post valve closed
9/1/2011	7:39:51 PM	Bypass valve closed
9/1/2011	7:39:51 PM	Bubbler valve closed
9/1/2011	7:39:51 PM	Helium valve opened
9/1/2011	7:39:51 PM	Main Vac valve opened
9/1/2011	7:39:51 PM	Helium MFC set to  20.000000
9/1/2011	7:39:51 PM	H2 MFC set to  0.000000
9/1/2011	7:39:51 PM	BCl3 MFC set to  0.000000
9/1/2011	7:39:51 PM	PHl3 MFC set to  0.000000
9/1/2011	7:39:51 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:39:51 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:39:51 PM	Tube furnace set to 0
9/1/2011	7:40:21 PM	Helium valve closed
9/1/2011	7:40:21 PM	H2 valve closed
9/1/2011	7:40:21 PM	BCl3 valve closed
9/1/2011	7:40:21 PM	PH3 valve closed
9/1/2011	7:40:21 PM	SiCl4 pre valve closed
9/1/2011	7:40:21 PM	SiCl4 post valve closed
9/1/2011	7:40:21 PM	Bypass valve closed
9/1/2011	7:40:21 PM	Bubbler valve closed
9/1/2011	7:40:21 PM	Main Vac valve opened
9/1/2011	7:40:21 PM	Helium MFC set to  0.000000
9/1/2011	7:40:21 PM	H2 MFC set to  0.000000
9/1/2011	7:40:21 PM	BCl3 MFC set to  0.000000
9/1/2011	7:40:21 PM	PHl3 MFC set to  0.000000
9/1/2011	7:40:21 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:40:21 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:40:21 PM	Tube furnace set to 0
9/1/2011	7:40:51 PM	H2 valve closed
9/1/2011	7:40:51 PM	BCl3 valve closed
9/1/2011	7:40:51 PM	PH3 valve closed
9/1/2011	7:40:51 PM	SiCl4 pre valve closed
9/1/2011	7:40:51 PM	SiCl4 post valve closed
9/1/2011	7:40:51 PM	Bypass valve closed
9/1/2011	7:40:51 PM	Bubbler valve closed
9/1/2011	7:40:51 PM	Helium valve opened
9/1/2011	7:40:51 PM	Main Vac valve opened
9/1/2011	7:40:51 PM	Helium MFC set to  20.000000
9/1/2011	7:40:51 PM	H2 MFC set to  0.000000
9/1/2011	7:40:51 PM	BCl3 MFC set to  0.000000
9/1/2011	7:40:51 PM	PHl3 MFC set to  0.000000
9/1/2011	7:40:51 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:40:51 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:40:51 PM	Tube furnace set to 0
9/1/2011	7:41:21 PM	Helium valve closed
9/1/2011	7:41:21 PM	H2 valve closed
9/1/2011	7:41:21 PM	BCl3 valve closed
9/1/2011	7:41:21 PM	PH3 valve closed
9/1/2011	7:41:21 PM	SiCl4 pre valve closed
9/1/2011	7:41:21 PM	SiCl4 post valve closed
9/1/2011	7:41:21 PM	Bypass valve closed
9/1/2011	7:41:21 PM	Bubbler valve closed
9/1/2011	7:41:21 PM	Main Vac valve opened
9/1/2011	7:41:21 PM	Helium MFC set to  0.000000
9/1/2011	7:41:21 PM	H2 MFC set to  0.000000
9/1/2011	7:41:21 PM	BCl3 MFC set to  0.000000
9/1/2011	7:41:21 PM	PHl3 MFC set to  0.000000
9/1/2011	7:41:21 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:41:21 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:41:21 PM	Tube furnace set to 0
9/1/2011	7:41:51 PM	H2 valve closed
9/1/2011	7:41:51 PM	BCl3 valve closed
9/1/2011	7:41:51 PM	PH3 valve closed
9/1/2011	7:41:51 PM	SiCl4 pre valve closed
9/1/2011	7:41:51 PM	SiCl4 post valve closed
9/1/2011	7:41:51 PM	Bypass valve closed
9/1/2011	7:41:51 PM	Bubbler valve closed
9/1/2011	7:41:51 PM	Helium valve opened
9/1/2011	7:41:51 PM	Main Vac valve opened
9/1/2011	7:41:52 PM	Helium MFC set to  20.000000
9/1/2011	7:41:52 PM	H2 MFC set to  0.000000
9/1/2011	7:41:52 PM	BCl3 MFC set to  0.000000
9/1/2011	7:41:52 PM	PHl3 MFC set to  0.000000
9/1/2011	7:41:52 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:41:52 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:41:52 PM	Tube furnace set to 0
9/1/2011	7:42:22 PM	Helium valve closed
9/1/2011	7:42:22 PM	H2 valve closed
9/1/2011	7:42:22 PM	BCl3 valve closed
9/1/2011	7:42:22 PM	PH3 valve closed
9/1/2011	7:42:22 PM	SiCl4 pre valve closed
9/1/2011	7:42:22 PM	SiCl4 post valve closed
9/1/2011	7:42:22 PM	Bypass valve closed
9/1/2011	7:42:22 PM	Bubbler valve closed
9/1/2011	7:42:22 PM	Main Vac valve opened
9/1/2011	7:42:22 PM	Helium MFC set to  0.000000
9/1/2011	7:42:22 PM	H2 MFC set to  0.000000
9/1/2011	7:42:22 PM	BCl3 MFC set to  0.000000
9/1/2011	7:42:22 PM	PHl3 MFC set to  0.000000
9/1/2011	7:42:22 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:42:22 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:42:22 PM	Tube furnace set to 0
9/1/2011	7:42:23 PM	Run finished at 7:42 PM
9/1/2011	7:50:36 PM	Main Vac valve closed
9/1/2011	7:50:42 PM	Main Vac valve opened
9/1/2011	7:51:34 PM	Recipe started at 7:51 PM
9/1/2011	7:51:34 PM	Helium valve closed
9/1/2011	7:51:34 PM	H2 valve closed
9/1/2011	7:51:34 PM	BCl3 valve closed
9/1/2011	7:51:34 PM	PH3 valve closed
9/1/2011	7:51:34 PM	SiCl4 pre valve closed
9/1/2011	7:51:34 PM	SiCl4 post valve closed
9/1/2011	7:51:34 PM	Bypass valve closed
9/1/2011	7:51:34 PM	Bubbler valve closed
9/1/2011	7:51:34 PM	Main Vac valve opened
9/1/2011	7:51:34 PM	Helium MFC set to  0.000000
9/1/2011	7:51:34 PM	H2 MFC set to  0.000000
9/1/2011	7:51:34 PM	BCl3 MFC set to  0.000000
9/1/2011	7:51:34 PM	PHl3 MFC set to  0.000000
9/1/2011	7:51:34 PM	SiCl4 MFC set to  0.000000
9/1/2011	7:51:34 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	7:51:34 PM	Tube furnace set to 180
9/1/2011	8:01:34 PM	Helium valve closed
9/1/2011	8:01:34 PM	BCl3 valve closed
9/1/2011	8:01:34 PM	PH3 valve closed
9/1/2011	8:01:34 PM	SiCl4 pre valve closed
9/1/2011	8:01:34 PM	SiCl4 post valve closed
9/1/2011	8:01:34 PM	Main Vac valve closed
9/1/2011	8:01:34 PM	Bypass valve closed
9/1/2011	8:01:34 PM	Bubbler valve closed
9/1/2011	8:01:34 PM	H2 valve opened
9/1/2011	8:01:34 PM	Helium MFC set to  0.000000
9/1/2011	8:01:34 PM	H2 MFC set to  500.000000
9/1/2011	8:01:34 PM	BCl3 MFC set to  0.000000
9/1/2011	8:01:34 PM	PHl3 MFC set to  0.000000
9/1/2011	8:01:34 PM	SiCl4 MFC set to  0.000000
9/1/2011	8:01:34 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:01:35 PM	Tube furnace set to 1000
9/1/2011	8:02:39 PM	Helium valve closed
9/1/2011	8:02:39 PM	BCl3 valve closed
9/1/2011	8:02:39 PM	PH3 valve closed
9/1/2011	8:02:39 PM	SiCl4 pre valve closed
9/1/2011	8:02:39 PM	SiCl4 post valve closed
9/1/2011	8:02:39 PM	Main Vac valve closed
9/1/2011	8:02:39 PM	Bypass valve closed
9/1/2011	8:02:39 PM	H2 valve opened
9/1/2011	8:02:39 PM	Bubbler valve opened
9/1/2011	8:02:39 PM	Helium MFC set to  0.000000
9/1/2011	8:02:39 PM	H2 MFC set to  500.000000
9/1/2011	8:02:39 PM	BCl3 MFC set to  0.000000
9/1/2011	8:02:39 PM	PHl3 MFC set to  0.000000
9/1/2011	8:02:39 PM	SiCl4 MFC set to  0.000000
9/1/2011	8:02:39 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:02:39 PM	Tube furnace set to 1000
9/1/2011	8:02:40 PM	Helium valve closed
9/1/2011	8:02:40 PM	BCl3 valve closed
9/1/2011	8:02:40 PM	PH3 valve closed
9/1/2011	8:02:40 PM	SiCl4 pre valve closed
9/1/2011	8:02:40 PM	SiCl4 post valve closed
9/1/2011	8:02:40 PM	Main Vac valve closed
9/1/2011	8:02:40 PM	Bypass valve closed
9/1/2011	8:02:40 PM	H2 valve opened
9/1/2011	8:02:40 PM	Bubbler valve opened
9/1/2011	8:02:40 PM	Helium MFC set to  0.000000
9/1/2011	8:02:40 PM	H2 MFC set to  500.000000
9/1/2011	8:02:40 PM	BCl3 MFC set to  0.000000
9/1/2011	8:02:40 PM	PHl3 MFC set to  0.000000
9/1/2011	8:02:40 PM	SiCl4 MFC set to  0.000000
9/1/2011	8:02:40 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:02:40 PM	Tube furnace set to 1000
9/1/2011	8:22:40 PM	Helium valve closed
9/1/2011	8:22:40 PM	PH3 valve closed
9/1/2011	8:22:40 PM	Main Vac valve closed
9/1/2011	8:22:40 PM	Bypass valve closed
9/1/2011	8:22:40 PM	H2 valve opened
9/1/2011	8:22:40 PM	BCl3 valve opened
9/1/2011	8:22:40 PM	SiCl4 pre valve opened
9/1/2011	8:22:40 PM	SiCl4 post valve opened
9/1/2011	8:22:40 PM	Bubbler valve opened
9/1/2011	8:22:40 PM	Helium MFC set to  0.000000
9/1/2011	8:22:40 PM	H2 MFC set to  500.000000
9/1/2011	8:22:40 PM	BCl3 MFC set to  2.500000
9/1/2011	8:22:40 PM	PHl3 MFC set to  0.000000
9/1/2011	8:22:40 PM	SiCl4 MFC set to  50.000000
9/1/2011	8:22:40 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:22:40 PM	Tube furnace set to 1000
9/1/2011	8:34:40 PM	Helium valve closed
9/1/2011	8:34:40 PM	PH3 valve closed
9/1/2011	8:34:40 PM	Main Vac valve closed
9/1/2011	8:34:40 PM	Bypass valve closed
9/1/2011	8:34:40 PM	H2 valve opened
9/1/2011	8:34:40 PM	BCl3 valve opened
9/1/2011	8:34:40 PM	SiCl4 pre valve opened
9/1/2011	8:34:40 PM	SiCl4 post valve opened
9/1/2011	8:34:40 PM	Bubbler valve opened
9/1/2011	8:34:40 PM	Helium MFC set to  0.000000
9/1/2011	8:34:40 PM	H2 MFC set to  500.000000
9/1/2011	8:34:40 PM	BCl3 MFC set to  15.000000
9/1/2011	8:34:40 PM	PHl3 MFC set to  0.000000
9/1/2011	8:34:40 PM	SiCl4 MFC set to  50.000000
9/1/2011	8:34:40 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:34:40 PM	Tube furnace set to 1000
9/1/2011	8:35:10 PM	Helium valve closed
9/1/2011	8:35:10 PM	BCl3 valve closed
9/1/2011	8:35:10 PM	PH3 valve closed
9/1/2011	8:35:10 PM	SiCl4 pre valve closed
9/1/2011	8:35:10 PM	SiCl4 post valve closed
9/1/2011	8:35:10 PM	Main Vac valve closed
9/1/2011	8:35:10 PM	Bypass valve closed
9/1/2011	8:35:10 PM	H2 valve opened
9/1/2011	8:35:10 PM	Bubbler valve opened
9/1/2011	8:35:10 PM	Helium MFC set to  0.000000
9/1/2011	8:35:10 PM	H2 MFC set to  500.000000
9/1/2011	8:35:10 PM	BCl3 MFC set to  0.000000
9/1/2011	8:35:10 PM	PHl3 MFC set to  0.000000
9/1/2011	8:35:10 PM	SiCl4 MFC set to  0.000000
9/1/2011	8:35:10 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:35:11 PM	Tube furnace set to 750
9/1/2011	8:40:11 PM	H2 valve closed
9/1/2011	8:40:11 PM	BCl3 valve closed
9/1/2011	8:40:11 PM	PH3 valve closed
9/1/2011	8:40:11 PM	SiCl4 pre valve closed
9/1/2011	8:40:11 PM	SiCl4 post valve closed
9/1/2011	8:40:11 PM	Main Vac valve closed
9/1/2011	8:40:11 PM	Bypass valve closed
9/1/2011	8:40:11 PM	Helium valve opened
9/1/2011	8:40:11 PM	Bubbler valve opened
9/1/2011	8:40:11 PM	Helium MFC set to  500.000000
9/1/2011	8:40:11 PM	H2 MFC set to  0.000000
9/1/2011	8:40:11 PM	BCl3 MFC set to  0.000000
9/1/2011	8:40:11 PM	PHl3 MFC set to  0.000000
9/1/2011	8:40:11 PM	SiCl4 MFC set to  0.000000
9/1/2011	8:40:11 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	8:40:11 PM	Tube furnace set to 0
9/1/2011	9:00:11 PM	Helium valve closed
9/1/2011	9:00:11 PM	H2 valve closed
9/1/2011	9:00:11 PM	BCl3 valve closed
9/1/2011	9:00:11 PM	PH3 valve closed
9/1/2011	9:00:11 PM	SiCl4 pre valve closed
9/1/2011	9:00:11 PM	SiCl4 post valve closed
9/1/2011	9:00:11 PM	Main Vac valve closed
9/1/2011	9:00:11 PM	Bypass valve closed
9/1/2011	9:00:11 PM	Bubbler valve closed
9/1/2011	9:00:11 PM	Helium MFC set to  0.000000
9/1/2011	9:00:11 PM	H2 MFC set to  0.000000
9/1/2011	9:00:11 PM	BCl3 MFC set to  0.000000
9/1/2011	9:00:11 PM	PHl3 MFC set to  0.000000
9/1/2011	9:00:11 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:00:11 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:00:11 PM	Tube furnace set to 0
9/1/2011	9:32:39 PM	Run aborted at 9:32 PM
9/1/2011	9:32:39 PM	Helium valve closed
9/1/2011	9:32:39 PM	H2 valve closed
9/1/2011	9:32:39 PM	BCl3 valve closed
9/1/2011	9:32:39 PM	PH3 valve closed
9/1/2011	9:32:39 PM	SiCl4 pre valve closed
9/1/2011	9:32:39 PM	SiCl4 post valve closed
9/1/2011	9:32:39 PM	Bypass valve closed
9/1/2011	9:32:39 PM	Main Vac valve closed
9/1/2011	9:32:39 PM	Bubbler valve closed
9/1/2011	9:32:39 PM	Helium MFC set to  0.000000
9/1/2011	9:32:39 PM	H2 MFC set to  0.000000
9/1/2011	9:32:39 PM	BCl3 MFC set to  0.000000
9/1/2011	9:32:39 PM	PHl3 MFC set to  0.000000
9/1/2011	9:32:39 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:32:39 PM	Tube furnace set to 0
9/1/2011	9:32:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	9:32:45 PM	Recipe started at 9:32 PM
9/1/2011	9:32:45 PM	Helium valve closed
9/1/2011	9:32:45 PM	H2 valve closed
9/1/2011	9:32:45 PM	BCl3 valve closed
9/1/2011	9:32:45 PM	PH3 valve closed
9/1/2011	9:32:45 PM	SiCl4 pre valve closed
9/1/2011	9:32:45 PM	SiCl4 post valve closed
9/1/2011	9:32:45 PM	Main Vac valve closed
9/1/2011	9:32:45 PM	Bypass valve closed
9/1/2011	9:32:45 PM	Bubbler valve closed
9/1/2011	9:32:45 PM	Helium MFC set to  0.000000
9/1/2011	9:32:45 PM	H2 MFC set to  0.000000
9/1/2011	9:32:45 PM	BCl3 MFC set to  0.000000
9/1/2011	9:32:45 PM	PHl3 MFC set to  0.000000
9/1/2011	9:32:45 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:32:45 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:32:45 PM	Tube furnace set to 0
9/1/2011	9:32:48 PM	H2 valve closed
9/1/2011	9:32:48 PM	BCl3 valve closed
9/1/2011	9:32:48 PM	PH3 valve closed
9/1/2011	9:32:48 PM	SiCl4 pre valve closed
9/1/2011	9:32:48 PM	SiCl4 post valve closed
9/1/2011	9:32:48 PM	Main Vac valve closed
9/1/2011	9:32:48 PM	Bypass valve closed
9/1/2011	9:32:48 PM	Bubbler valve closed
9/1/2011	9:32:48 PM	Helium valve opened
9/1/2011	9:32:48 PM	Helium MFC set to  500.000000
9/1/2011	9:32:48 PM	H2 MFC set to  0.000000
9/1/2011	9:32:48 PM	BCl3 MFC set to  0.000000
9/1/2011	9:32:48 PM	PHl3 MFC set to  0.000000
9/1/2011	9:32:48 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:32:48 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:32:48 PM	Tube furnace set to 0
9/1/2011	9:32:53 PM	Helium valve closed
9/1/2011	9:32:53 PM	H2 valve closed
9/1/2011	9:32:53 PM	BCl3 valve closed
9/1/2011	9:32:54 PM	PH3 valve closed
9/1/2011	9:32:54 PM	SiCl4 pre valve closed
9/1/2011	9:32:54 PM	SiCl4 post valve closed
9/1/2011	9:32:54 PM	Main Vac valve closed
9/1/2011	9:32:54 PM	Bypass valve closed
9/1/2011	9:32:54 PM	Bubbler valve closed
9/1/2011	9:32:54 PM	Helium MFC set to  0.000000
9/1/2011	9:32:54 PM	H2 MFC set to  0.000000
9/1/2011	9:32:54 PM	BCl3 MFC set to  0.000000
9/1/2011	9:32:54 PM	PHl3 MFC set to  0.000000
9/1/2011	9:32:54 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:32:54 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:32:54 PM	Tube furnace set to 0
9/1/2011	9:32:55 PM	Run finished at 9:32 PM
9/1/2011	9:32:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/1/2011	9:35:58 PM	Helium MFC set to  500.000000
9/1/2011	9:35:59 PM	Helium valve opened
9/1/2011	9:36:29 PM	Bubbler valve opened
9/1/2011	9:37:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	9:37:31 PM	Recipe started at 9:37 PM
9/1/2011	9:37:31 PM	Helium valve closed
9/1/2011	9:37:31 PM	H2 valve closed
9/1/2011	9:37:31 PM	BCl3 valve closed
9/1/2011	9:37:31 PM	PH3 valve closed
9/1/2011	9:37:31 PM	SiCl4 pre valve closed
9/1/2011	9:37:31 PM	SiCl4 post valve closed
9/1/2011	9:37:31 PM	Main Vac valve closed
9/1/2011	9:37:31 PM	Bubbler valve closed
9/1/2011	9:37:31 PM	Bypass valve opened
9/1/2011	9:37:31 PM	Helium MFC set to  0.000000
9/1/2011	9:37:31 PM	H2 MFC set to  0.000000
9/1/2011	9:37:31 PM	BCl3 MFC set to  0.000000
9/1/2011	9:37:31 PM	PHl3 MFC set to  0.000000
9/1/2011	9:37:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:37:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:37:31 PM	Tube furnace set to 0
9/1/2011	9:38:27 PM	Helium valve closed
9/1/2011	9:38:27 PM	H2 valve closed
9/1/2011	9:38:27 PM	BCl3 valve closed
9/1/2011	9:38:27 PM	PH3 valve closed
9/1/2011	9:38:27 PM	SiCl4 pre valve closed
9/1/2011	9:38:27 PM	SiCl4 post valve closed
9/1/2011	9:38:27 PM	Main Vac valve closed
9/1/2011	9:38:27 PM	Bubbler valve closed
9/1/2011	9:38:27 PM	Bypass valve opened
9/1/2011	9:38:27 PM	Helium MFC set to  0.000000
9/1/2011	9:38:27 PM	H2 MFC set to  0.000000
9/1/2011	9:38:27 PM	BCl3 MFC set to  0.000000
9/1/2011	9:38:27 PM	PHl3 MFC set to  0.000000
9/1/2011	9:38:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:38:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:38:28 PM	Tube furnace set to 0
9/1/2011	9:39:28 PM	Helium valve closed
9/1/2011	9:39:28 PM	H2 valve closed
9/1/2011	9:39:28 PM	BCl3 valve closed
9/1/2011	9:39:28 PM	PH3 valve closed
9/1/2011	9:39:28 PM	SiCl4 pre valve closed
9/1/2011	9:39:28 PM	SiCl4 post valve closed
9/1/2011	9:39:28 PM	Bypass valve closed
9/1/2011	9:39:28 PM	Bubbler valve closed
9/1/2011	9:39:28 PM	Main Vac valve opened
9/1/2011	9:39:28 PM	Helium MFC set to  0.000000
9/1/2011	9:39:28 PM	H2 MFC set to  0.000000
9/1/2011	9:39:28 PM	BCl3 MFC set to  0.000000
9/1/2011	9:39:28 PM	PHl3 MFC set to  0.000000
9/1/2011	9:39:28 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:39:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:39:28 PM	Tube furnace set to 0
9/1/2011	9:39:29 PM	Run finished at 9:39 PM
9/1/2011	9:39:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/1/2011	9:40:54 PM	Recipe started at 9:40 PM
9/1/2011	9:40:54 PM	Helium valve closed
9/1/2011	9:40:54 PM	H2 valve closed
9/1/2011	9:40:54 PM	BCl3 valve closed
9/1/2011	9:40:54 PM	PH3 valve closed
9/1/2011	9:40:54 PM	SiCl4 pre valve closed
9/1/2011	9:40:54 PM	SiCl4 post valve closed
9/1/2011	9:40:54 PM	Bypass valve closed
9/1/2011	9:40:54 PM	Bubbler valve closed
9/1/2011	9:40:54 PM	Main Vac valve opened
9/1/2011	9:40:54 PM	Helium MFC set to  0.000000
9/1/2011	9:40:54 PM	H2 MFC set to  0.000000
9/1/2011	9:40:54 PM	BCl3 MFC set to  0.000000
9/1/2011	9:40:54 PM	PHl3 MFC set to  0.000000
9/1/2011	9:40:54 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:40:54 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:40:54 PM	Tube furnace set to 0
9/1/2011	9:41:24 PM	H2 valve closed
9/1/2011	9:41:24 PM	BCl3 valve closed
9/1/2011	9:41:24 PM	PH3 valve closed
9/1/2011	9:41:24 PM	SiCl4 pre valve closed
9/1/2011	9:41:24 PM	SiCl4 post valve closed
9/1/2011	9:41:24 PM	Bypass valve closed
9/1/2011	9:41:24 PM	Bubbler valve closed
9/1/2011	9:41:24 PM	Helium valve opened
9/1/2011	9:41:24 PM	Main Vac valve opened
9/1/2011	9:41:24 PM	Helium MFC set to  20.000000
9/1/2011	9:41:24 PM	H2 MFC set to  0.000000
9/1/2011	9:41:24 PM	BCl3 MFC set to  0.000000
9/1/2011	9:41:24 PM	PHl3 MFC set to  0.000000
9/1/2011	9:41:24 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:41:24 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:41:24 PM	Tube furnace set to 0
9/1/2011	9:41:54 PM	Helium valve closed
9/1/2011	9:41:54 PM	H2 valve closed
9/1/2011	9:41:54 PM	BCl3 valve closed
9/1/2011	9:41:54 PM	PH3 valve closed
9/1/2011	9:41:54 PM	SiCl4 pre valve closed
9/1/2011	9:41:54 PM	SiCl4 post valve closed
9/1/2011	9:41:54 PM	Bypass valve closed
9/1/2011	9:41:54 PM	Bubbler valve closed
9/1/2011	9:41:54 PM	Main Vac valve opened
9/1/2011	9:41:54 PM	Helium MFC set to  0.000000
9/1/2011	9:41:54 PM	H2 MFC set to  0.000000
9/1/2011	9:41:54 PM	BCl3 MFC set to  0.000000
9/1/2011	9:41:54 PM	PHl3 MFC set to  0.000000
9/1/2011	9:41:54 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:41:54 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:41:54 PM	Tube furnace set to 0
9/1/2011	9:42:25 PM	H2 valve closed
9/1/2011	9:42:25 PM	BCl3 valve closed
9/1/2011	9:42:25 PM	PH3 valve closed
9/1/2011	9:42:25 PM	SiCl4 pre valve closed
9/1/2011	9:42:25 PM	SiCl4 post valve closed
9/1/2011	9:42:25 PM	Bypass valve closed
9/1/2011	9:42:25 PM	Bubbler valve closed
9/1/2011	9:42:25 PM	Helium valve opened
9/1/2011	9:42:25 PM	Main Vac valve opened
9/1/2011	9:42:25 PM	Helium MFC set to  20.000000
9/1/2011	9:42:25 PM	H2 MFC set to  0.000000
9/1/2011	9:42:25 PM	BCl3 MFC set to  0.000000
9/1/2011	9:42:25 PM	PHl3 MFC set to  0.000000
9/1/2011	9:42:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:42:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:42:25 PM	Tube furnace set to 0
9/1/2011	9:42:55 PM	Helium valve closed
9/1/2011	9:42:55 PM	H2 valve closed
9/1/2011	9:42:55 PM	BCl3 valve closed
9/1/2011	9:42:55 PM	PH3 valve closed
9/1/2011	9:42:55 PM	SiCl4 pre valve closed
9/1/2011	9:42:55 PM	SiCl4 post valve closed
9/1/2011	9:42:55 PM	Bypass valve closed
9/1/2011	9:42:55 PM	Bubbler valve closed
9/1/2011	9:42:55 PM	Main Vac valve opened
9/1/2011	9:42:55 PM	Helium MFC set to  0.000000
9/1/2011	9:42:55 PM	H2 MFC set to  0.000000
9/1/2011	9:42:55 PM	BCl3 MFC set to  0.000000
9/1/2011	9:42:55 PM	PHl3 MFC set to  0.000000
9/1/2011	9:42:55 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:42:55 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:42:55 PM	Tube furnace set to 0
9/1/2011	9:43:25 PM	H2 valve closed
9/1/2011	9:43:25 PM	BCl3 valve closed
9/1/2011	9:43:25 PM	PH3 valve closed
9/1/2011	9:43:25 PM	SiCl4 pre valve closed
9/1/2011	9:43:25 PM	SiCl4 post valve closed
9/1/2011	9:43:25 PM	Bypass valve closed
9/1/2011	9:43:25 PM	Bubbler valve closed
9/1/2011	9:43:25 PM	Helium valve opened
9/1/2011	9:43:25 PM	Main Vac valve opened
9/1/2011	9:43:25 PM	Helium MFC set to  20.000000
9/1/2011	9:43:25 PM	H2 MFC set to  0.000000
9/1/2011	9:43:25 PM	BCl3 MFC set to  0.000000
9/1/2011	9:43:25 PM	PHl3 MFC set to  0.000000
9/1/2011	9:43:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:43:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:43:25 PM	Tube furnace set to 0
9/1/2011	9:43:55 PM	Helium valve closed
9/1/2011	9:43:55 PM	H2 valve closed
9/1/2011	9:43:55 PM	BCl3 valve closed
9/1/2011	9:43:55 PM	PH3 valve closed
9/1/2011	9:43:55 PM	SiCl4 pre valve closed
9/1/2011	9:43:55 PM	SiCl4 post valve closed
9/1/2011	9:43:55 PM	Bypass valve closed
9/1/2011	9:43:55 PM	Bubbler valve closed
9/1/2011	9:43:55 PM	Main Vac valve opened
9/1/2011	9:43:55 PM	Helium MFC set to  0.000000
9/1/2011	9:43:55 PM	H2 MFC set to  0.000000
9/1/2011	9:43:55 PM	BCl3 MFC set to  0.000000
9/1/2011	9:43:55 PM	PHl3 MFC set to  0.000000
9/1/2011	9:43:55 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:43:55 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:43:55 PM	Tube furnace set to 0
9/1/2011	9:44:25 PM	H2 valve closed
9/1/2011	9:44:25 PM	BCl3 valve closed
9/1/2011	9:44:25 PM	PH3 valve closed
9/1/2011	9:44:25 PM	SiCl4 pre valve closed
9/1/2011	9:44:25 PM	SiCl4 post valve closed
9/1/2011	9:44:25 PM	Bypass valve closed
9/1/2011	9:44:25 PM	Bubbler valve closed
9/1/2011	9:44:25 PM	Helium valve opened
9/1/2011	9:44:25 PM	Main Vac valve opened
9/1/2011	9:44:25 PM	Helium MFC set to  20.000000
9/1/2011	9:44:25 PM	H2 MFC set to  0.000000
9/1/2011	9:44:25 PM	BCl3 MFC set to  0.000000
9/1/2011	9:44:25 PM	PHl3 MFC set to  0.000000
9/1/2011	9:44:25 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:44:25 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:44:26 PM	Tube furnace set to 0
9/1/2011	9:44:56 PM	Helium valve closed
9/1/2011	9:44:56 PM	H2 valve closed
9/1/2011	9:44:56 PM	BCl3 valve closed
9/1/2011	9:44:56 PM	PH3 valve closed
9/1/2011	9:44:56 PM	SiCl4 pre valve closed
9/1/2011	9:44:56 PM	SiCl4 post valve closed
9/1/2011	9:44:56 PM	Bypass valve closed
9/1/2011	9:44:56 PM	Bubbler valve closed
9/1/2011	9:44:56 PM	Main Vac valve opened
9/1/2011	9:44:56 PM	Helium MFC set to  0.000000
9/1/2011	9:44:56 PM	H2 MFC set to  0.000000
9/1/2011	9:44:56 PM	BCl3 MFC set to  0.000000
9/1/2011	9:44:56 PM	PHl3 MFC set to  0.000000
9/1/2011	9:44:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:44:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:44:56 PM	Tube furnace set to 0
9/1/2011	9:45:26 PM	H2 valve closed
9/1/2011	9:45:26 PM	BCl3 valve closed
9/1/2011	9:45:26 PM	PH3 valve closed
9/1/2011	9:45:26 PM	SiCl4 pre valve closed
9/1/2011	9:45:26 PM	SiCl4 post valve closed
9/1/2011	9:45:26 PM	Bypass valve closed
9/1/2011	9:45:26 PM	Bubbler valve closed
9/1/2011	9:45:26 PM	Helium valve opened
9/1/2011	9:45:26 PM	Main Vac valve opened
9/1/2011	9:45:26 PM	Helium MFC set to  20.000000
9/1/2011	9:45:26 PM	H2 MFC set to  0.000000
9/1/2011	9:45:26 PM	BCl3 MFC set to  0.000000
9/1/2011	9:45:26 PM	PHl3 MFC set to  0.000000
9/1/2011	9:45:26 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:45:26 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:45:26 PM	Tube furnace set to 0
9/1/2011	9:45:56 PM	Helium valve closed
9/1/2011	9:45:56 PM	H2 valve closed
9/1/2011	9:45:56 PM	BCl3 valve closed
9/1/2011	9:45:56 PM	PH3 valve closed
9/1/2011	9:45:56 PM	SiCl4 pre valve closed
9/1/2011	9:45:56 PM	SiCl4 post valve closed
9/1/2011	9:45:56 PM	Bypass valve closed
9/1/2011	9:45:56 PM	Bubbler valve closed
9/1/2011	9:45:56 PM	Main Vac valve opened
9/1/2011	9:45:56 PM	Helium MFC set to  0.000000
9/1/2011	9:45:56 PM	H2 MFC set to  0.000000
9/1/2011	9:45:56 PM	BCl3 MFC set to  0.000000
9/1/2011	9:45:56 PM	PHl3 MFC set to  0.000000
9/1/2011	9:45:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:45:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:45:56 PM	Tube furnace set to 0
9/1/2011	9:46:26 PM	H2 valve closed
9/1/2011	9:46:26 PM	BCl3 valve closed
9/1/2011	9:46:26 PM	PH3 valve closed
9/1/2011	9:46:26 PM	SiCl4 pre valve closed
9/1/2011	9:46:26 PM	SiCl4 post valve closed
9/1/2011	9:46:26 PM	Bypass valve closed
9/1/2011	9:46:26 PM	Bubbler valve closed
9/1/2011	9:46:26 PM	Helium valve opened
9/1/2011	9:46:26 PM	Main Vac valve opened
9/1/2011	9:46:26 PM	Helium MFC set to  20.000000
9/1/2011	9:46:26 PM	H2 MFC set to  0.000000
9/1/2011	9:46:26 PM	BCl3 MFC set to  0.000000
9/1/2011	9:46:26 PM	PHl3 MFC set to  0.000000
9/1/2011	9:46:26 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:46:26 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:46:26 PM	Tube furnace set to 0
9/1/2011	9:46:56 PM	Helium valve closed
9/1/2011	9:46:56 PM	H2 valve closed
9/1/2011	9:46:56 PM	BCl3 valve closed
9/1/2011	9:46:56 PM	PH3 valve closed
9/1/2011	9:46:56 PM	SiCl4 pre valve closed
9/1/2011	9:46:56 PM	SiCl4 post valve closed
9/1/2011	9:46:56 PM	Bypass valve closed
9/1/2011	9:46:56 PM	Bubbler valve closed
9/1/2011	9:46:56 PM	Main Vac valve opened
9/1/2011	9:46:56 PM	Helium MFC set to  0.000000
9/1/2011	9:46:56 PM	H2 MFC set to  0.000000
9/1/2011	9:46:56 PM	BCl3 MFC set to  0.000000
9/1/2011	9:46:56 PM	PHl3 MFC set to  0.000000
9/1/2011	9:46:56 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:46:56 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:46:57 PM	Tube furnace set to 0
9/1/2011	9:47:27 PM	H2 valve closed
9/1/2011	9:47:27 PM	BCl3 valve closed
9/1/2011	9:47:27 PM	PH3 valve closed
9/1/2011	9:47:27 PM	SiCl4 pre valve closed
9/1/2011	9:47:27 PM	SiCl4 post valve closed
9/1/2011	9:47:27 PM	Bypass valve closed
9/1/2011	9:47:27 PM	Bubbler valve closed
9/1/2011	9:47:27 PM	Helium valve opened
9/1/2011	9:47:27 PM	Main Vac valve opened
9/1/2011	9:47:27 PM	Helium MFC set to  20.000000
9/1/2011	9:47:27 PM	H2 MFC set to  0.000000
9/1/2011	9:47:27 PM	BCl3 MFC set to  0.000000
9/1/2011	9:47:27 PM	PHl3 MFC set to  0.000000
9/1/2011	9:47:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:47:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:47:27 PM	Tube furnace set to 0
9/1/2011	9:47:57 PM	Helium valve closed
9/1/2011	9:47:57 PM	H2 valve closed
9/1/2011	9:47:57 PM	BCl3 valve closed
9/1/2011	9:47:57 PM	PH3 valve closed
9/1/2011	9:47:57 PM	SiCl4 pre valve closed
9/1/2011	9:47:57 PM	SiCl4 post valve closed
9/1/2011	9:47:57 PM	Bypass valve closed
9/1/2011	9:47:57 PM	Bubbler valve closed
9/1/2011	9:47:57 PM	Main Vac valve opened
9/1/2011	9:47:57 PM	Helium MFC set to  0.000000
9/1/2011	9:47:57 PM	H2 MFC set to  0.000000
9/1/2011	9:47:57 PM	BCl3 MFC set to  0.000000
9/1/2011	9:47:57 PM	PHl3 MFC set to  0.000000
9/1/2011	9:47:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:47:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:47:57 PM	Tube furnace set to 0
9/1/2011	9:48:27 PM	H2 valve closed
9/1/2011	9:48:27 PM	BCl3 valve closed
9/1/2011	9:48:27 PM	PH3 valve closed
9/1/2011	9:48:27 PM	SiCl4 pre valve closed
9/1/2011	9:48:27 PM	SiCl4 post valve closed
9/1/2011	9:48:27 PM	Bypass valve closed
9/1/2011	9:48:27 PM	Bubbler valve closed
9/1/2011	9:48:27 PM	Helium valve opened
9/1/2011	9:48:27 PM	Main Vac valve opened
9/1/2011	9:48:27 PM	Helium MFC set to  20.000000
9/1/2011	9:48:27 PM	H2 MFC set to  0.000000
9/1/2011	9:48:27 PM	BCl3 MFC set to  0.000000
9/1/2011	9:48:27 PM	PHl3 MFC set to  0.000000
9/1/2011	9:48:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:48:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:48:27 PM	Tube furnace set to 0
9/1/2011	9:48:57 PM	Helium valve closed
9/1/2011	9:48:57 PM	H2 valve closed
9/1/2011	9:48:57 PM	BCl3 valve closed
9/1/2011	9:48:57 PM	PH3 valve closed
9/1/2011	9:48:57 PM	SiCl4 pre valve closed
9/1/2011	9:48:57 PM	SiCl4 post valve closed
9/1/2011	9:48:57 PM	Bypass valve closed
9/1/2011	9:48:57 PM	Bubbler valve closed
9/1/2011	9:48:57 PM	Main Vac valve opened
9/1/2011	9:48:57 PM	Helium MFC set to  0.000000
9/1/2011	9:48:57 PM	H2 MFC set to  0.000000
9/1/2011	9:48:57 PM	BCl3 MFC set to  0.000000
9/1/2011	9:48:57 PM	PHl3 MFC set to  0.000000
9/1/2011	9:48:57 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:48:57 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:48:57 PM	Tube furnace set to 0
9/1/2011	9:49:27 PM	H2 valve closed
9/1/2011	9:49:27 PM	BCl3 valve closed
9/1/2011	9:49:27 PM	PH3 valve closed
9/1/2011	9:49:27 PM	SiCl4 pre valve closed
9/1/2011	9:49:27 PM	SiCl4 post valve closed
9/1/2011	9:49:27 PM	Bypass valve closed
9/1/2011	9:49:27 PM	Bubbler valve closed
9/1/2011	9:49:27 PM	Helium valve opened
9/1/2011	9:49:27 PM	Main Vac valve opened
9/1/2011	9:49:27 PM	Helium MFC set to  20.000000
9/1/2011	9:49:28 PM	H2 MFC set to  0.000000
9/1/2011	9:49:28 PM	BCl3 MFC set to  0.000000
9/1/2011	9:49:28 PM	PHl3 MFC set to  0.000000
9/1/2011	9:49:28 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:49:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:49:28 PM	Tube furnace set to 0
9/1/2011	9:49:58 PM	Helium valve closed
9/1/2011	9:49:58 PM	H2 valve closed
9/1/2011	9:49:58 PM	BCl3 valve closed
9/1/2011	9:49:58 PM	PH3 valve closed
9/1/2011	9:49:58 PM	SiCl4 pre valve closed
9/1/2011	9:49:58 PM	SiCl4 post valve closed
9/1/2011	9:49:58 PM	Bypass valve closed
9/1/2011	9:49:58 PM	Bubbler valve closed
9/1/2011	9:49:58 PM	Main Vac valve opened
9/1/2011	9:49:58 PM	Helium MFC set to  0.000000
9/1/2011	9:49:58 PM	H2 MFC set to  0.000000
9/1/2011	9:49:58 PM	BCl3 MFC set to  0.000000
9/1/2011	9:49:58 PM	PHl3 MFC set to  0.000000
9/1/2011	9:49:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:49:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:49:58 PM	Tube furnace set to 0
9/1/2011	9:50:28 PM	H2 valve closed
9/1/2011	9:50:28 PM	BCl3 valve closed
9/1/2011	9:50:28 PM	PH3 valve closed
9/1/2011	9:50:28 PM	SiCl4 pre valve closed
9/1/2011	9:50:28 PM	SiCl4 post valve closed
9/1/2011	9:50:28 PM	Bypass valve closed
9/1/2011	9:50:28 PM	Bubbler valve closed
9/1/2011	9:50:28 PM	Helium valve opened
9/1/2011	9:50:28 PM	Main Vac valve opened
9/1/2011	9:50:28 PM	Helium MFC set to  20.000000
9/1/2011	9:50:28 PM	H2 MFC set to  0.000000
9/1/2011	9:50:28 PM	BCl3 MFC set to  0.000000
9/1/2011	9:50:28 PM	PHl3 MFC set to  0.000000
9/1/2011	9:50:28 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:50:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:50:28 PM	Tube furnace set to 0
9/1/2011	9:50:58 PM	Helium valve closed
9/1/2011	9:50:58 PM	H2 valve closed
9/1/2011	9:50:58 PM	BCl3 valve closed
9/1/2011	9:50:58 PM	PH3 valve closed
9/1/2011	9:50:58 PM	SiCl4 pre valve closed
9/1/2011	9:50:58 PM	SiCl4 post valve closed
9/1/2011	9:50:58 PM	Bypass valve closed
9/1/2011	9:50:58 PM	Bubbler valve closed
9/1/2011	9:50:58 PM	Main Vac valve opened
9/1/2011	9:50:58 PM	Helium MFC set to  0.000000
9/1/2011	9:50:58 PM	H2 MFC set to  0.000000
9/1/2011	9:50:58 PM	BCl3 MFC set to  0.000000
9/1/2011	9:50:58 PM	PHl3 MFC set to  0.000000
9/1/2011	9:50:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:50:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:50:58 PM	Tube furnace set to 0
9/1/2011	9:50:59 PM	Run finished at 9:50 PM
9/1/2011	9:56:59 PM	Recipe started at 9:56 PM
9/1/2011	9:56:59 PM	Helium valve closed
9/1/2011	9:56:59 PM	H2 valve closed
9/1/2011	9:56:59 PM	BCl3 valve closed
9/1/2011	9:56:59 PM	PH3 valve closed
9/1/2011	9:56:59 PM	SiCl4 pre valve closed
9/1/2011	9:56:59 PM	SiCl4 post valve closed
9/1/2011	9:56:59 PM	Bypass valve closed
9/1/2011	9:56:59 PM	Bubbler valve closed
9/1/2011	9:56:59 PM	Main Vac valve opened
9/1/2011	9:56:59 PM	Helium MFC set to  0.000000
9/1/2011	9:56:59 PM	H2 MFC set to  0.000000
9/1/2011	9:56:59 PM	BCl3 MFC set to  0.000000
9/1/2011	9:56:59 PM	PHl3 MFC set to  0.000000
9/1/2011	9:56:59 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:56:59 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:56:59 PM	Tube furnace set to 0
9/1/2011	9:57:29 PM	H2 valve closed
9/1/2011	9:57:29 PM	BCl3 valve closed
9/1/2011	9:57:29 PM	PH3 valve closed
9/1/2011	9:57:29 PM	SiCl4 pre valve closed
9/1/2011	9:57:29 PM	SiCl4 post valve closed
9/1/2011	9:57:29 PM	Bypass valve closed
9/1/2011	9:57:29 PM	Bubbler valve closed
9/1/2011	9:57:29 PM	Helium valve opened
9/1/2011	9:57:29 PM	Main Vac valve opened
9/1/2011	9:57:29 PM	Helium MFC set to  20.000000
9/1/2011	9:57:29 PM	H2 MFC set to  0.000000
9/1/2011	9:57:29 PM	BCl3 MFC set to  0.000000
9/1/2011	9:57:29 PM	PHl3 MFC set to  0.000000
9/1/2011	9:57:29 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:57:29 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:57:29 PM	Tube furnace set to 0
9/1/2011	9:57:59 PM	Helium valve closed
9/1/2011	9:57:59 PM	H2 valve closed
9/1/2011	9:57:59 PM	BCl3 valve closed
9/1/2011	9:57:59 PM	PH3 valve closed
9/1/2011	9:57:59 PM	SiCl4 pre valve closed
9/1/2011	9:57:59 PM	SiCl4 post valve closed
9/1/2011	9:57:59 PM	Bypass valve closed
9/1/2011	9:57:59 PM	Bubbler valve closed
9/1/2011	9:57:59 PM	Main Vac valve opened
9/1/2011	9:57:59 PM	Helium MFC set to  0.000000
9/1/2011	9:57:59 PM	H2 MFC set to  0.000000
9/1/2011	9:57:59 PM	BCl3 MFC set to  0.000000
9/1/2011	9:57:59 PM	PHl3 MFC set to  0.000000
9/1/2011	9:57:59 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:57:59 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:58:00 PM	Tube furnace set to 0
9/1/2011	9:58:30 PM	H2 valve closed
9/1/2011	9:58:30 PM	BCl3 valve closed
9/1/2011	9:58:30 PM	PH3 valve closed
9/1/2011	9:58:30 PM	SiCl4 pre valve closed
9/1/2011	9:58:30 PM	SiCl4 post valve closed
9/1/2011	9:58:30 PM	Bypass valve closed
9/1/2011	9:58:30 PM	Bubbler valve closed
9/1/2011	9:58:30 PM	Helium valve opened
9/1/2011	9:58:30 PM	Main Vac valve opened
9/1/2011	9:58:30 PM	Helium MFC set to  20.000000
9/1/2011	9:58:30 PM	H2 MFC set to  0.000000
9/1/2011	9:58:30 PM	BCl3 MFC set to  0.000000
9/1/2011	9:58:30 PM	PHl3 MFC set to  0.000000
9/1/2011	9:58:30 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:58:30 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:58:30 PM	Tube furnace set to 0
9/1/2011	9:59:00 PM	Helium valve closed
9/1/2011	9:59:00 PM	H2 valve closed
9/1/2011	9:59:00 PM	BCl3 valve closed
9/1/2011	9:59:00 PM	PH3 valve closed
9/1/2011	9:59:00 PM	SiCl4 pre valve closed
9/1/2011	9:59:00 PM	SiCl4 post valve closed
9/1/2011	9:59:00 PM	Bypass valve closed
9/1/2011	9:59:00 PM	Bubbler valve closed
9/1/2011	9:59:00 PM	Main Vac valve opened
9/1/2011	9:59:00 PM	Helium MFC set to  0.000000
9/1/2011	9:59:00 PM	H2 MFC set to  0.000000
9/1/2011	9:59:00 PM	BCl3 MFC set to  0.000000
9/1/2011	9:59:00 PM	PHl3 MFC set to  0.000000
9/1/2011	9:59:00 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:59:00 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:59:00 PM	Tube furnace set to 0
9/1/2011	9:59:30 PM	H2 valve closed
9/1/2011	9:59:30 PM	BCl3 valve closed
9/1/2011	9:59:30 PM	PH3 valve closed
9/1/2011	9:59:30 PM	SiCl4 pre valve closed
9/1/2011	9:59:30 PM	SiCl4 post valve closed
9/1/2011	9:59:30 PM	Bypass valve closed
9/1/2011	9:59:30 PM	Bubbler valve closed
9/1/2011	9:59:30 PM	Helium valve opened
9/1/2011	9:59:30 PM	Main Vac valve opened
9/1/2011	9:59:30 PM	Helium MFC set to  20.000000
9/1/2011	9:59:30 PM	H2 MFC set to  0.000000
9/1/2011	9:59:30 PM	BCl3 MFC set to  0.000000
9/1/2011	9:59:30 PM	PHl3 MFC set to  0.000000
9/1/2011	9:59:30 PM	SiCl4 MFC set to  0.000000
9/1/2011	9:59:30 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	9:59:30 PM	Tube furnace set to 0
9/1/2011	10:00:00 PM	Helium valve closed
9/1/2011	10:00:00 PM	H2 valve closed
9/1/2011	10:00:00 PM	BCl3 valve closed
9/1/2011	10:00:00 PM	PH3 valve closed
9/1/2011	10:00:00 PM	SiCl4 pre valve closed
9/1/2011	10:00:00 PM	SiCl4 post valve closed
9/1/2011	10:00:00 PM	Bypass valve closed
9/1/2011	10:00:00 PM	Bubbler valve closed
9/1/2011	10:00:00 PM	Main Vac valve opened
9/1/2011	10:00:00 PM	Helium MFC set to  0.000000
9/1/2011	10:00:00 PM	H2 MFC set to  0.000000
9/1/2011	10:00:00 PM	BCl3 MFC set to  0.000000
9/1/2011	10:00:00 PM	PHl3 MFC set to  0.000000
9/1/2011	10:00:00 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:00:00 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:00:00 PM	Tube furnace set to 0
9/1/2011	10:00:30 PM	H2 valve closed
9/1/2011	10:00:30 PM	BCl3 valve closed
9/1/2011	10:00:30 PM	PH3 valve closed
9/1/2011	10:00:30 PM	SiCl4 pre valve closed
9/1/2011	10:00:30 PM	SiCl4 post valve closed
9/1/2011	10:00:30 PM	Bypass valve closed
9/1/2011	10:00:30 PM	Bubbler valve closed
9/1/2011	10:00:30 PM	Helium valve opened
9/1/2011	10:00:30 PM	Main Vac valve opened
9/1/2011	10:00:30 PM	Helium MFC set to  20.000000
9/1/2011	10:00:30 PM	H2 MFC set to  0.000000
9/1/2011	10:00:30 PM	BCl3 MFC set to  0.000000
9/1/2011	10:00:30 PM	PHl3 MFC set to  0.000000
9/1/2011	10:00:30 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:00:30 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:00:31 PM	Tube furnace set to 0
9/1/2011	10:01:01 PM	Helium valve closed
9/1/2011	10:01:01 PM	H2 valve closed
9/1/2011	10:01:01 PM	BCl3 valve closed
9/1/2011	10:01:01 PM	PH3 valve closed
9/1/2011	10:01:01 PM	SiCl4 pre valve closed
9/1/2011	10:01:01 PM	SiCl4 post valve closed
9/1/2011	10:01:01 PM	Bypass valve closed
9/1/2011	10:01:01 PM	Bubbler valve closed
9/1/2011	10:01:01 PM	Main Vac valve opened
9/1/2011	10:01:01 PM	Helium MFC set to  0.000000
9/1/2011	10:01:01 PM	H2 MFC set to  0.000000
9/1/2011	10:01:01 PM	BCl3 MFC set to  0.000000
9/1/2011	10:01:01 PM	PHl3 MFC set to  0.000000
9/1/2011	10:01:01 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:01:01 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:01:01 PM	Tube furnace set to 0
9/1/2011	10:01:31 PM	H2 valve closed
9/1/2011	10:01:31 PM	BCl3 valve closed
9/1/2011	10:01:31 PM	PH3 valve closed
9/1/2011	10:01:31 PM	SiCl4 pre valve closed
9/1/2011	10:01:31 PM	SiCl4 post valve closed
9/1/2011	10:01:31 PM	Bypass valve closed
9/1/2011	10:01:31 PM	Bubbler valve closed
9/1/2011	10:01:31 PM	Helium valve opened
9/1/2011	10:01:31 PM	Main Vac valve opened
9/1/2011	10:01:31 PM	Helium MFC set to  20.000000
9/1/2011	10:01:31 PM	H2 MFC set to  0.000000
9/1/2011	10:01:31 PM	BCl3 MFC set to  0.000000
9/1/2011	10:01:31 PM	PHl3 MFC set to  0.000000
9/1/2011	10:01:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:01:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:01:31 PM	Tube furnace set to 0
9/1/2011	10:02:01 PM	Helium valve closed
9/1/2011	10:02:01 PM	H2 valve closed
9/1/2011	10:02:01 PM	BCl3 valve closed
9/1/2011	10:02:01 PM	PH3 valve closed
9/1/2011	10:02:01 PM	SiCl4 pre valve closed
9/1/2011	10:02:01 PM	SiCl4 post valve closed
9/1/2011	10:02:01 PM	Bypass valve closed
9/1/2011	10:02:01 PM	Bubbler valve closed
9/1/2011	10:02:01 PM	Main Vac valve opened
9/1/2011	10:02:01 PM	Helium MFC set to  0.000000
9/1/2011	10:02:01 PM	H2 MFC set to  0.000000
9/1/2011	10:02:01 PM	BCl3 MFC set to  0.000000
9/1/2011	10:02:01 PM	PHl3 MFC set to  0.000000
9/1/2011	10:02:01 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:02:01 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:02:01 PM	Tube furnace set to 0
9/1/2011	10:02:31 PM	H2 valve closed
9/1/2011	10:02:31 PM	BCl3 valve closed
9/1/2011	10:02:31 PM	PH3 valve closed
9/1/2011	10:02:31 PM	SiCl4 pre valve closed
9/1/2011	10:02:31 PM	SiCl4 post valve closed
9/1/2011	10:02:31 PM	Bypass valve closed
9/1/2011	10:02:31 PM	Bubbler valve closed
9/1/2011	10:02:31 PM	Helium valve opened
9/1/2011	10:02:31 PM	Main Vac valve opened
9/1/2011	10:02:31 PM	Helium MFC set to  20.000000
9/1/2011	10:02:31 PM	H2 MFC set to  0.000000
9/1/2011	10:02:31 PM	BCl3 MFC set to  0.000000
9/1/2011	10:02:31 PM	PHl3 MFC set to  0.000000
9/1/2011	10:02:31 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:02:31 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:02:31 PM	Tube furnace set to 0
9/1/2011	10:03:01 PM	Helium valve closed
9/1/2011	10:03:01 PM	H2 valve closed
9/1/2011	10:03:01 PM	BCl3 valve closed
9/1/2011	10:03:01 PM	PH3 valve closed
9/1/2011	10:03:01 PM	SiCl4 pre valve closed
9/1/2011	10:03:01 PM	SiCl4 post valve closed
9/1/2011	10:03:01 PM	Bypass valve closed
9/1/2011	10:03:01 PM	Bubbler valve closed
9/1/2011	10:03:01 PM	Main Vac valve opened
9/1/2011	10:03:01 PM	Helium MFC set to  0.000000
9/1/2011	10:03:01 PM	H2 MFC set to  0.000000
9/1/2011	10:03:01 PM	BCl3 MFC set to  0.000000
9/1/2011	10:03:01 PM	PHl3 MFC set to  0.000000
9/1/2011	10:03:01 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:03:01 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:03:02 PM	Tube furnace set to 0
9/1/2011	10:03:32 PM	H2 valve closed
9/1/2011	10:03:32 PM	BCl3 valve closed
9/1/2011	10:03:32 PM	PH3 valve closed
9/1/2011	10:03:32 PM	SiCl4 pre valve closed
9/1/2011	10:03:32 PM	SiCl4 post valve closed
9/1/2011	10:03:32 PM	Bypass valve closed
9/1/2011	10:03:32 PM	Bubbler valve closed
9/1/2011	10:03:32 PM	Helium valve opened
9/1/2011	10:03:32 PM	Main Vac valve opened
9/1/2011	10:03:32 PM	Helium MFC set to  20.000000
9/1/2011	10:03:32 PM	H2 MFC set to  0.000000
9/1/2011	10:03:32 PM	BCl3 MFC set to  0.000000
9/1/2011	10:03:32 PM	PHl3 MFC set to  0.000000
9/1/2011	10:03:32 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:03:32 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:03:32 PM	Tube furnace set to 0
9/1/2011	10:04:02 PM	Helium valve closed
9/1/2011	10:04:02 PM	H2 valve closed
9/1/2011	10:04:02 PM	BCl3 valve closed
9/1/2011	10:04:02 PM	PH3 valve closed
9/1/2011	10:04:02 PM	SiCl4 pre valve closed
9/1/2011	10:04:02 PM	SiCl4 post valve closed
9/1/2011	10:04:02 PM	Bypass valve closed
9/1/2011	10:04:02 PM	Bubbler valve closed
9/1/2011	10:04:02 PM	Main Vac valve opened
9/1/2011	10:04:02 PM	Helium MFC set to  0.000000
9/1/2011	10:04:02 PM	H2 MFC set to  0.000000
9/1/2011	10:04:02 PM	BCl3 MFC set to  0.000000
9/1/2011	10:04:02 PM	PHl3 MFC set to  0.000000
9/1/2011	10:04:02 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:04:02 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:04:02 PM	Tube furnace set to 0
9/1/2011	10:04:30 PM	Run aborted at 10:04 PM
9/1/2011	10:04:30 PM	Helium valve closed
9/1/2011	10:04:30 PM	H2 valve closed
9/1/2011	10:04:30 PM	BCl3 valve closed
9/1/2011	10:04:30 PM	PH3 valve closed
9/1/2011	10:04:30 PM	SiCl4 pre valve closed
9/1/2011	10:04:30 PM	SiCl4 post valve closed
9/1/2011	10:04:30 PM	Bypass valve closed
9/1/2011	10:04:30 PM	Main Vac valve closed
9/1/2011	10:04:30 PM	Bubbler valve closed
9/1/2011	10:04:30 PM	Helium MFC set to  0.000000
9/1/2011	10:04:30 PM	H2 MFC set to  0.000000
9/1/2011	10:04:30 PM	BCl3 MFC set to  0.000000
9/1/2011	10:04:30 PM	PHl3 MFC set to  0.000000
9/1/2011	10:04:30 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:04:30 PM	Tube furnace set to 0
9/1/2011	10:04:39 PM	Main Vac valve opened
9/1/2011	10:04:53 PM	Main Vac valve closed
9/1/2011	10:04:58 PM	Main Vac valve opened
9/1/2011	10:08:07 PM	Main Vac valve closed
9/1/2011	10:08:11 PM	Main Vac valve opened
9/1/2011	10:08:21 PM	Recipe started at 10:08 PM
9/1/2011	10:08:21 PM	Helium valve closed
9/1/2011	10:08:21 PM	H2 valve closed
9/1/2011	10:08:21 PM	BCl3 valve closed
9/1/2011	10:08:21 PM	PH3 valve closed
9/1/2011	10:08:21 PM	SiCl4 pre valve closed
9/1/2011	10:08:21 PM	SiCl4 post valve closed
9/1/2011	10:08:21 PM	Bypass valve closed
9/1/2011	10:08:21 PM	Bubbler valve closed
9/1/2011	10:08:21 PM	Main Vac valve opened
9/1/2011	10:08:21 PM	Helium MFC set to  0.000000
9/1/2011	10:08:22 PM	H2 MFC set to  0.000000
9/1/2011	10:08:22 PM	BCl3 MFC set to  0.000000
9/1/2011	10:08:22 PM	PHl3 MFC set to  0.000000
9/1/2011	10:08:22 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:08:22 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:08:22 PM	Tube furnace set to 180
9/1/2011	10:23:22 PM	Helium valve closed
9/1/2011	10:23:22 PM	BCl3 valve closed
9/1/2011	10:23:22 PM	PH3 valve closed
9/1/2011	10:23:22 PM	SiCl4 pre valve closed
9/1/2011	10:23:22 PM	SiCl4 post valve closed
9/1/2011	10:23:22 PM	Main Vac valve closed
9/1/2011	10:23:22 PM	Bypass valve closed
9/1/2011	10:23:22 PM	Bubbler valve closed
9/1/2011	10:23:22 PM	H2 valve opened
9/1/2011	10:23:22 PM	Helium MFC set to  0.000000
9/1/2011	10:23:22 PM	H2 MFC set to  500.000000
9/1/2011	10:23:22 PM	BCl3 MFC set to  0.000000
9/1/2011	10:23:22 PM	PHl3 MFC set to  0.000000
9/1/2011	10:23:22 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:23:22 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:23:22 PM	Tube furnace set to 1000
9/1/2011	10:24:26 PM	Helium valve closed
9/1/2011	10:24:26 PM	BCl3 valve closed
9/1/2011	10:24:26 PM	PH3 valve closed
9/1/2011	10:24:26 PM	SiCl4 pre valve closed
9/1/2011	10:24:26 PM	SiCl4 post valve closed
9/1/2011	10:24:26 PM	Main Vac valve closed
9/1/2011	10:24:26 PM	Bypass valve closed
9/1/2011	10:24:26 PM	H2 valve opened
9/1/2011	10:24:26 PM	Bubbler valve opened
9/1/2011	10:24:26 PM	Helium MFC set to  0.000000
9/1/2011	10:24:26 PM	H2 MFC set to  500.000000
9/1/2011	10:24:26 PM	BCl3 MFC set to  0.000000
9/1/2011	10:24:26 PM	PHl3 MFC set to  0.000000
9/1/2011	10:24:26 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:24:26 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:24:26 PM	Tube furnace set to 1000
9/1/2011	10:24:27 PM	Helium valve closed
9/1/2011	10:24:27 PM	BCl3 valve closed
9/1/2011	10:24:27 PM	PH3 valve closed
9/1/2011	10:24:27 PM	SiCl4 pre valve closed
9/1/2011	10:24:27 PM	SiCl4 post valve closed
9/1/2011	10:24:27 PM	Main Vac valve closed
9/1/2011	10:24:27 PM	Bypass valve closed
9/1/2011	10:24:27 PM	H2 valve opened
9/1/2011	10:24:27 PM	Bubbler valve opened
9/1/2011	10:24:27 PM	Helium MFC set to  0.000000
9/1/2011	10:24:27 PM	H2 MFC set to  500.000000
9/1/2011	10:24:27 PM	BCl3 MFC set to  0.000000
9/1/2011	10:24:27 PM	PHl3 MFC set to  0.000000
9/1/2011	10:24:27 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:24:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:24:27 PM	Tube furnace set to 1000
9/1/2011	10:44:27 PM	Helium valve closed
9/1/2011	10:44:27 PM	PH3 valve closed
9/1/2011	10:44:27 PM	Main Vac valve closed
9/1/2011	10:44:27 PM	Bypass valve closed
9/1/2011	10:44:27 PM	H2 valve opened
9/1/2011	10:44:27 PM	BCl3 valve opened
9/1/2011	10:44:27 PM	SiCl4 pre valve opened
9/1/2011	10:44:27 PM	SiCl4 post valve opened
9/1/2011	10:44:27 PM	Bubbler valve opened
9/1/2011	10:44:27 PM	Helium MFC set to  0.000000
9/1/2011	10:44:27 PM	H2 MFC set to  500.000000
9/1/2011	10:44:27 PM	BCl3 MFC set to  2.500000
9/1/2011	10:44:27 PM	PHl3 MFC set to  0.000000
9/1/2011	10:44:27 PM	SiCl4 MFC set to  50.000000
9/1/2011	10:44:27 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:44:28 PM	Tube furnace set to 1000
9/1/2011	10:56:28 PM	Helium valve closed
9/1/2011	10:56:28 PM	PH3 valve closed
9/1/2011	10:56:28 PM	Main Vac valve closed
9/1/2011	10:56:28 PM	Bypass valve closed
9/1/2011	10:56:28 PM	H2 valve opened
9/1/2011	10:56:28 PM	BCl3 valve opened
9/1/2011	10:56:28 PM	SiCl4 pre valve opened
9/1/2011	10:56:28 PM	SiCl4 post valve opened
9/1/2011	10:56:28 PM	Bubbler valve opened
9/1/2011	10:56:28 PM	Helium MFC set to  0.000000
9/1/2011	10:56:28 PM	H2 MFC set to  500.000000
9/1/2011	10:56:28 PM	BCl3 MFC set to  25.000000
9/1/2011	10:56:28 PM	PHl3 MFC set to  0.000000
9/1/2011	10:56:28 PM	SiCl4 MFC set to  50.000000
9/1/2011	10:56:28 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:56:28 PM	Tube furnace set to 1000
9/1/2011	10:56:58 PM	Helium valve closed
9/1/2011	10:56:58 PM	BCl3 valve closed
9/1/2011	10:56:58 PM	PH3 valve closed
9/1/2011	10:56:58 PM	SiCl4 pre valve closed
9/1/2011	10:56:58 PM	SiCl4 post valve closed
9/1/2011	10:56:58 PM	Main Vac valve closed
9/1/2011	10:56:58 PM	Bypass valve closed
9/1/2011	10:56:58 PM	H2 valve opened
9/1/2011	10:56:58 PM	Bubbler valve opened
9/1/2011	10:56:58 PM	Helium MFC set to  0.000000
9/1/2011	10:56:58 PM	H2 MFC set to  500.000000
9/1/2011	10:56:58 PM	BCl3 MFC set to  0.000000
9/1/2011	10:56:58 PM	PHl3 MFC set to  0.000000
9/1/2011	10:56:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	10:56:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	10:56:58 PM	Tube furnace set to 750
9/1/2011	11:01:58 PM	H2 valve closed
9/1/2011	11:01:58 PM	BCl3 valve closed
9/1/2011	11:01:58 PM	PH3 valve closed
9/1/2011	11:01:58 PM	SiCl4 pre valve closed
9/1/2011	11:01:58 PM	SiCl4 post valve closed
9/1/2011	11:01:58 PM	Main Vac valve closed
9/1/2011	11:01:58 PM	Bypass valve closed
9/1/2011	11:01:58 PM	Helium valve opened
9/1/2011	11:01:58 PM	Bubbler valve opened
9/1/2011	11:01:58 PM	Helium MFC set to  500.000000
9/1/2011	11:01:58 PM	H2 MFC set to  0.000000
9/1/2011	11:01:58 PM	BCl3 MFC set to  0.000000
9/1/2011	11:01:58 PM	PHl3 MFC set to  0.000000
9/1/2011	11:01:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	11:01:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:01:58 PM	Tube furnace set to 0
9/1/2011	11:21:58 PM	Helium valve closed
9/1/2011	11:21:58 PM	H2 valve closed
9/1/2011	11:21:58 PM	BCl3 valve closed
9/1/2011	11:21:58 PM	PH3 valve closed
9/1/2011	11:21:58 PM	SiCl4 pre valve closed
9/1/2011	11:21:58 PM	SiCl4 post valve closed
9/1/2011	11:21:58 PM	Main Vac valve closed
9/1/2011	11:21:58 PM	Bypass valve closed
9/1/2011	11:21:58 PM	Bubbler valve closed
9/1/2011	11:21:58 PM	Helium MFC set to  0.000000
9/1/2011	11:21:58 PM	H2 MFC set to  0.000000
9/1/2011	11:21:58 PM	BCl3 MFC set to  0.000000
9/1/2011	11:21:58 PM	PHl3 MFC set to  0.000000
9/1/2011	11:21:58 PM	SiCl4 MFC set to  0.000000
9/1/2011	11:21:58 PM	Bypass solenoid MFC set to  0.000000
9/1/2011	11:21:58 PM	Tube furnace set to 0
